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Silicon substrate having cavity and cavity SOI substrate including the silicon substrate
Free accessEuropean Patent Office | 2023| -
ELASTIC WAVE DEVICE AND METHOD FOR MANUFACTURING THE SAME
Free accessEuropean Patent Office | 2022| -
Elastic wave device and method for manufacturing the same
Free accessEuropean Patent Office | 2021| -
Acoustic wave device, high frequency front end circuit, and communication apparatus
Free accessEuropean Patent Office | 2022| -
Piezoelectric device and method for manufacturing piezoelectric device
Free accessEuropean Patent Office | 2021| -
SILICON SUBSTRATE WITH CAVITY, AND CAVITY SOI SUBSTRATE USING SAID SILICON SUBSTRATE
Free accessEuropean Patent Office | 2020| -
SILICON SUBSTRATE HAVING CAVITY AND CAVITY SOI SUBSTRATE INCLUDING THE SILICON SUBSTRATE
Free accessEuropean Patent Office | 2021| -
Piezoelectric resonator manufacturing method and piezoelectric resonator
Free accessEuropean Patent Office | 2020| -
Piezoelectric device and production method for piezoelectric device
Free accessEuropean Patent Office | 2020| -
ACOUSTIC WAVE DEVICE, HIGH FREQUENCY FRONT END CIRCUIT, AND COMMUNICATION APPARATUS
Free accessEuropean Patent Office | 2020| -
ELASTIC WAVE DEVICE, HIGH-FREQUENCY FRONT END CIRCUIT, AND COMMUNICATIONS DEVICE
Free accessEuropean Patent Office | 2018| -
ELASTIC WAVE DEVICE, HIGH-FREQUENCY FRONT END CIRCUIT, AND COMMUNICATIONS DEVICE
Free accessEuropean Patent Office | 2018| -
Piezoelektrische Vorrichtung und Herstellungsverfahren für piezoelektrische Vorrichtung
Free accessEuropean Patent Office | 2017|
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