The fabrication of a double-layer atom chip with through silicon vias for an ultra-high-vacuum cell (English)
- New search for: Chuang, Ho-Chiao
- New search for: Lin, Yun-Siang
- New search for: Lin, Yu-Hsin
- New search for: Huang, Chi-Sheng
- New search for: Chuang, Ho-Chiao
- New search for: Lin, Yun-Siang
- New search for: Lin, Yu-Hsin
- New search for: Huang, Chi-Sheng
In:
Journal of Micromechanics and Microengineering
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24
, 4
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045013/1-045013/10
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2014
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ISSN:
- Article (Journal) / Print
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Title:The fabrication of a double-layer atom chip with through silicon vias for an ultra-high-vacuum cell
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Contributors:Chuang, Ho-Chiao ( author ) / Lin, Yun-Siang ( author ) / Lin, Yu-Hsin ( author ) / Huang, Chi-Sheng ( author )
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Published in:Journal of Micromechanics and Microengineering ; 24, 4 ; 045013/1-045013/10
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Publisher:
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Publication date:2014
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Size:10 Seiten, 10 Quellen
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ISSN:
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DOI:
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Type of media:Article (Journal)
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Type of material:Print
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Language:English
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Keywords:
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Source:
Table of contents – Volume 24, Issue 4
The tables of contents are generated automatically and are based on the data records of the individual contributions available in the index of the TIB portal. The display of the Tables of Contents may therefore be incomplete.
- 045001
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Fabrication of a 3D micro/nano dual-scale carbon array and its demonstration as the microelectrodes for supercapacitorsShulan Jiang / Tielin Shi / Yang Gao / Hu Long / Shuang Xi / Zirong Tang et al. | 2014
- 045002
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A novel tri-axis MEMS gyroscope with in-plane tetra-pendulum proof masses and enhanced sensitive springsM C Wang / J W Jiao / P L Yan / B W Mi / S Qin et al. | 2014
- 045003
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Knudsen force based MEMS structuresShanmukha Vikrant Sista / Enakshi Bhattacharya et al. | 2014
- 045004
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Nonlinear control of an electromagnetic polymer MEMS hard-magnetic micromirror and its imaging applicationH Chen / M Pallapa / W J Sun / Z D Sun / J T W Yeow et al. | 2014
- 045005
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Precise extension-mode resonant sensor with uniform and repeatable sensitivity for detection of ppm-level ammoniaFeng Yu / Haitao Yu / Pengcheng Xu / Xinxin Li et al. | 2014
- 045006
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Ultra-fast annealing to reduce the residual stress in ultra-thin chips using flash lightEun-Beom Jeon / Junhong Park / Hak-Sung Kim et al. | 2014
- 045007
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Beam pen lithography based on arrayed polydimethylsiloxane (PDMS) micro-pyramids spin-coated with carbon black photo-resistYu-Zen Chen / Chun-Ying Wu / Yung-Chun Lee et al. | 2014
- 045008
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Integration of nano-scale components and supports in micromachined 3D silicon structuresJ Song / S Azimi / Z Y Dang / M B H Breese et al. | 2014
- 045009
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Specific capture of target bacteria onto sensor surfaces for infectious disease diagnosisJong-Hoon Kim / Shinnosuke Inoue / Gerard A Cangelosi / Kyong-Hoon Lee / Jae-Hyun Chung et al. | 2014
- 045010
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High-resolution ac-pulse modulated electrohydrodynamic jet printing on highly insulating substratesChuang Wei / Hantang Qin / Nakaira A Ramírez-Iglesias / Chia-Pin Chiu / Yuan-shin Lee / Jingyan Dong et al. | 2014
- 045011
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Regularly-formed three-dimensional gold nanodot array with controllable optical propertiesZhenxing Li / Masahiko Yoshino / Akinori Yamanaka et al. | 2014
- 045012
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A wireless intraocular pressure monitoring device with a solder-filled microchannel antennaÇağdaş Varel / Yi-Chun Shih / Brian P Otis / Tueng S Shen / Karl F Böhringer et al. | 2014
- 045013
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The fabrication of a double-layer atom chip with through silicon vias for an ultra-high-vacuum cellHo-Chiao Chuang / Yun-Siang Lin / Yu-Hsin Lin / Chi-Sheng Huang et al. | 2014
- 045014
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Micro ultrasonic powder molding for semi-crystalline polymersXiong Liang / Xiaoyu Wu / Kun Zeng / Bin Xu / Shiyun Wu / Hang Zhao / Bing Li / Shuangchen Ruan et al. | 2014
- 045015
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Nano-diamond based spheres for radio frequency electromechanical resonatorsV Lebedev / D Iankov / N Heidrich / V Zuerbig / C Wild / V Cimalla / O Ambacher et al. | 2014
- 045016
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Performance and breakdown behavior of graphene field-effect transistors with thin gate oxidesQuan Wang / Shuai Liu / Jin Zhang / Jun Zhu / Daohan Ge / Naifei Ren et al. | 2014
- 045017
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Evanescent cultivation of photosynthetic bacteria on thin waveguidesS C Pierobon / M D Ooms / D Sinton et al. | 2014
- 045018
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Template-based self-assembly for silicon chips and 01005 surface-mount componentsJ H Hoo / Kwang Soon Park / Rajashree Baskaran / Karl F Böhringer et al. | 2014
- 045019
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A model for inertial particle trapping locations in hydrodynamic tweezers arraysTyler A House / Valerie H Lieu / Daniel T Schwartz et al. | 2014
- 045020
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Progresses in cMUT device fabrication using low temperature processesE Bahette / J F Michaud / D Certon / D Gross / D Alquier et al. | 2014
- 045021
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Microfluidic integration of wirebonded microcoils for on-chip applications in nuclear magnetic resonanceRobert Ch Meier / Jens Höfflin / Vlad Badilita / Ulrike Wallrabe / Jan G Korvink et al. | 2014
- 045022
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Fabrication of a seamless roller mold with wavy microstructures using mask-less curved surface beam pen lithographySung-Wen Tsai / Po-Yu Chen / Yung-Chun Lee et al. | 2014
- 045022
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Fabrication of a seamless roller mold with wavy microstructure using mask-less curved surface beam pen lithographyTsai, S.-W. / Chen, P.-Y. / Lee, Y.-C. et al. | 2014
- 045023
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Experimental investigation on the large-area fabrication of micro-pyramid arrays by roll-to-roll hot embossing on PVC filmYujun Deng / Peiyun Yi / Linfa Peng / Xinmin Lai / Zhongqin Lin et al. | 2014
- 045024
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Simple micro-patterning of high conductive polymer with UV-nano-imprinted patterned substrate and ethylene glycol-based second dopingSeiichi Takamatsu / Kazuma Kurihara / Takahiro Yamashita / Toshihiro Itoh et al. | 2014
- 045025
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A contact-lens-shaped IC chip technologyChing-Yu Liu / Frank Yang / Chih-Chiao Teng / Long-Sheng Fan et al. | 2014
- 045026
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Shielded piezoresistive cantilever probes for nanoscale topography and electrical imagingYongliang Yang / Eric Yue Ma / Yong-Tao Cui / Alexandre Haemmerli / Keji Lai / Worasom Kundhikanjana / Nahid Harjee / Beth L Pruitt / Michael Kelly / Zhi-Xun Shen et al. | 2014