Year of publication
Type of media
Source
Type of material
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TIB reading rooms collection
Synonyms were used for: Microlithography
Search without synonyms: keywords:("Microlithography")
Used synonyms:
- mikrolithografie
- mikrolithographie
-
Photomask and x-ray mask technology IV : 17 - 18 April, 1997, Kawasaki, Japan ; [invited and contributed papers]
TIBKAT | 1997|Keywords: Microlithography -
Technologies for microlithography manufacturing : [meeting], 11 July 1995, San Francisco, California ; [presented at SEMICON/WEST'95]
TIBKAT | 1995|Keywords: Microlithography -
Nanolithography and patterning techniques in microelectronics
TIBKAT | 2005|Keywords: Microlithography -
Polymers for high technology : electronics and photonics ; developed from a symposium sponsored by the Division of Polymeric Materials: Science and Engineering at the 192nd Meeting of the American Chemical Society, Anaheim, California, September, 7 - 12, 1986
TIBKAT | 1987|Keywords: Microlithography -
Photomask and next-generation lithography mask technology XV : 16 - 18 April 2008, Yokohama, Japan / sponsored by PMJ, Photomask Japan ... Toshiyuki Horiuchi, ed. ; Pt. 1
TIBKAT | 2008|Keywords: Microlithography -
Photomask and X-ray mask technology III : 18-19 April 1996, Kawasaki City, Kanagawa, Japan ; [invited and contributed papers presented at Photomask Japan '96]
TIBKAT | 1996|Keywords: Microlithography -
Photomask and next-generation lithography mask technology XV : 16 - 18 April 2008, Yokohama, Japan / sponsored by PMJ, Photomask Japan ... Toshiyuki Horiuchi, ed. ; Pt. 2
TIBKAT | 2008|Keywords: Microlithography -
Photomask and next-generation lithography mask technology XVI : 8 - 10 April 2009, Yokohama, Japan
TIBKAT | 2009|Keywords: Microlithography -
Photomask and next-generation lithography mask technology XIV : 17 - 19 April 2007, Yokohama, Japan / sponsored by PMJ, Photomask Japan ... Hidehiro Watanabe, ed. ; Pt. 1
TIBKAT | 2007|Keywords: Microlithography -
Handbook of VLSI microlithography : principles, technology, and applications
TIBKAT | 2001|Keywords: Microlithography -
Photomask and next-generation lithography mask technology XIV : 17 - 19 April 2007, Yokohama, Japan / sponsored by PMJ, Photomask Japan ... Hidehiro Watanabe, ed. ; Pt. 2
TIBKAT | 2007|Keywords: Microlithography -
Handbook of microlithography, micromachining, and microfabrication / P. Rai-Choudhury, ed ; Vol. 2: Micromachining and microfabrication
TIBKAT | 1997|Keywords: Microlithography -
Advanced microlithography technologies : 8 - 10 November 2004, Beijing, China
TIBKAT | 2005|Keywords: Microlithography -
Handbook of VLSI microlithography : principles, technology, and applications
TIBKAT | 1991|Keywords: Microlithography
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