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샘플의 디레이어링 동안 획득된 정합된 이미지들의 스택으로부터 생성된 3D 데이터큐브로부터의 3D 계측
Free accessEuropean Patent Office | 2024| -
3D METROLOGY FROM 3D DATACUBE CREATED FROM STACK OF REGISTERED IMAGES OBTAINED DURING DELAYERING OF THE SAMPLE
Free accessEuropean Patent Office | 2023| -
3D metrology from 3D datacube created from stack of registered images obtained during delayering of the sample
Free accessEuropean Patent Office | 2023| -
3D METROLOGY FROM 3D DATACUBE CREATED FROM STACK OF REGISTERED IMAGES OBTAINED DURING DELAYERING OF THE SAMPLE
Free accessEuropean Patent Office | 2022| -
3D METROLOGY FROM 3D DATACUBE CREATED FROM STACK OF REGISTERED IMAGES OBTAINED DURING DELAYERING OF THE SAMPLE
Free accessEuropean Patent Office | 2022| -
3D metrology from 3D data cubes generated by stack of registered images taken during delayering of sample
Free accessEuropean Patent Office | 2024|
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