Direct Integration of Field Effect Transistors as Electro Mechanical Transducer for Stress on Beam Structures (English)
- New search for: Haas, S.
- New search for: Hafez, N.
- New search for: Loebel, K.-H.
- New search for: Koegel, E.
- New search for: Ramsbeck, M.
- New search for: Reuter, D.
- New search for: Horstmann, J. T.
- New search for: Gessner, T.
- New search for: Haas, S.
- New search for: Hafez, N.
- New search for: Loebel, K.-H.
- New search for: Koegel, E.
- New search for: Ramsbeck, M.
- New search for: Reuter, D.
- New search for: Horstmann, J. T.
- New search for: Gessner, T.
In:
Mikro-Nano-Integration
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4
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2016
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ISBN:
- Conference paper / Electronic Resource
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Title:Direct Integration of Field Effect Transistors as Electro Mechanical Transducer for Stress on Beam Structures
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Contributors:Haas, S. ( author ) / Hafez, N. ( author ) / Loebel, K.-H. ( author ) / Koegel, E. ( author ) / Ramsbeck, M. ( author ) / Reuter, D. ( author ) / Horstmann, J. T. ( author ) / Gessner, T. ( author )
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Conference:Mikro-Nano-Integration - 6. GMM-Workshop ; 2016 ; Duisburg, Deutschland
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Published in:GMM-Fachbericht ; 86 ; 4
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Publisher:
- New search for: VDE VERLAG GMBH
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Publication date:2016-01-01
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Size:4 pages
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ISBN:
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Type of media:Conference paper
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Type of material:Electronic Resource
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Language:English
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Source:
Table of contents conference proceedings
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Direct Integration of Field Effect Transistors as Electro Mechanical Transducer for Stress on Beam StructuresHaas, S. / Hafez, N. / Loebel, K.-H. / Koegel, E. / Ramsbeck, M. / Reuter, D. / Horstmann, J. T. / Gessner, T. et al. | 2016
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