Year of publication
Subject
Type of material
Licence
TIB reading rooms collection
Synonyms were used for: Microlithography
Search without synonyms: keywords:("Microlithography")
Used synonyms:
- mikrolithografie
- mikrolithographie
-
Chemical Amplification Resists for Microlithography
Tema Archive | 2005|Keywords: Mikrolithographie -
Low-cost fabrication of transparent hard replica molds for imprinting lithography
Tema Archive | 2009|Keywords: Mikrolithographie -
Fabrication of 3D metamaterial resonators using self-aligned membrane projection lithography
Tema Archive | 2010|Keywords: Mikrolithographie -
A study on the innovative microlens projection lithography applied to the production of microstructures
Tema Archive | 2007|Keywords: Mikrolithographie -
Computational metrology and inspection (CMI) in mask inspection, metrology, review, and repair
Tema Archive | 2012|Keywords: Mikrolithographie -
Open-access microfluidic patch-clamp array with raised lateral cell trapping sites
Tema Archive | 2006|Keywords: Mikrolithographie -
Photopolymerization with microscale resolution: Influence of the physico-chemical and photonic parameters
Tema Archive | 2008|Keywords: Mikrolithographie -
10 micrometer-scale SPM local oxidation lithography
Tema Archive | 2010|Keywords: Mikrolithographie -
A novel monolithic microactuator fabricated by 3D rapid direct manufacture
Tema Archive | 2009|Keywords: Mikrolithographie -
Adaptive denoising method to improve aberration measurement performance
Tema Archive | 2013|Keywords: Mikrolithographie -
Wykorzystanie bezposredniej litografii interferencyjnej do nanoszenia struktur periodycznych na powierzchni roznych materialow
Tema Archive | 2014|Keywords: Mikrolithographie -
Data for "3D micro printed capillary electrospray thruster with a fully modular integrated extraction electrode"
Free accessDataCite | 2023|Keywords: 3D Microlithography -
A one-step route to a perfectly ordered wafer-scale microbowl array for size-dependent superhydrophobicity
Tema Archive | 2008|Keywords: Mikrolithographie -
Angle-dependent resonance of localized and propagating surface plasmons in microhole arrays for enhanced biosensing
Tema Archive | 2012|Keywords: Mikrolithographie -
Microfluidic probe: A new tool for integrating microiuidic environments and electronic wafer-probing
Tema Archive | 2010|Keywords: Mikrolithographie -
Fabrication of pH-sensitive microparticles for drug delivery applications using soft lithography techniques
Tema Archive | 2008|Keywords: Mikrolithographie -
Technologien und Applikationen der UV-Tiefenlithographie: Mikroaktorik, Mikrosensorik und Mikrofluidik
Tema Archive | 2007|Keywords: Mikrolithographie -
Micropatterned porous-silicon Bragg mirrors by dry-removal soft lithography
Tema Archive | 2006|Keywords: Mikrolithographie -
Control of microstructure shape and morphology In femtosecond laser ablation of imprint rollers
Tema Archive | 2009|Keywords: Mikrolithographie -
Development and ejection behavior of different material-based electrostatic ink-jet heads
Tema Archive | 2010|Keywords: Mikrolithographie -
Fluorocarbon resist for high-speed scanning probe lithography
Tema Archive | 2007|Keywords: Mikrolithographie -
On control of resist film uniformity in the microlithography process
Tema Archive | 2004|Keywords: Mikrolithographie -
TEM validation of CD AFM image reconstruction [6518-135]
British Library Conference Proceedings | 2007|Keywords: Microlithography -
Accuracy in optical image modeling [6518-39]
British Library Conference Proceedings | 2007|Keywords: Microlithography -
Electronically programmable membranes for improved biomolecule handling in micro-compartments on-chip
Tema Archive | 2008|Keywords: Mikrolithographie -
Lithography process transfer from ArF to high-NA KrF tool
Tema Archive | 2009|Keywords: Mikrolithographie -
Image simulation and surface reconstruction of undercut features in atomic force microscopy [6518-36]
British Library Conference Proceedings | 2007|Keywords: Microlithography -
Development of advanced mask inspection optics with transmitted and reflected light image acquisition [6518-64]
British Library Conference Proceedings | 2007|Keywords: Microlithography -
Detailed analysis of capability and limitations of CD scatterometry measurements for 65- and 45-nm nodes [6518-30]
British Library Conference Proceedings | 2007|Keywords: Microlithography -
Fundamental limits of optical critical dimension metrology: a simulation study (Invited Paper) [6518-29]
British Library Conference Proceedings | 2007|Keywords: Microlithography -
Influence of resist process on the best focus shift due to lens spherical aberration [4000-143]
British Library Conference Proceedings | 2000|Keywords: optical microlithography, microlithography -
Variable-threshold optical proximity correction (OPC) models for high-performance 0.18-mum process [4000-110]
British Library Conference Proceedings | 2000|Keywords: optical microlithography, microlithography -
Exposure latitude analysis for dense line and space patterns by using diffused aerial image model [4000-66]
British Library Conference Proceedings | 2000|Keywords: optical microlithography, microlithography -
Predicting electrical measurements by applying scatterometry to complex spacer structures [6518-75]
British Library Conference Proceedings | 2007|Keywords: Microlithography -
Lifetime and reliability results for a negative electron affinity photocathode in a demountable vacuum system
Tema Archive | 1998|Keywords: Mikrolithographie -
Optimization of lithography process to improve image deformation of contact hole sub-90 nm technology node [6518-146]
British Library Conference Proceedings | 2007|Keywords: Microlithography -
High-resolution in-die metrology using beam profile reflectometry and ellipsometry [6518-123]
British Library Conference Proceedings | 2007|Keywords: Microlithography -
Device metrology with high-performance scanning ion beams [6518-52]
British Library Conference Proceedings | 2007|Keywords: Microlithography -
Modeling the effect of line profile variation on optical critical dimension metrology [6518-34]
British Library Conference Proceedings | 2007|Keywords: Microlithography -
3D anisotropic semiconductor grooves measurement simulations (scatterometry) using FDTD methods [6518-168]
British Library Conference Proceedings | 2007|Keywords: Microlithography -
Properties and potential of VUV lithographic thin film materials [4000-170]
British Library Conference Proceedings | 2000|Keywords: optical microlithography, microlithography -
Fluoropolymers for 157-nm lithography: optical properties from VUV absorbance and ellipsometry measurements [4000-164]
British Library Conference Proceedings | 2000|Keywords: optical microlithography, microlithography -
Effects of off-axis illumination and scattering-bar optical proximity correction on the impact of lens aberration on 130-nm polygate mask: a simulation study [4000-175]
British Library Conference Proceedings | 2000|Keywords: optical microlithography, microlithography -
Phase-mask effects by dark-field lithography [4000-34]
British Library Conference Proceedings | 2000|Keywords: optical microlithography, microlithography -
Electroplated Cu micro electrode for the application in micro sinking electro discharge machining (Micro-SEDM)
Tema Archive | 2009|Keywords: Mikrolithographie -
0.32-mum pitch random line pattern formation by dense dummy pattern and double exposure in KrF wavelength [4000-121]
British Library Conference Proceedings | 2000|Keywords: optical microlithography, microlithography -
High-resolution multigrating spectrometer for high-quality deep-UV light source production [4000-159]
British Library Conference Proceedings | 2000|Keywords: optical microlithography, microlithography -
Laser spectrum line shape metrology at 193 nm [4000-155]
British Library Conference Proceedings | 2000|Keywords: optical microlithography, microlithography -
Impact of lens aberration on pattern symmetry of DRAM cells [4000-140]
British Library Conference Proceedings | 2000|Keywords: optical microlithography, microlithography
Send my search to (beta)
Send your search query (search terms without filters) to other databases, portals and catalogues to find more interesting hits.
Dimensions is a database for abstracts and citations that links information on research funding with the resulting publications, studies and patents.
In the TIB AV-Portal, audiovisual media from science and teaching can be foundand own scientific videos can be published.
The FID move can be used to search for subject-specific literature, research data and other information from mobility and transport research.
The Open Research Knowledge Graph provides structured descriptions of research content and makes it comparable.
Freely accessible part of the collaborative K10plus catalogue with materials relevant for interlibrary loan and direct delivery services.