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Process margin improvement through finger-print removal based on scanner leveling data [10147-8]
British Library Conference Proceedings | 2017 -
Investigation of 3D photoresist profile effect in self-aligned patterning through virtual fabrication [10147-15]
British Library Conference Proceedings | 2017 -
Application of optical similarity in OPC model calibration [10147-62]
British Library Conference Proceedings | 2017 -
Layout independent leveling (LIL) on NXT:1980Di immersion scanners for enhanced productivity [10147-45]
British Library Conference Proceedings | 2017 -
On-product overlay improvement with an enhanced alignment system [10147-41]
British Library Conference Proceedings | 2017 -
Reducing the impact of etch-induced pattern shift on overlay by using lithography and etch tool corrections [10147-16]
British Library Conference Proceedings | 2017 -
Lithocell availability improvement through light source maintenance cycle improvement and optimization and its availability impact analysis for cutting-edge ArFi light source
British Library Conference Proceedings | 2021| -
Research on informational operation application of tactical loitering platform [10141-55]
British Library Conference Proceedings | 2016 -
Proportional navigation law design of plane-symmetrical vehicle with terminal attack angle constraint for over target flight [10141-63]
British Library Conference Proceedings | 2016 -
Research on flight stability performance of rotor aircraft based on visual servo control method [10141-67]
British Library Conference Proceedings | 2016 -
Experimental verification of on-product overlay improvement by intra-lot overlay control using metrology based grouping [10147-38]
British Library Conference Proceedings | 2017 -
Si-photonics waveguides manufacturability using advanced RET solutions [10147-36]
British Library Conference Proceedings | 2017 -
Study of aging behaviour on 193nm phase-shift masks [10147-74]
British Library Conference Proceedings | 2017 -
Alignment solutions on FBEOL layers using ASML scanners [10147-65]
British Library Conference Proceedings | 2017 -
Enhanced OPC recipe coverage and early hotspot detection through automated layout generation and analysis [10147-26]
British Library Conference Proceedings | 2017 -
Hetero-substituted derivative of PtPFPP for intracellular O2 sensing of mammalian cells
British Library Conference Proceedings | 2023| -
High-speed sampling strategy for photoacoustic tomography using ROMP compressed sensing algorithm
British Library Conference Proceedings | 2021| -
Reticle heating feed-forward control (RHC2) on NXT:1980Di immersion scanner for enhanced on-product overlay [10147-42]
British Library Conference Proceedings | 2017 -
Scanner-to-scanner CD analysis and control in an HVM environment [10147-9]
British Library Conference Proceedings | 2017 -
Effective use of aerial image metrology for calibration of OPC models [10147-33]
British Library Conference Proceedings | 2017 -
Constructing freeform source through the combination of neural network and binary ant colony optimization [10147-58]
British Library Conference Proceedings | 2017 -
Elimination of temperature cross-sensitivity for polymer FBG-based humidity sensor by gamma radiation treatment
British Library Conference Proceedings | 2023| -
Nucleolin protein-mediated specific detection of circulating cancer cells by U-bent optical fiber sensor
British Library Conference Proceedings | 2023| -
Optochemical sensor-based systems for the analysis of cell metabolism and bioenergetics: an overview
British Library Conference Proceedings | 2023| -
Lithography and OPC friendly triple patterning decomposition method for VIA [10147-55]
British Library Conference Proceedings | 2017 -
450mm lithography status for high volume manufacturing [10147-11]
British Library Conference Proceedings | 2017 -
Gaussian total variation blind restoration of ground-based space object imagery [10141-18]
British Library Conference Proceedings | 2016 -
Process of opto-mechanical design and assembly for reflective mirror subsystem of lithographic projection lens [10147-68]
British Library Conference Proceedings | 2017 -
The thermal aberration analysis of a lithography projection lens [10147-61]
British Library Conference Proceedings | 2017 -
Using heuristic optimization to set SRAF rules [10147-5]
British Library Conference Proceedings | 2017 -
Neuroelectronic device process development and challenge [10147-31]
British Library Conference Proceedings | 2017 -
Excimer laser gas usage reduction technology for semiconductor manufacturing [10147-60]
British Library Conference Proceedings | 2017 -
An OPC approach to improve logic gate features corner fidelity
British Library Conference Proceedings | 2019| -
Research on the development of space target detecting system and three-dimensional reconstruction technology [10141-20]
British Library Conference Proceedings | 2016 -
Fabrication of the curved artificial compound eyes with a homebuilt mold [10141-42]
British Library Conference Proceedings | 2016 -
Integrated SU-8 ring resonator for rapid humidity sensing
British Library Conference Proceedings | 2023| -
Research on pseudo-color image generation technology of the distribution of gaseous pollutants [10141-27]
British Library Conference Proceedings | 2016 -
Advanced ILT solutions to manufacture photonics designs
British Library Conference Proceedings | 2021| -
The pattern-matching based OPC approach for preemptively fixing the weak points [10147-53]
British Library Conference Proceedings | 2017 -
Thermostatic system of sensor in NIR spectrometer based on PID control [10141-19]
British Library Conference Proceedings | 2016 -
Analysis of the shaft behaviour in aircraft engines using tip clearance data and custom designed laser sensors
British Library Conference Proceedings | 2021| -
Qualification of small alignment mark by on-product overlay performance
British Library Conference Proceedings | 2021| -
Lithography tool improvement at productivity and performance with data analysis and machine learning
British Library Conference Proceedings | 2021| -
Effective data sampling techniques for machine learning OPC in full chip production
British Library Conference Proceedings | 2021| -
Optimal structure sampling for etch model calibration [10147-17]
British Library Conference Proceedings | 2017
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