Component table models for analog system simulation (English)
- New search for: Klaassen, B.
- New search for: Paap, K.L.
- New search for: Klaassen, B.
- New search for: Paap, K.L.
In:
Micro Systems Technology 94, Micro System Technologies, International Conference on Micro Electro, Opto, Mechanical Systems and Components, 4
;
843-847
;
1994
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ISBN:
- Conference paper / Print
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Title:Component table models for analog system simulation
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Additional title:Komponenten-Tabellenmodelle für die Simulation analoger Systeme
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Contributors:Klaassen, B. ( author ) / Paap, K.L. ( author )
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Published in:
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Publisher:
- New search for: VDE-Verlag
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Place of publication:Berlin, Offenbach
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Publication date:1994
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Size:5 Seiten, 2 Bilder, 6 Quellen
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ISBN:
-
Type of media:Conference paper
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Type of material:Print
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Language:English
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Keywords:
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Source:
Table of contents conference proceedings
The tables of contents are generated automatically and are based on the data records of the individual contributions available in the index of the TIB portal. The display of the Tables of Contents may therefore be incomplete.
- 29
-
Mechanisms of micro system technology transfer (MSTT) to small and medium enterprises (SMEs)Hussla, I. et al. | 1994
- 37
-
Construction of nano manufacturing worldHatamura, Y. / Nakao, M. / Sato, T. et al. | 1994
- 57
-
Recent progress of microactuators and micromotorsFujita, H. et al. | 1994
- 77
-
A two-chip accelerometer system for automotive applicationsRistic, L. / Koury, D. / Joseph, E. / Shemansky, F. / Kniffin, M. et al. | 1994
- 87
-
Static and dynamic test of Si-membranesHigelin, G. / Lange, V. et al. | 1994
- 97
-
TEM in situ test on micromechanical partsLanger, E. / Katzer, D. et al. | 1994
- 107
-
Dimensional measurement of micro mechanical componentsBreitmeier, U. et al. | 1994
- 115
-
Tribological measurements for MEMS applicationsBeerschwinger, U. / Mathieson, D. / Reuben, R.L. / Yang, S.J. / Dhariwal, R.S. / Ziad, H. et al. | 1994
- 125
-
Residual stress analysis in components of microsystemsSchubert, A. / Michel, B. et al. | 1994
- 199
-
Crystallographic and transport properties of lithium ferrite epitaxial films grown by pulsed laser depositionBalestrino, G. / Martellucci, S. / Paoletti, A. / Paroli, P. / Petrocelli, G. / Tebano, A. / Oliver, S.A. / Vittoria, C. et al. | 1994
- 259
-
New glasses for microsystem technologiesHülsenberg, D. / Harnisch, A. / Horst, H.J. / Schmidt, K. / Straube, B. et al. | 1994
- 271
-
ORMOCE(R)s, inorganic-organic polymer materials for applications in micro systems technologyPopall, M. / Kappel, J. / Schulz, J. / Wolter, H. et al. | 1994
- 281
-
Replication of waveguide elements using ORMOCER(R) materialDannberg, P. / Bräuer, A. / Karthe, W. / Waldhäusl, R. / Wolter, H. et al. | 1994
- 299
-
Materials development for thin film actuatorsQuandt, E. / Holleck, H. / Kirchner, S. / Kunisch, C. / Schlegelmilch, J. / Seemann, K. et al. | 1994
- 309
-
Monolithic bridge-on-diaphragm microstructures for sensor applicationsSchumacher, A. / Alavi, M. / Fabula, T. / Schmidt, B. / Wagner, H.J. et al. | 1994
- 323
-
Bulk micromachining using doping and voltage dependent p-n junction etch-stopKühl, K. / Offereins, H.L. / Sandmaier, H. / Schaber, U. / Vogel, S. et al. | 1994
- 417
-
Technology and fabrication of hybrid neural interfaces for the peripheral nervous systemDario, P. / Cocco, M. / Soldani, G. / Valderrama, E. / Meyer, J.U. / Giesler, T. / Beutel, H.J. / Scheithauer, H. et al. | 1994
- 429
-
Thin-film SnO2 gas sensors on Si substrates for CO and CO2 detectionSteiner, K. / Hoefer, U. / Kühner, G. / Sulz, G. / Wagner, E. et al. | 1994
- 445
-
Micromachined infrared pneumatic detector for gas sensorChevrier, J.B. / Baert, K. / Slater, T. / Verbist, A. et al. | 1994
- 455
-
A new type humidity sensor using micro-air-bridge heatersKimura, M. / Manaka, J. / Satoh, S. / Takano, S. / Igarashi, N. / Nagai, K. et al. | 1994
- 477
-
Packaging of microsensorsWen, D. / Ko, H. et al. | 1994
- 545
-
Packaging and interconnection technology for thickfilm-hybrid sensor-systems for high-temperature applicationsGaluschki, K.P. et al. | 1994
- 579
-
Application of photosensitive BCB as interlevel dielectric for a communication MCM-DRadlik, W. / Zellner, M. / Plehnert, K. / Kastner, K. / Achen, A. / Heistand, R. / Castillo, D. / Urscheler, R. et al. | 1994
- 587
-
Thin film multichip modules - process development using photosensitive benzocyclobuteneChmiel, G. / Töpper, M. / Jöhren, C. / Achen, A. et al. | 1994
- 599
-
Development of chip on glass technology using thermo-setting anisotropically conductive adhesivesLiu, J. / Ljungkrona, L. et al. | 1994
- 613
-
Low temperature multilayer aluminum nitrideKnudsen, A.K. / Chiao, Y.H. / Copus, K. / Guiton, T.A. / Nicholas, N.R. / Pelon, B.S. / Zhao, J. / Urscheler, R. et al. | 1994
- 673
-
3D-simulation of electrodynamical characteristics of packages, feedthrus and interconnectsWerthen, M. / Rittweger, M. / Wolff, I. et al. | 1994
- 685
-
Smart sensorsCorsi, C. et al. | 1994
- 695
-
Integrated silicon pressure sensor with on-chip compensation of temperature effects using programmable thyristorsKress, H.J. / Häckel, K. / Schatz, O. / Muchow, J. et al. | 1994
- 703
-
Low-cost pressure sensor microsystemRudolf, F. / Lambilly, H. de et al. | 1994
- 713
-
Micromechanic pressure sensors with optical readout and 'on chip' CMOS amplifiers based on Si-technologyHilleringmann, U. / Adams, S. / Goser, K. et al. | 1994
- 723
-
A study on micro force sensors for microhandling systemsHorie, M. / Funabashi, H. / Ikegami, K. et al. | 1994
- 733
-
A servo-microaccelerometer, with a differential-tunneling-probe as position sensorSchoth, A. et al. | 1994
- 743
-
Servo loop acceleration in full silicon microtechnologyHafen, M. / Handrich, E. / Gutmann, W. / Ryrko, B. / Spahlinger, G. / Vetter, E. / Geßner, T. / Wiemer, M. et al. | 1994
- 753
-
Smart acceleration sensor systems based on LIGA micromechanicsStrohrmann, M. / Eberle, F. / Fromhein, O. / Keller, W. / Krömer, O. / Kühner, T. / Lindemann, K. et al. | 1994
- 763
-
Silicon resonant angular rate sensor using electromagnetic excitation and capacitive detectionHashimoto, M. / Cabuz, C. / Minami, K. / Esashi, M. et al. | 1994
- 773
-
Micromachined planar ac-dc multijunction thermal converter: aspects of design and layer materialsDillner, U. / Keßler, E. / Klonz, M. / Thomes, C. et al. | 1994
- 783
-
Properties of TFA (thin film on ASIC) sensorsSchulte, J. / Fischer, H. / Lule, T. / Zhu, Q. / Böhm, M. et al. | 1994
- 823
-
Microsystem fault simulation - aspects and requirementsVermeiren, W. / Straube, B. / Elst, G. et al. | 1994
- 843
-
Component table models for analog system simulationKlaassen, B. / Paap, K.L. et al. | 1994
- 849
-
System level specification and simulation for microsystem design in the METEOR projectTanurhan, Y. / Schmerler, S. / Pihulak, B. / Bortolazzi, J. / Müller-Glaser, K.D. et al. | 1994
- 889
-
Evaluation of microturbine prototypes for application in eye surgeryMathieson, D. / Beerschwinger, U. / Yang, S.J. / Reuben, R.L. / Addlesee, A.J. / Bartholomew, R.S. et al. | 1994
- 899
-
LIGA-made pneumatically driven micro-actuator for use in a micro testing systemRuther, P. / Backer, W. / Feit, K. / Heckele, M. / Weindel, K. et al. | 1994
- 909
-
Thermodynamic and fluid dynamic simulation of micromechanical manufactured bubble-jet printheadsZollner, A. / Hochwind, B. / Fähndrich, M. et al. | 1994
- 919
-
Design of an on-chip heater for temperatures up to 450 deg C based on finite element analysis for catalytic chemical sensorsScheibe, C. / Obermeier, E. / Maunz, W. / Plog, C. et al. | 1994
- 929
-
Design and simulation of thermo-optical modulators and switchesDümcke, R. / Hennig, T. / Kasper, M. / Schacht, R. / Wächter, C. et al. | 1994
- 939
-
Optimization of the shape of piezoelectric microstructuresHarutjunjan, M. / Schwesinger, N. et al. | 1994
- 949
-
3d optimisation of average torque of electrostatic micromotorsBelmans, I.R. / Hameyer, K. / Johannsson, T.B. / Dessel, M. Van et al. | 1994
- 961
-
Pneumatic stabilization of top drive micromotorsZiad, H. / Spirkovitch, S. / Milne, N. / Beershwinger, U. / Rigo, S. et al. | 1994
- 969
-
Development and test of an electrostatically driven linear stepping motorKalb, H. / Kowanz, B. / Bacher, W. / Mohr, J. / Ruprecht, R. et al. | 1994
- 979
-
Design of microactuatorsKallenbach, E. / Albrecht, A. / Birli, O. et al. | 1994
- 989
-
Moving wedge actuator: an electrostatic actuator for use in a microrelaySchimkat, J. / Kiesewetter, L. / Gevatter, H.J. / Arndt, F. / Steckenborn, A. et al. | 1994
- 997
-
Inertial micropositioners for scanning probe microscopesBordoni, F. / Gasperis, G. De / Battista, S. di / Vasarelli, F. et al. | 1994
- 1005
-
Fabrication of a bistable snapping microactuatorMatoba, H. / Kim, C.J. / Muller, R.S. et al. | 1994
- 1015
-
Electrostatic x-y-precision drive for large ranges of motionDreifke, G. / Kallenbach, E. / Riemer, D. / Süßkind, R. et al. | 1994
- 1025
-
A simple micropump employing dynamic passive valves made in siliconGerlach, T. et al. | 1994
- 1035
-
Piezoelectric micropumps based on a new deposition technology for ZnO-filmsSchwesinger, N. / Burgold, J. / Ackermann, H. et al. | 1994
- 1047
-
Microoptical elements: fabrication and applicationKarthe, W. / Göring, R. / Kley, E.B. et al. | 1994
- 1055
-
Silicone as an optical materialElderstig, H. / Arvidsson, G. / Henriksson, P. / Laurell, F. / Palmskog, G. / Tikkanen, G. et al. | 1994
- 1063
-
Pb-based ferroelectric thin film actuator for optical applicationsSakata, M. / Wakabayashi, S. / Ikeda, M. / Goto, H. / Takeuchi, M. / Yada, T. et al. | 1994
- 1073
-
Miniaturized optical systems for beam deflection and modulationGöring, R. / Molzahn, U. et al. | 1994
- 1081
-
Miniaturized laser-Doppler-velocimeter using microoptic elementsStork, W. / Müller-Glaser, K.D. / Schmidt, J. / Wagner, A. / Yajima, H. et al. | 1994
- 1087
-
Micro-optical elements with high efficiency for optical interconnectsPawlowski, E. / Fürst, W. / Kuhlow, B. et al. | 1994
- 1097
-
Polymer waveguides for integrated thermo-optic tunable space-switching elements at 1550 nm wavelengthKeil, N. / Strebel, B. / Türck, R. / Yao, H.H. / Zawadski, C. et al. | 1994
- 1107
-
Micromechanical structures for optical fibers in boardLeyssens, F. / Vetter, P. / Allaert, K. et al. | 1994
- 1119
-
Thermal imaging using a thermal test chipHelm, J. et al. | 1994
- 1122
-
Direct in circuit emulation in technology of designing microcontroller systemsWisniewski, K.P. et al. | 1994
- 1125
-
Inductance calculations for microsystem integration and packagingKlemmer, N. et al. | 1994
- 1133
-
The development of a PECVD-technology for Si3N4-films with low mechanical stressSchwesinger, N. / Saendig, T. / Salonen, R. / Zöppig, V. et al. | 1994
- 1139
-
Low cost, high performance aluminum nitrideKnudsen, A.K. / Chiao, Y.H. / Guiton, T.A. / Kawakita, T. / Welterlen, J.D. / Urscheler, R. et al. | 1994
- 1145
-
CMOS integrated silicon gas-sensorStoev, I. et al. | 1994
- 1148
-
Reliability of epoxy glob top in microelectronic assembliesKrause, F. / Voges, T. / Rehme, F. / Dudek, R. / Vogel, D. et al. | 1994
- 1151
-
Signal sources in precision AC measure equipmentWisniewski, K.P. et al. | 1994
- 1157
-
New modelling method applied to recent power devicesBesbes, K. / Morel, H. / Chante, J.P. et al. | 1994
- 1169
-
BenzoCycloButene polymers for use in waveguiding applicationsLanghoff, C. / Nordmann, J. et al. | 1994
- 1172
-
Knowledge based design and manufacturing for LIGA-microstructuresScherer, K.P. / Buchberger, P. / Eggert, H. / Stiller, P. / Wieland, P. et al. | 1994
- 1175
-
Smart pixels - building blocks for the hardware of powerful special purpose computersZürl, K. / Gluch, E. et al. | 1994
- 1178
-
In situ function testing of a dew-point microsensor in the Environmental Scanning Electron MicroscopeFüting, M. / Heinze, D. / March, B. / Steinke, A. et al. | 1994
- 1181
-
Development of microsystems with executable specifications connected to real componentsSüß, W. / Eggert, H. / Gorges-Schleuter, M. / Jakob, W. / Hoffmann, W. et al. | 1994
- 1184
-
3D free space interconnection fabric with holographic optical elementsDietrich, E. / Ehlers, H. / Rosin, T. / Teich, G. / Vathke, J. / Walf, G. et al. | 1994
- 1187
-
A multiprocessor process control system including fuzzy computing components for electro discharge machining plantsBehrens, A. / Witzak, M.P. et al. | 1994
- 1190
-
Conducting polymer films as artificial muscle in the construction of microactuators and micromanipulatorsSmela, E. / Inganäs, O. et al. | 1994
- 1193
-
Electromechanochemical actuators - chances and limits of their application in microsystemsSchünemann, M. / Schilling, C. / Wurmus, H. et al. | 1994