Year of publication
Type of media
Source
Subject
Type of material
Licence
Language
Synonyms were used for: ENGINEERING • FOR • OPTICAL ENGINEERING • SOCIETY
Search without synonyms: journal:(PROCEEDINGS - SPIE THE INTERNATIONAL SOCIETY FOR OPTICAL ENGINEERING)
Used synonyms:
- industrielle technik
- ingenieurwesen
- ingenieurwissenschaft
- ingenieurwissenschaften
- technik
- technikwissenschaften
- technique
- technische wissenschaften
Used synonyms:
- fur
Used synonyms:
- angewandte optik
- optische technik
- technische optik
Used synonyms:
- gesellschaft
-
Deep UV microsphere nanolifhography to achieve sub-100 nm feature size [9170-44]
British Library Conference Proceedings | 2014| -
Optical characterization of CMOS compatible micro optics fabricated by mask-based and mask-less hybrid lithography [9170-14]
British Library Conference Proceedings | 2014| -
Reticle heating feed-forward control (RHC2) on NXT:1980Di immersion scanner for enhanced on-product overlay [10147-42]
British Library Conference Proceedings | 2017 -
Scanner-to-scanner CD analysis and control in an HVM environment [10147-9]
British Library Conference Proceedings | 2017 -
Effective use of aerial image metrology for calibration of OPC models [10147-33]
British Library Conference Proceedings | 2017 -
Process margin improvement through finger-print removal based on scanner leveling data [10147-8]
British Library Conference Proceedings | 2017 -
Research of UV radiometer based on fiber spectroradiometer
British Library Conference Proceedings | 2021| -
Phase-frequency time-gated reflectometry for absolute measurements
British Library Conference Proceedings | 2021| -
Stabilizing Brillouin fiber laser for applications in distributed BOTDA sensing
British Library Conference Proceedings | 2021| -
Lithography tool improvement at productivity and performance with data analysis and machine learning
British Library Conference Proceedings | 2021| -
Effective data sampling techniques for machine learning OPC in full chip production
British Library Conference Proceedings | 2021| -
Thermostatic system of sensor in NIR spectrometer based on PID control [10141-19]
British Library Conference Proceedings | 2016 -
Optimal structure sampling for etch model calibration [10147-17]
British Library Conference Proceedings | 2017 -
FinFET-induced anisotropy in printing of implantation shapes [10147-40]
British Library Conference Proceedings | 2017 -
Samarium-doped TiO2 photoanodes for the molecular devices for solar energy conversion
British Library Conference Proceedings | 2021| -
Polarized light emission by deposition of aligned semiconductor nanorods [9170-41]
British Library Conference Proceedings | 2014| -
Characteristic temperature analysis for PbSe/PbSrSe multiple quantum well structure [9170-7]
British Library Conference Proceedings | 2014| -
Heterojunction of nano-poly (O-toluidine) on silicon nanowires is investigated as a candidate heterojunction diode [9170-5]
British Library Conference Proceedings | 2014|
Send my search to (beta)
Send your search query (search terms without filters) to other databases, portals and catalogues to find more interesting hits.
Dimensions is a database for abstracts and citations that links information on research funding with the resulting publications, studies and patents.
In the TIB AV-Portal, audiovisual media from science and teaching can be foundand own scientific videos can be published.
The FID move can be used to search for subject-specific literature, research data and other information from mobility and transport research.
The Open Research Knowledge Graph provides structured descriptions of research content and makes it comparable.
Freely accessible part of the collaborative K10plus catalogue with materials relevant for interlibrary loan and direct delivery services.