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Adsorption of hydrogen fluoride on SiC surfaces: A density functional theory study
Online Contents | 2012| -
CATALYST USED FOR CATALYST-REFERRED ETCHING, PROCESSING PAD PROVIDED WITH CATALYST, AND CATALYST-REFERRED ETCHING DEVICE
Free accessEuropean Patent Office | 2020| -
Investigation of the Barrier Heights for Dissociative Adsorption of HF on SiC Surfaces in the Catalyst-Referred Etching Process
National licenceTrans Tech Publications | 2014|Contributors: Bui, Pho Van -
First-Principles Study of Reaction Process of SiC and HF Molecules in Catalyst-Referred Etching
National licenceTrans Tech Publications | 2012|Contributors: Bui, Pho Van -
Study of Terminated Species on 4H-SiC (0001) Surfaces Planarized by Catalyst-Referred Etching
National licenceTrans Tech Publications | 2013|Contributors: Bui, Pho Van
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