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Fluidity dependence of deprotonation kinetics of chemically amplified resist [9051-68]
British Library Conference Proceedings | 2014| -
SRAF window improvement with under-coating layer [9051-76]
British Library Conference Proceedings | 2014| -
Improved adhesion of novolac and epoxy based resists by cationic organic materials on critical substrates for high volume patterning applications [9051-59]
British Library Conference Proceedings | 2014| -
Inhomogeneity of PAGs in resist film studied by molecular-dynamics simulations for EUV lithography [9051-49]
British Library Conference Proceedings | 2014| -
Extending lithography with advanced materials (Invited Paper) [9051-40]
British Library Conference Proceedings | 2014|
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