Advanced software system for yield improvement on manufacturing fab (English)
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In:
Microelectronic Manufacturing Yield, Reliability, and Failure Analysis, 2
;
219-229
;
1996
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ISSN:
- Conference paper / Print
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Title:Advanced software system for yield improvement on manufacturing fab
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Additional title:Weiterentwickeltes Softwaresystem zur Ausbeutesteigerung in der Halbleiterbauelementeproduktion
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Contributors:Recio, M.R. ( author ) / Fernandez, A. ( author ) / Martin, V. ( author ) / Hoyer, J.R. ( author ) / Whitlock, S. ( author ) / James, D. ( author ) / Hausen, M. ( author ) / Peman, M.J. ( author ) / Gonzalez, G. ( author )
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Published in:
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Publisher:
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Publication date:1996
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Size:11 Seiten, 9 Bilder, 2 Tabellen, 6 Quellen
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ISSN:
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Coden:
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DOI:
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Type of media:Conference paper
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Type of material:Print
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Language:English
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Keywords:
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Source: