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Conformality in atomic layer deposition : current status overview of analysis and modelling
Free accessBASE | 2019| -
Conformality in atomic layer deposition:Current status overview of analysis and modelling
Free accessBASE | 2019| -
Surface species during ALD of platinum observed with in situ reflection IR spectroscopy
Royal Society of Chemistry | 2018| -
Plasma enhanced atomic layer deposition of Fe2O3 thin films
National licenceRoyal Society of Chemistry | 2014| -
Method for depositing a ruthenium-containing film on a substrate by a cyclical deposition process
Free accessEuropean Patent Office | 2023| -
METHOD FOR DEPOSITING A RUTHENIUM-CONTAINING FILM ON A SUBSTRATE BY A CYCLICAL DEPOSITION PROCESS
Free accessEuropean Patent Office | 2023| -
A METHOD FOR DEPOSITING A RUTHENIUM-CONTAINING FILM ON A SUBSTRATE BY A CYCLICAL DEPOSITION PROCESS
Free accessEuropean Patent Office | 2021| -
A METHOD FOR DEPOSITING A RUTHENIUM-CONTAINING FILM ON A SUBSTRATE BY A CYCLICAL DEPOSITION PROCESS
Free accessEuropean Patent Office | 2020| -
Monte Carlo simulations of atomic layer deposition on 3D large surface area structures: Required precursor exposure for pillar- versus hole-type structures
American Institute of Physics | 2017| -
A METHOD FOR DEPOSITING A RUTHENIUM-CONTAINING FILM ON A SUBSTRATE BY A CYCLICAL DEPOSITION PROCESS
Free accessEuropean Patent Office | 2019| -
Annealing of thin “Tincone” films, a tin-based hybrid material deposited by molecular layer deposition, in reducing, inert, and oxidizing atmospheres
American Institute of Physics | 2018|
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