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Synonyms were used for: Microlithography
Search without synonyms: keywords:("Microlithography")
Used synonyms:
- mikrolithografie
- mikrolithographie
-
Chemical Amplification Resists for Microlithography
Tema Archive | 2005|Keywords: Mikrolithographie -
Calculation and uses of the lithographic aerial image
Tema Archive | 2012|Keywords: Mikrolithographie -
Low-cost fabrication of transparent hard replica molds for imprinting lithography
Tema Archive | 2009|Keywords: Mikrolithographie -
Fabrication of 3D metamaterial resonators using self-aligned membrane projection lithography
Tema Archive | 2010|Keywords: Mikrolithographie -
A study on the innovative microlens projection lithography applied to the production of microstructures
Tema Archive | 2007|Keywords: Mikrolithographie -
Mikrolithographische Verfahren auf der Basis von SU-8-Dicklack zur Realisierung mikrooptischer Komponenten
Free accessBASE | 2005|Keywords: Mikrolithographie, Dickschicht-Mikrolithographie -
Computational metrology and inspection (CMI) in mask inspection, metrology, review, and repair
Tema Archive | 2012|Keywords: Mikrolithographie -
Generating Switchable and Reconfigurable Optical Vortices via Photopatterning of Liquid Crystals
Wiley | 2014|Keywords: microlithography -
Open-access microfluidic patch-clamp array with raised lateral cell trapping sites
Tema Archive | 2006|Keywords: Mikrolithographie -
Photopolymerization with microscale resolution: Influence of the physico-chemical and photonic parameters
Tema Archive | 2008|Keywords: Mikrolithographie -
10 micrometer-scale SPM local oxidation lithography
Tema Archive | 2010|Keywords: Mikrolithographie -
A novel monolithic microactuator fabricated by 3D rapid direct manufacture
Tema Archive | 2009|Keywords: Mikrolithographie -
Adaptive denoising method to improve aberration measurement performance
Tema Archive | 2013|Keywords: Mikrolithographie -
Apply low-temperature plasma in the rework procedure of Al film structure to prevent pattern collapsed and CuAl~2 precipitation [8324-120]
British Library Conference Proceedings | 2012|Keywords: Microlithography -
Photoresist qualification using scatterometry CD [8324-114]
British Library Conference Proceedings | 2012|Keywords: Microlithography -
In-situ critical dimension control during post-exposure bake with spectroscopic ellipsometry [8324-91]
British Library Conference Proceedings | 2012|Keywords: Microlithography -
E-beam inspection system for comparison of wafer and design data [8324-87]
British Library Conference Proceedings | 2012|Keywords: Microlithography -
Toward faster and better litho control in high-volume manufacturing [8324-73]
British Library Conference Proceedings | 2012|Keywords: Microlithography -
Contamination control: removing small particles from increasingly large wafers [8324-69]
British Library Conference Proceedings | 2012|Keywords: Microlithography -
Small particle defect characterization on critical layers of 22nm spacer Self-Aligned Double Patterning (SADP) [8324-63]
British Library Conference Proceedings | 2012|Keywords: Microlithography -
Quality indicators of image-based overlay [8324-46]
British Library Conference Proceedings | 2012|Keywords: Microlithography -
Wafer level warpage characterization of 3D interconnect processing wafers [8324-39]
British Library Conference Proceedings | 2012|Keywords: Microlithography -
Profile variation impact on FIB cross-section metrology [8324-32]
British Library Conference Proceedings | 2012|Keywords: Microlithography -
Wykorzystanie bezposredniej litografii interferencyjnej do nanoszenia struktur periodycznych na powierzchni roznych materialow
Tema Archive | 2014|Keywords: Mikrolithographie -
Automated Heuristic Defect Classification (AHDC) for haze-induced defect growth management and mask requalification [8324-121]
British Library Conference Proceedings | 2012|Keywords: Microlithography -
Real-time scanning detection system of defects on a photomask by using the light scattering and interference method [8324-106]
British Library Conference Proceedings | 2012|Keywords: Microlithography -
Advanced full-automatic inspection of copper interconnects [8324-95]
British Library Conference Proceedings | 2012|Keywords: Microlithography -
Nanoemitter: ultra-high-resolution electron source for CD metrology [8324-82]
British Library Conference Proceedings | 2012|Keywords: Microlithography -
Automated SEM recipe generation for OPC applications [8324-62]
British Library Conference Proceedings | 2012|Keywords: Microlithography -
Evaluation of a novel ultra small target technology supporting on-product overlay measurements [8324-44]
British Library Conference Proceedings | 2012|Keywords: Microlithography -
Sensitivity analysis of line-edge roughness measured by means of scatterometry: a simulation-based investigation [8324-18]
British Library Conference Proceedings | 2012|Keywords: Microlithography -
Ultrahigh 22-nm resolution EUV coherent diffraction imaging using a tabletop 13-nm high harmonic source [8324-13]
British Library Conference Proceedings | 2012|Keywords: Microlithography -
Transistor architecture impact on wafer inspection [8324-12]
British Library Conference Proceedings | 2012|Keywords: Microlithography -
High-order wafer alignment in manufacturing [8324-07]
British Library Conference Proceedings | 2012|Keywords: Microlithography -
Inspection and metrology for through-silicon vias and 3D integration (Keynote Paper) [8324-02]
British Library Conference Proceedings | 2012|Keywords: Microlithography -
Overlay target design and evaluation for SADP process [8324-107]
British Library Conference Proceedings | 2012|Keywords: Microlithography -
Overlay control methodology comparison: field-by-field and high-order methods [8324-74]
British Library Conference Proceedings | 2012|Keywords: Microlithography -
Diffraction-based overlay measurement on dedicated mark using rigorous modeling method [8324-68]
British Library Conference Proceedings | 2012|Keywords: Microlithography -
Recess gate process control by using 3D SCD in 3xm vertical DRAM [8324-65]
British Library Conference Proceedings | 2012|Keywords: Microlithography -
Defect distribution study at through silicon via (TSV) bottom by scanning white-light interference microscopy [8324-60]
British Library Conference Proceedings | 2012|Keywords: Microlithography -
Phase sensitive parametric optical metrology: exploring the limits of three-dimensional optical metrology [8324-22]
British Library Conference Proceedings | 2012|Keywords: Microlithography -
Scatterfield microscopy of 22-nm node patterned defects using visible and DUV light [8324-15]
British Library Conference Proceedings | 2012|Keywords: Microlithography -
Overcoming silicon limitations: new 3D-AFM carbon tips with constantly high-resolution for sub-28nm node semiconductor requirements [8324-108]
British Library Conference Proceedings | 2012|Keywords: Microlithography -
Experiment analysis of absolute flatness testing [8324-102]
British Library Conference Proceedings | 2012|Keywords: Microlithography -
A non-uniform SEM contour sampling technique for OPC model calibration [8324-94]
British Library Conference Proceedings | 2012|Keywords: Microlithography -
Carbon contamination removal in larger chambers with low-power downstream plasma cleaning [8324-83]
British Library Conference Proceedings | 2012|Keywords: Microlithography -
The study of high-sensitive and accurate metrology method by using CD-SEM [8324-81]
British Library Conference Proceedings | 2012|Keywords: Microlithography -
Application of DBM system to overlay verification and wiggling quantification for advanced process [8324-45]
British Library Conference Proceedings | 2012|Keywords: Microlithography -
Measurement of through silicon via etch profile by dark-field optical microscope [8324-38]
British Library Conference Proceedings | 2012|Keywords: Microlithography
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