Thermodynamic calculations on the chemical vapor deposition of silicon nitride and silicon from silane and chlorinated silanes (English)
- New search for: Kruis, F.E.
- New search for: Scarlett, B.
- New search for: Bauer, R.A.
- New search for: Schoonman, J.
- New search for: Kruis, F.E.
- New search for: Scarlett, B.
- New search for: Bauer, R.A.
- New search for: Schoonman, J.
In:
Journal of the American Ceramic Society
;
75
, 3
;
619-628
;
1992
-
ISSN:
- Article (Journal) / Print
-
Title:Thermodynamic calculations on the chemical vapor deposition of silicon nitride and silicon from silane and chlorinated silanes
-
Additional title:Thermodynamische Berechnungen zur chemischen Dampfphasenabscheidung von Siliciumnitrid und Silicium aus Silan und chloriertem Silan
-
Contributors:Kruis, F.E. ( author ) / Scarlett, B. ( author ) / Bauer, R.A. ( author ) / Schoonman, J. ( author )
-
Published in:Journal of the American Ceramic Society ; 75, 3 ; 619-628
-
Publisher:
-
Publication date:1992
-
Size:10 Seiten, 12 Bilder, 2 Tabellen, 48 Quellen
-
ISSN:
-
DOI:
-
Type of media:Article (Journal)
-
Type of material:Print
-
Language:English
-
Keywords:
-
Source:
Table of contents – Volume 75, Issue 3
The tables of contents are generated automatically and are based on the data records of the individual contributions available in the index of the TIB portal. The display of the Tables of Contents may therefore be incomplete.
- 493
-
Grain-size-dependent transformation behavior in polycrystalline tetragonal zirconiaBecher, P.F. / Swain, M.V. et al. | 1992
- 514
-
Heterocoagulation as an inclusion coating technique for ceramic composite processingGarino, T. et al. | 1992
- 519
-
Effect of inclusions on densification. Pt. 1. Microstructural development in an Al2O3 matrix containing a high volume fraction of ZrO2 inclusionsSudre, O. / Lange, F.F. et al. | 1992
- 525
-
Effect of inclusions on densification. Pt. 2. Numerical modelSudre, O. / Gag Bo / Bo Fan / Lange, F.F. / Evans, A.G. et al. | 1992
- 532
-
Carbothermal preparation of silicon nitride. Influence of starting materials and synthesis parametersEkelund, M. / Forslund, B. et al. | 1992
- 546
-
Microstructure and humidity-sensitive characteristics of alpha Fe2O3 ceramic sensorCantalini, C. / Pelino, M. et al. | 1992
- 552
-
Sintering of ceria-doped tetragonal zirconia crystallized in organic solvents, water and airSato, T. / Dosaka, K. / Yoshioka, T. / Okuwaki, A. / Torii, K. / Onodera, Y. et al. | 1992
- 557
-
Kinetics of cation redistribution in ferrospinelsSujata, K. / Mason, T.O. et al. | 1992
- 563
-
Structure of commensurate and incommensurate ordered phases in the system ZrTiO4-Zr5Ti7O24Christoffersen, R. / Davies, P.K. et al. | 1992
- 570
-
Compact swelling in Bi(1.4)Pb(0.6)Sr2Ca2Cu(3.6)O(x) during the formation of high-Tc superconducting phaseChan Joong Kim / Suk Joong Kang / Dong Yeon Wan et al. | 1992
- 575
-
Extrusion of alpha-Al2O3-boehmite mixturesChen, A.Y. / Cawley, J.D. et al. | 1992
- 580
-
High-resolution electron microscopy of silicon carbide/aluminium carbide interfaceYano, T. / Kato, S. / Iseki, T. et al. | 1992
- 587
-
Determination of inversion temperature of Sb2O3-doped BaTiO3 positive temperature coefficient of resistivity (PTCR) ceramics by the finite difference methodHong Soon Kim / Gun Yong Sung / Chong Hee Kim et al. | 1992
- 592
-
Densification of reaction-synthesized titanium carbide by high-velocity forgingLaSalvia, J.C. / Meyer, L.W. / Meyers, M.A. et al. | 1992
- 603
-
Origin of the creep-crack growth threshold in a glass-ceramicChan, K.S. / Page, R.A. et al. | 1992
- 613
-
Mixed oxide capacitor of CuO-BaTiO3 as a new type CO2 gas sensorIshihara, T. / Kometani, K. / Mizuhara, Y. / Takita, Y. et al. | 1992
- 619
-
Thermodynamic calculations on the chemical vapor deposition of silicon nitride and silicon from silane and chlorinated silanesKruis, F.E. / Scarlett, B. / Bauer, R.A. / Schoonman, J. et al. | 1992
- 629
-
Inviscid melt spinning of alumina fibers. Chemical jet stabilizationWallenberger, F.T. / Weston, N.E. / Motzfeldt, K. / Swartfager, D.C. et al. | 1992
- 637
-
Static and cyclic fatigue of alumina at high temperatures. Pt. 2. Failure analysisLin, C.K. / Socie, D.F. / Youren Xu / Zangvil, A. et al. | 1992
- 649
-
Effects of heat treatments on multilayer piezoelectric ceramic-air compositesKahn, M. / Chase, M. et al. | 1992
- 657
-
Kinetics of anatase TiO2 surface area reduction in a mixture of HCl, H2O and O2. Pt. 1. Experimental studyGruy, F. / Pijolat, M. et al. | 1992
- 663
-
Kinetics of anatase TiO3 surface area reduction in a mixture of HCl, H2O and O2. Pt. 2. Quantitative modelingGruy, F. / Pijolat, M. et al. | 1992
- 667
-
Fracture and contact adhesion energies of mica-mica, silica-silica and mica-silica interfaces in dry and moist atmospheresTai Tak Wan / Smith, D.T. / Lawn, B.R. et al. | 1992
- 677
-
Formation of reaction-bonded silicon nitride from silane-derived silicon powders. Macroscopic kinetics and related transport phenomenaSheldon, B.W. / Szekely, J. / Haggerty, J.S. et al. | 1992
- 703
-
Oxidation inhibition mechanisms in coated carbon-carbon compositesNixon, T.D. / Cawley, J.D. et al. | 1992