Year of publication
Type of material
Licence
Language
1–20 of 533 hits
Sort by:
Sort by:
-
(INVITED) A TUTORIAL ON ATOMIC LAYER DEPOSITION AND ITS APPLICATION IN LITHIUM-ION BATTERIES
British Library Conference Proceedings | 2019| -
Deposition tool for combinatorial thin film material libraries
Free accessEuropean Patent Office | 2019| -
Reactor concepts for atomic layer deposition on agitated particles: A review
American Institute of Physics | 2014| -
Plasma enhanced atomic layer deposition of aluminum sulfide thin films
American Institute of Physics | 2018| -
Plasma enhanced atomic layer deposition of gallium sulfide thin films
American Institute of Physics | 2019| -
Deposition Tool for Combinatorial Thin Film Material Libraries
Free accessEuropean Patent Office | 2016| -
Surface species during ALD of platinum observed with in situ reflection IR spectroscopy
Royal Society of Chemistry | 2018| -
Plasma enhanced atomic layer deposition of Fe2O3 thin films
National licenceRoyal Society of Chemistry | 2014| -
A step toward correct interpretation of XPS results in metal oxides: A case study aided by first-principles method in ZnO
American Institute of Physics | 2023| -
METHOD FOR DEPOSITING A RUTHENIUM-CONTAINING FILM ON A SUBSTRATE BY A CYCLICAL DEPOSITION PROCESS
Free accessEuropean Patent Office | 2023| -
Method for depositing ruthenium-containing film on substrate by cyclic deposition process
Free accessEuropean Patent Office | 2023| -
Method for depositing a ruthenium-containing film on a substrate by a cyclical deposition process
Free accessEuropean Patent Office | 2023| -
A METHOD FOR DEPOSITING A RUTHENIUM-CONTAINING FILM ON A SUBSTRATE BY A CYCLICAL DEPOSITION PROCESS
Free accessEuropean Patent Office | 2020| -
A METHOD FOR DEPOSITING A RUTHENIUM-CONTAINING FILM ON A SUBSTRATE BY A CYCLICAL DEPOSITION PROCESS
Free accessEuropean Patent Office | 2021|
Send my search to (beta)
Send your search query (search terms without filters) to other databases, portals and catalogues to find more interesting hits.
Dimensions:
full data search
or
title and abstract search
Dimensions is a database for abstracts and citations that links information on research funding with the resulting publications, studies and patents.
TIB AV portal
In the TIB AV-Portal, audiovisual media from science and teaching can be foundand own scientific videos can be published.
Specialised Information Service for Mobility and Transport Research (FID move)
Open Research Knowledge Graph (ORKG)
The FID move can be used to search for subject-specific literature, research data and other information from mobility and transport research.
The Open Research Knowledge Graph provides structured descriptions of research content and makes it comparable.
Common Union Catalogue (GVK)
Freely accessible part of the collaborative K10plus catalogue with materials relevant for interlibrary loan and direct delivery services.