Study on fabrication tolerances of SOI based directional couplers and ring resonators (English)
- New search for: Prinzen, Andreas
- New search for: Bolten, Jens
- New search for: Waldow, Michael
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- New search for: Prinzen, Andreas
- New search for: Bolten, Jens
- New search for: Waldow, Michael
- New search for: Kurz, Heinrich
In:
Microelectronic Engineering
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121
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51-54
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2014
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ISSN:
- Article (Journal) / Print
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Title:Study on fabrication tolerances of SOI based directional couplers and ring resonators
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Contributors:Prinzen, Andreas ( author ) / Bolten, Jens ( author ) / Waldow, Michael ( author ) / Kurz, Heinrich ( author )
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Published in:Microelectronic Engineering ; 121 ; 51-54
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Publisher:
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Publication date:2014
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Size:4 Seiten, 16 Quellen
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ISSN:
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Coden:
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DOI:
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Type of media:Article (Journal)
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Type of material:Print
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Language:English
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Keywords:
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Source:
Table of contents – Volume 121
The tables of contents are generated automatically and are based on the data records of the individual contributions available in the index of the TIB portal. The display of the Tables of Contents may therefore be incomplete.
- 1
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Micro-heaters embedded in PDMS fabricated using dry peel-off processByun, Ikjoo / Ueno, Ryohei / Kim, Beomjoon et al. | 2014
- 5
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Monolithic integration of DUV-induced waveguides into plastic microfluidic chip for optical manipulationKhoury, M. / Vannahme, C. / Sørensen, K.T. / Kristensen, A. / Berg-Sørensen, K. et al. | 2014
- 10
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Ultra-flexible microelectrode array nanostructured by FIB: A possible route to lower the device impedanceMaiolo, L. / Notargiacomo, A. / Marrani, M. / Minotti, A. / Maita, F. / Pecora, A. et al. | 2014
- 15
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Electrostatic pick-and-place micro/nanomanipulation under the electron beamDenisyuk, Andrey I. / Komissarenko, Filipp E. / Mukhin, Ivan S. et al. | 2014
- 19
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Diamond nanoprobes for electrical probing of nanoelectronics device structuresHantschel, T. / Clarysse, T. / Ajaykumar, A. / Seidel, F. / Tsigkourakos, M. / Nuytten, T. / Paredis, K. / Eyben, P. / Majeed, B. / Tezcan, D.S. et al. | 2014
- 24
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The effects of dwell time on focused ion beam machining of siliconSabouri, A. / Anthony, C.J. / Bowen, J. / Vishnyakov, V. / Prewett, P.D. et al. | 2014
- 27
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OFETs with sub-100nm channel length fabricated by wafer-scale NIL and comprehensive DC and AC characterizationsTeng, Lichao / Finn, Andreas / Plötner, Matthias / Shi, Hui / Fischer, Wolf-Joachim et al. | 2014
- 33
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Biomimetic, antireflective, superhydrophobic and oleophobic PMMA and PMMA-coated glass surfaces fabricated by plasma processingKontziampasis, D. / Boulousis, G. / Smyrnakis, A. / Ellinas, K. / Tserepi, A. / Gogolides, E. et al. | 2014
- 39
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In situ observation of Pt deposition process by using spectroscopic ellipsometryGoto, Toshiaki / Watanabe, Mitsuhiro / Jin, Lianhua / Kondoh, Eiichi et al. | 2014
- 42
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Modeling the in-situ conductance optimization process in focused electron-beam-induced depositionWinhold, M. / Weirich, P.M. / Schwalb, C.H. / Huth, M. et al. | 2014
- 47
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Injection moulding antireflective nanostructuresChristiansen, Alexander B. / Clausen, Jeppe S. / Mortensen, N. Asger / Kristensen, Anders et al. | 2014
- 51
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Study on fabrication tolerances of SOI based directional couplers and ring resonatorsPrinzen, Andreas / Bolten, Jens / Waldow, Michael / Kurz, Heinrich et al. | 2014
- 55
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Formation of reliable electrical and thermal contacts between graphene and metal electrodes by laser annealingMoshkalev, S.A. / Ermakov, V.A. / Vaz, A.R. / Alaferdov, A.V. / Savu, R. / Silveira, J.V. / Souza Filho, A.G. et al. | 2014
- 59
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Piezoelectric ultrasonic transducer based on flexible AlNMastronardi, Vincenzo Mariano / Guido, Francesco / Amato, Massimiliano / De Vittorio, Massimo / Petroni, Simona et al. | 2014
- 64
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Fabricating embedded SU-8 microstructures with asymmetric inside cross section by double-side multiple partial exposure methodHuang, Yuan-Te / Hsu, Wensyang et al. | 2014
- 68
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Self-assembly of ordered silica nanostructures by electrosprayColl, Arnau / Bermejo, Sandra / Castañer, Luis et al. | 2014
- 72
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Fabrication of 120° silicon double mirrors robust against misalignment for use in micro optical gyroscopesNiesel, Thalke / Dietzel, Andreas et al. | 2014
- 76
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Controlled assembly of gold nanorods on nanopatterned surfaces: Effects of surface materials, pH and surfactantErola, Markus O.A. / Partanen, Anni / Okoro, Sunday C. / Rahman, Shakil Md. / Lajunen, Hanna / Suvanto, Sari / Suvanto, Mika / Kuittinen, Markku / Pakkanen, Tuula T. et al. | 2014
- 80
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Fabrication of TiO2 micro-structures by cathodic depositionChang, Tso-Fu Mark / Sato, Tatsuo / Sone, Masato et al. | 2014
- 83
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Mechanical properties of Cu electroplated in supercritical CO2 emulsion evaluated by micro-compression testKinashi, Hikaru / Nagoshi, Takashi / Chang, Tso-Fu Mark / Sato, Tatsuo / Sone, Masato et al. | 2014
- 87
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FIB patterning of dielectric, metallized and graphene membranes: A comparative studyHemamouche, A. / Morin, A. / Bourhis, E. / Toury, B. / Tarnaud, E. / Mathé, J. / Guégan, P. / Madouri, A. / Lafosse, X. / Ulysse, C. et al. | 2014
- 92
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Fabrication of three-dimensional PDMS microstructures by selective bonding and cohesive mechanical failureByun, Ikjoo / Kim, Beomjoon et al. | 2014
- 96
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Fabrication of graphene and graphite thin films from organic coatingKato, Mikihiro / Uki, Kenichi / Harako, Susumu / Zhao, Xinwei et al. | 2014
- 100
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Poly(N-acetylaniline) functionalized graphene nanosheets supported Pt electrocatalysts for methanol oxidationDuan, Jialin / Liu, Xiaowei / Chen, Hailong / Zhang, Yufeng / Du, Juan / Zhang, Xuelin et al. | 2014
- 104
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Single-spot e-beam lithography for defining large arrays of nano-holesHøjlund-Nielsen, Emil / Greibe, Tine / Mortensen, N. Asger / Kristensen, Anders et al. | 2014
- 108
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Controlled arrangement of nanoparticles capped with protecting ligand on Au nanopatternsYamamoto, Hiroki / Ohnuma, Akira / Ohtani, Bunsho / Kozawa, Takahiro et al. | 2014
- 113
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Transfer induced compressive strain in graphene: Evidence from Raman spectroscopic mappingLarsen, Martin Benjamin B.S. / Mackenzie, David M.A. / Caridad, José M. / Bøggild, Peter / Booth, Timothy J. et al. | 2014
- 118
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Design, simulation, fabrication and characterization of nano-scaled acceleration gridsKallis, K.T. / Dietz, D. / Subasi, E. / Müller, M.R. / Kontis, C. / Zimmer, C.M. et al. | 2014
- 122
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Electron Beam Induced Deposition on graphene on silicon oxide and hexagonal boron nitride: A comparison of substratesHari, S. / Goossens, A.M. / Vandersypen, L.M.K. / Hagen, C.W. et al. | 2014
- 127
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Fabrication of nanoparticles with 3D shape control for X-ray scattering experimentsGuzenko, Vitaliy A. / Pedrini, Bill / Menzel, Andreas / David, Christian et al. | 2014
- 131
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Phononic engineering of silicon using “dots on the fly” e-beam lithography and plasma etchingLacatena, V. / Haras, M. / Robillard, J.-F. / Monfray, S. / Skotnicki, T. / Dubois, E. et al. | 2014
- 135
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Suitable photo-resists for two-photon polymerization using femtosecond fiber lasersRajamanickam, V.P. / Ferrara, L. / Toma, A. / Proietti Zaccaria, R. / Das, G. / Di Fabrizio, E. / Liberale, C. et al. | 2014
- 139
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The coupling of angular momentum of light in metal triangles nano-ringHuang, Li / Hu, Dejiao / Zhang, Zhiyou / Gao, Fuhua / Du, Jinglei et al. | 2014
- 142
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Estimation of pattern resolution using NaCl high-contrast developer by Monte Carlo simulation of electron beam lithographyZhang, Hui / Huda, Miftakhul / Komori, Takuya / Zhang, Yulong / Yin, You / Hosaka, Sumio et al. | 2014
- 147
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ZnO nanowires strips growth: Template reliability and morphology studyPea, M. / Maiolo, L. / Pilloton, R. / Rinaldi, A. / Araneo, R. / Giovine, E. / Orsini, A. / Notargiacomo, A. et al. | 2014
- 153
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A simple silicon compatible 40nm electroplated copper T-gate processCao, Menglin / Li, Xu / Ferguson, Susan / Thoms, Stephen / MacIntyre, Douglas / Thayne, Iain et al. | 2014
- 156
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Oxidation smoothening of silicon machined micro- and nano-scale structuresAzimi, S. / Dang, Z.Y. / Breese, M.B.H. et al. | 2014
- 162
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Microcantilever suspension using hard masks and a two phase RIE methodSenveli, Sukru U. / Tigli, Onur et al. | 2014
- 167
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Controlled poly(pyrrole) patterning by microcontact printing on glass and poly(ethylene terephthalate) substratesGarcia-Cruz, Alvaro / Zine, Nadia / Sigaud, Monique / Lee, Michael / Marote, Pedro / Lanteri, Pierre / Bausells, Joan / Errachid, Abdelhamid et al. | 2014
- 175
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Author Index| 2014
- IFC
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Inside Front Cover - Editorial Board| 2014
- v
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Table of Contents| 2014
- vii
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PrefaceFobelets, Kristel / Utke, Ivo et al. | 2014