Please choose your delivery country and your customer group
In optical manufacturing industry, the surface roughness measurements from spherical components is significant. Stover from the view of angle scattering technique, analyses the relation between the radius of curvature of curved surfaces and the surface power spectral density (PSD) function, and points out the effect of the radius of surface curvature on achieving useful data. When the radius r of the illuminated spot on the sample is reduced to 0.5 mm and the radius of surface curvature on the sample is no less than 540 mm, reasonable results are obtainable. We have experimented on the total integrated scattering of spherical samples and got some surface roughness data, which conicide with the above results. The results presented in this paper show that such an additional mechanism extends the application of TIS apparatus to the measurement of spherical surfaces.