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Synonyms were used for: Microlithography
Search without synonyms: keywords:("Microlithography")
Used synonyms:
- mikrolithografie
- mikrolithographie
-
Laser spectrum line shape metrology at 193 nm [4000-155]
British Library Conference Proceedings | 2000|Keywords: optical microlithography, microlithography -
Impact of lens aberration on pattern symmetry of DRAM cells [4000-140]
British Library Conference Proceedings | 2000|Keywords: optical microlithography, microlithography -
Accuracy of diffused aerial image model for full-chip-level optical proximity correction [4000-109]
British Library Conference Proceedings | 2000|Keywords: optical microlithography, microlithography -
Optical holography used in optical microlithography [4000-89]
British Library Conference Proceedings | 2000|Keywords: optical microlithography, microlithography -
Zernike coefficients: are they really enough? [4000-05]
British Library Conference Proceedings | 2000|Keywords: optical microlithography, microlithography -
Measurement of lens aberration by using in-situ interferometer and classification of lens for correct application [4000-04]
British Library Conference Proceedings | 2000|Keywords: optical microlithography, microlithography -
Influence of film stress on advanced optical reticle distortions [4000-185]
British Library Conference Proceedings | 2000|Keywords: optical microlithography, microlithography -
Output stabilization technology with chemical impurity control on ArF excimer laser [4000-157]
British Library Conference Proceedings | 2000|Keywords: optical microlithography, microlithography -
Lens aberration measurement technique using attentuated phase-shifting mask [4000-139]
British Library Conference Proceedings | 2000|Keywords: optical microlithography, microlithography -
Rigorous diffraction analysis for future mask technology [4000-69]
British Library Conference Proceedings | 2000|Keywords: optical microlithography, microlithography -
Practical optical-proximity-correction approach by considering interlayer overlap [4000-30]
British Library Conference Proceedings | 2000|Keywords: optical microlithography, microlithography -
KrF lithography for 130 nm [4000-18]
British Library Conference Proceedings | 2000|Keywords: optical microlithography, microlithography -
Gauging the performance of an in-situ interferometer [4000-134]
British Library Conference Proceedings | 2000|Keywords: optical microlithography, microlithography -
Dynamic performance of DUV step-and-scan systems and process latitude [4000-78]
British Library Conference Proceedings | 2000|Keywords: optical microlithography, microlithography -
In-situ measurement of lens aberrations [4000-03]
British Library Conference Proceedings | 2000|Keywords: optical microlithography, microlithography -
Patterning flexible substrates using surface relief structures in azobenzene functionalized polymer films
Tema Archive | 2008|Keywords: Mikrolithographie -
Field emission devices for advanced electronics comprised of lateral nanodiamond or carbon nanotube emitters
Tema Archive | 2007|Keywords: Mikrolithographie -
High resolution transmission electron microscopy study of calcium fluoride single crystal (111) surfaces processed by ultraprecision machining
Tema Archive | 2006|Keywords: Mikrolithographie -
An approach to lithographically defined self-assembled nanoparticle films
Tema Archive | 2006|Keywords: Mikrolithographie -
Molecular dynamics study on resolution in nanoimprint lithography for glass material
Tema Archive | 2009|Keywords: Mikrolithographie
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