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Ion Projection Lithography for Resistless Patterning of Thin Magnetic Films
Online Contents | 2000| -
Verfahren zum Herstellen einer Nanostruktur auf einem Substrat
Free accessFraunhofer Publica | 2006| -
Contamination reduction in low voltage electron-beam microscopy for dimensional metrology
Online Contents | 1997| -
Chemically amplified deep ultraviolet resist for positive tone ion exposure
Online Contents | 1997| -
Electron-beam induced etching of resist with water vapor as the etching medium
Tema Archive | 1996| -
Influence of thin film thickness variations on pattern fidelity of X-ray masks
Tema Archive | 1986|
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