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Novel spin-on metal hardmask materials for filling applications [9051-87]
British Library Conference Proceedings | 2014|Keywords: Patterning materials -
Numerical analysis for resist profile after thermal process in display manufacturing [9051-63]
British Library Conference Proceedings | 2014|Keywords: Patterning materials -
Modeling acid transport in chemically amplified resist films [9051-60]
British Library Conference Proceedings | 2014|Keywords: Patterning materials -
Removal of highly crosslinked resists and hybrid polymers for single micro parts fabrication and nanoimprint stamp rework [9051-56]
British Library Conference Proceedings | 2014|Keywords: Patterning materials -
High-volume manufacturing equipment and processing for directed self-assembly applications (Invited Paper) [9051-22]
British Library Conference Proceedings | 2014|Keywords: Patterning materials -
Directed self-assembly process integration: Fin patterning approaches and challenges [9051-21]
British Library Conference Proceedings | 2014|Keywords: Patterning materials -
Novel surface treatment materials for aligning block-co-polymer in directed self-assembly processes [9051-20]
British Library Conference Proceedings | 2014|Keywords: Patterning materials -
Investigation of interactions between metrology and lithography with a CD SEM simulator [9051-8]
British Library Conference Proceedings | 2014|Keywords: Patterning materials -
SRAF window improvement with under-coating layer [9051-76]
British Library Conference Proceedings | 2014|Keywords: Patterning materials -
Improved adhesion of novolac and epoxy based resists by cationic organic materials on critical substrates for high volume patterning applications [9051-59]
British Library Conference Proceedings | 2014|Keywords: Patterning materials -
Inhomogeneity of PAGs in resist film studied by molecular-dynamics simulations for EUV lithography [9051-49]
British Library Conference Proceedings | 2014|Keywords: Patterning materials -
Extending lithography with advanced materials (Invited Paper) [9051-40]
British Library Conference Proceedings | 2014|Keywords: Patterning materials -
Robust complementary technique with multiple-patterning for sub-10 nm node device [9051-30]
British Library Conference Proceedings | 2014|Keywords: Patterning materials -
Line width roughness reduction by rational design of photoacid generator for submillisecond laser post-exposure bake [9051-16]
British Library Conference Proceedings | 2014|Keywords: Patterning materials -
Positive tone cross-linked resists based on photoacid inhibition of cross linking [9051-13]
British Library Conference Proceedings | 2014|Keywords: Patterning materials -
Organic-inorgnaic hybrid resists for EUVL [9051-71]
British Library Conference Proceedings | 2014|Keywords: Patterning materials -
Photoresist analysis to investigate LWR generation mechanism [9051-64]
British Library Conference Proceedings | 2014|Keywords: Patterning materials -
Wet particle source identification and reduction using a new filter cleaning process [9051-53]
British Library Conference Proceedings | 2014|Keywords: Patterning materials -
Manufacturability improvements in EUV resist processing toward NXE:3300 processing [9051-7]
British Library Conference Proceedings | 2014|Keywords: Patterning materials -
Development of novel protecting derivatives for chemically amplified extreme ultraviolet resist [9051-83]
British Library Conference Proceedings | 2014|Keywords: Patterning materials
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