Year of publication
Type of material
Licence
TIB reading rooms collection
Synonyms were used for: MIKROLITHOGRAPHIE
Search without synonyms: keywords:("MIKROLITHOGRAPHIE")
Used synonyms:
- microlithography
- mikrolithografie
-
Chemical Amplification Resists for Microlithography
Tema Archive | 2005|Keywords: Mikrolithographie -
Calculation and uses of the lithographic aerial image
Tema Archive | 2012|Keywords: Mikrolithographie -
Low-cost fabrication of transparent hard replica molds for imprinting lithography
Tema Archive | 2009|Keywords: Mikrolithographie -
Fabrication of 3D metamaterial resonators using self-aligned membrane projection lithography
Tema Archive | 2010|Keywords: Mikrolithographie -
A study on the innovative microlens projection lithography applied to the production of microstructures
Tema Archive | 2007|Keywords: Mikrolithographie -
Mikrolithographische Verfahren auf der Basis von SU-8-Dicklack zur Realisierung mikrooptischer Komponenten
Free accessBASE | 2005|Keywords: Mikrolithographie, Dickschicht-Mikrolithographie -
Computational metrology and inspection (CMI) in mask inspection, metrology, review, and repair
Tema Archive | 2012|Keywords: Mikrolithographie -
Generating Switchable and Reconfigurable Optical Vortices via Photopatterning of Liquid Crystals
Wiley | 2014|Keywords: microlithography -
Open-access microfluidic patch-clamp array with raised lateral cell trapping sites
Tema Archive | 2006|Keywords: Mikrolithographie -
Photopolymerization with microscale resolution: Influence of the physico-chemical and photonic parameters
Tema Archive | 2008|Keywords: Mikrolithographie -
10 micrometer-scale SPM local oxidation lithography
Tema Archive | 2010|Keywords: Mikrolithographie -
A novel monolithic microactuator fabricated by 3D rapid direct manufacture
Tema Archive | 2009|Keywords: Mikrolithographie -
Adaptive denoising method to improve aberration measurement performance
Tema Archive | 2013|Keywords: Mikrolithographie -
Apply low-temperature plasma in the rework procedure of Al film structure to prevent pattern collapsed and CuAl~2 precipitation [8324-120]
British Library Conference Proceedings | 2012|Keywords: Microlithography -
Photoresist qualification using scatterometry CD [8324-114]
British Library Conference Proceedings | 2012|Keywords: Microlithography -
In-situ critical dimension control during post-exposure bake with spectroscopic ellipsometry [8324-91]
British Library Conference Proceedings | 2012|Keywords: Microlithography -
E-beam inspection system for comparison of wafer and design data [8324-87]
British Library Conference Proceedings | 2012|Keywords: Microlithography -
Toward faster and better litho control in high-volume manufacturing [8324-73]
British Library Conference Proceedings | 2012|Keywords: Microlithography -
Contamination control: removing small particles from increasingly large wafers [8324-69]
British Library Conference Proceedings | 2012|Keywords: Microlithography
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