A 3D Numerical Study of the Polishing Behavior during an Oxide Chemical Mechanical Planarization Process (English)
National licence
- New search for: Lee, D.H.
- New search for: Kwon, D.J.
- New search for: Hong, Yi Koan
- New search for: Park, Jin Goo
In:
Key Engineering Materials
;
257-258
;
433-440
;
2004
- Article (Journal) / Electronic Resource
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Title:A 3D Numerical Study of the Polishing Behavior during an Oxide Chemical Mechanical Planarization Process
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Contributors:
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Published in:Key Engineering Materials ; 257-258 ; 433-440
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Publisher:
- New search for: Trans Tech Publications
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Place of publication:Stafa-Zurich, Switzerland
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Publication date:2004-02-15
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Size:8 pages
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ISSN:
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DOI:
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Type of media:Article (Journal)
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Type of material:Electronic Resource
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Language:English
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Keywords:
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Source:
Table of contents – Volume 257-258
The tables of contents are generated automatically and are based on the data records of the individual contributions available in the index of the TIB portal. The display of the Tables of Contents may therefore be incomplete.
- 3
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Chip Formation Behaviour in Ultra-Precision Cutting of Electroless Nickel Plated Mold Substrates| 2004
- 9
-
A Controlled Atmosphere Cutting Apparatus for Understanding Tribological Behavior of Lubricants in Near-Dry Machining| 2004
- 15
-
Brittle-Ductile Transition in Nano Bending of Monocrystalline Silicon Carbide Analyzed by Molecular Dynamics Simulation| 2004
- 21
-
Molecular Dynamics Analysis of Ultra High-Acceleration and Vibration Cutting| 2004
- 27
-
Abrasive Nanometric Machining: Modelling, Simulation and its Application Promise| 2004
- 33
-
A Study of the Molecular Dynamics Simulation in Nanometric Grinding| 2004
- 39
-
Measurement and Analysis of AFM-Based Nano-Indentation on Micro-Machined Silicon Surface| 2004
- 45
-
A Novel FEA Model for the Integral Analysis of a Machine Tool and Machining Processes| 2004
- 51
-
Influence of the Static Stiffness of Grinding System on the Generation of Affected Layers| 2004
- 57
-
Geometric Models of the Ultra-Precision Grinding for Large Non-Axisymmetric Optical Aspheric Surfaces| 2004
- 63
-
Energy Limitations in HEDG and Conventional Grinding| 2004
- 69
-
Performance of the Speed-Stroke and Creep-Feed Grinding under Constant Removal Rate| 2004
- 75
-
A Study of the Crankshaft Pin Grinding Forces| 2004
- 81
-
Analysis of the Cam Grinding Mechanism with a CNC Cam Grinder| 2004
- 89
-
Effect of Cutting-Edge Shape on Ductile Regime Grinding of Optical Glass in Single-Grit Diamond Grinding| 2004
- 95
-
Ductile Regime Machining of Single-Crystal CaF2 for Aspherical Lenses| 2004
- 101
-
Axisymmetric Aspherical Form Generation for Large Diameter Optical Components| 2004
- 107
-
Single Grit Diamond Grinding of Spectrosil 2000 Glass on Tetraform 'C'| 2004
- 113
-
Fundamental Characteristics of a Freezing Chuck System for Brittle Material Machining| 2004
- 119
-
A Study of the ELID Grinding for Nano Ceramics| 2004
- 123
-
Development of Ultra Thin Quartz by Abrasive Machining| 2004
- 129
-
Platen Belt Grinding of Brittle Materials| 2004
- 135
-
A Study on Constant-Pressure Grinding with EPD Pellets| 2004
- 141
-
A Novel Form Error Compensation Technique for Tungsten Carbide Mould Insert Machining Utilizing Parallel Grinding Technology| 2004
- 147
-
Theoretical Study on the Effect of Form Error of Grinding Wheel Surfaces under Free Form Grinding| 2004
- 153
-
Fabrication of Off-Axis Aspherical Mirrors with Loose Abrasive Point-Contact Machining| 2004
- 159
-
Reduction of Lobing in Centreless Grinding via Variation of Set-Up Angles| 2004
- 165
-
A Displacement-Frequency Modulator Based System for Composite Grinding Control| 2004
- 171
-
Ultraprecision Abrasive Machining of Fibre Optic Connectors| 2004
- 177
-
A Precision Grinding Technique for Radome Inner Surfaces| 2004
- 183
-
A Practical Method for Improving the Pointing Accuracy of the Antenna-Radome System| 2004
- 189
-
Finishing Characteristics and Residual Stress on Workpiece Surface in Dry Barrel Finishing| 2004
- 195
-
Influence of Different Grinding Processes on Surface and Subsurface Characteristics of Carbide Tools| 2004
- 201
-
Factors Influencing the Surface Quality during Ultra-Precision Grinding of Brittle Materials in Ductile Mode| 2004
- 207
-
High Efficiency Deep Grinding and the Effect on Surface Integrity| 2004
- 213
-
Experimental Investigation of the Machined Surface Waviness, Vibrations and Cutting Forces in Peripheral Milling| 2004
- 219
-
Analysis of a Surface Encoder in Wave Optics| 2004
- 225
-
A Novel Profilometer for Nanometric Form Assessment for Large Machined Surfaces| 2004
- 231
-
An Ultra-Low Frequency Parallel Connection Nonlinear Isolator for Precision Instruments| 2004
- 239
-
Development of a Grinding Wheel with Electrically Conductive Diamond Cutting Edges| 2004
- 245
-
Performance and Wear Behaviour of Diamond Fibre Grinding Wheels when Grinding Glass| 2004
- 251
-
Development and Application of Porous Vitrified-Bonded Wheel with Ultra-Fine Diamond Abrasives| 2004
- 257
-
Estimation of Tribological Characteristics of Electrolyzed Oxide Layers on ELID-Grinding Wheel Surfaces| 2004
- 263
-
A Study on the Contact Stiffness of Grinding Wheels| 2004
- 267
-
Evaluation of Factors Controlling CBN Abrasive Selection for Vitrified Bonded Wheels| 2004
- 273
-
Ultra-High Speed Cylindrical Grinding Using CBN Wheel for High Efficiency| 2004
- 279
-
A Study on the CBN Grit Damage of a Newly Developed CBN Cup Quill in Face Grinding| 2004
- 285
-
A Standard Grinding Wheel Assessment Method to Support a Sophisticated Grinding Knowledge Based System| 2004
- 291
-
Hard Fine Machining of Gears through Continuous Generating Grinding| 2004
- 297
-
High-Efficiency Cutting of Granite Blocks with Multi-Blade Diamond Saws| 2004
- 303
-
Characterization of Vitreous Bonded Grinding Wheels for CNC Crushing| 2004
- 311
-
Effects of the Megasonic Floating Nozzle on Grinding Performance for Hard Materials| 2004
- 315
-
Effect of the Floating Nozzle in Grinding of Mild Steels with Vitrified CBN Wheel| 2004
- 321
-
Performance of a Floating Nozzle for Grinding of Glass Edges for Flat Panel Display| 2004
- 327
-
Effect of a Small Gap Nozzle Facing to Grinding Wheel in Slit Grinding| 2004
- 333
-
Modelling of the Useful Flowrate in Grinding Based on Spindle Power| 2004
- 339
-
Analysis of Mist Flow in MQL Cutting| 2004
- 345
-
Application of Air Cooling Technology and Minimum Quantity Lubrication to Relief Grinding of Cutting Tools| 2004
- 353
-
Potential of the Electro Contact Discharge Dressing Method in Truing and Sharpening Super Abrasive Grinding Wheels| 2004
- 359
-
A Study on Laser Cleaning of Al2O3 Grinding Wheels| 2004
- 365
-
Comparison of Laser Cleaning of Al2O3 and CBN Grinding Wheels| 2004
- 371
-
A Study of the Characteristics of the Diamond Dresser in the CMP Process| 2004
- 377
-
A Study on the Dressing Rate in CMP Pad Conditioning| 2004
- 383
-
Pad Surface Characterization and its Effect on the Tribological State in Chemical Mechanical Polishing| 2004
- 389
-
Chemical and Mechanical Characterizations of the Passivation Layer of Copper in Organic Acid Based Slurries and its CMP Performance| 2004
- 395
-
A Study of an Ultra-Precision CNC Polishing System| 2004
- 401
-
Pressure-Based Grinding and Polishing of Free-Form Lenses with Spherical Tools| 2004
- 407
-
Effect of Pre-Thin-Surface Grinding on Copper Chemical Mechanical Polishing| 2004
- 413
-
A Study on the Manufacture of the Next Generation CMP Pad with a Uniform Shape Using the Micro-Molding Method| 2004
- 417
-
A New Process for Internal Polishing of Cemented Carbide Using a Vibrating Tool with Two-Dimensional Small Motions| 2004
- 423
-
Prediction of Material Removal in Polishing Free-Form Surfaces with Fixed Abrasives| 2004
- 429
-
Improvement of Simulation Accuracy in Precision CMP with Oscillation Speed Control| 2004
- 433
-
A 3D Numerical Study of the Polishing Behavior during an Oxide Chemical Mechanical Planarization Process| 2004
- 441
-
Fabrication of High-Quality Surfaces on Micro Tools by the ELID Grinding Technique| 2004
- 447
-
Abrasive Micromachining with a Multi-Axes Vibration Tool| 2004
- 453
-
A Study of the Micro Pole Structure Fabrication and Application Technology by Micro End-Milling Process| 2004
- 459
-
A Study on the Micro Machining of Si Wafer Using Surface Chemical Reaction| 2004
- 465
-
An Investigation on the 3D Micromachining Techniques Based on a SPM| 2004
- 473
-
Improvement of Corrosion Resistance and Mechanical Properties of the Biomaterial Ti-6Al-4V Alloy by ELID Grinding| 2004
- 477
-
Micro-Polishing of Complex and Flat Parts Using a Chemical Oil Based ER Fluid| 2004
- 483
-
Development of the Electricity Rust Preventive Machining Method in Surface Grinding| 2004
- 489
-
Smoothing CVD Diamond Films by Wire EDM with High Travelling Speed| 2004
- 495
-
Determination of an Optimum Geometrical Arrangement of Workpiece in the Ultrasonic Elliptic-Vibration Shoe Centerless Grinding| 2004
- 501
-
A Study on the Helical Scan Groove Grinding| 2004
- 505
-
A Study on the Magnetic Field Assisted Machining Process for Internal Finishing Using a Magnetic Machining Jig| 2004
- 511
-
Magnetorheological Finishing of Glass Ceramic| 2004
- 515
-
Magnetic Field Characteristics of the Flat Type Electro-Magnetic Barrel Finishing Machine| 2004
- 521
-
Techniques for Enhancing the Cutting Performance of Abrasive Waterjets| 2004
- 527
-
A Study on the Abrasive Water Jet Cutting for Granite| 2004
- 535
-
A Study to Use the Electrically Conductive CVD Diamond as Electrodes in Electrical Discharge Machining| 2004
- 541
-
Plastic Bending of the Magnesium Alloy Plate by a Laser Forming Process| 2004
- 547
-
Development of Cutting Tools with Built-In Thin Film Thermocouples| 2004
- 553
-
Characteristics of the Fine Grained CVD Diamond Film and its Industrial Applications| 2004
- 559
-
High Speed Drilling and Tapping Using the Technique of Spindle through MQL Supply| 2004
- 565
-
Cutting Accuracy of the Small Radius Ball Endmill in Deep Precision Machining| 2004
- 571
-
Tap Cutting Performance Improvement by Granular Abrasive Grain Polishing| 2004
- 575
-
A Study of the Chip Formation and Chip Removal in Dry Drilling of Aluminum Cast Alloy| 2004