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Synonyms were used for: Microlithography
Search without synonyms: keywords:("Microlithography")
Used synonyms:
- mikrolithografie
- mikrolithographie
-
Real-time profile shape reconstruction using dynamic scatterometry [6518-31]
British Library Conference Proceedings | 2007|Keywords: Microlithography -
Influence of resist process on the best focus shift due to lens spherical aberration [4000-143]
British Library Conference Proceedings | 2000|Keywords: optical microlithography, microlithography -
Variable-threshold optical proximity correction (OPC) models for high-performance 0.18-mum process [4000-110]
British Library Conference Proceedings | 2000|Keywords: optical microlithography, microlithography -
Exposure latitude analysis for dense line and space patterns by using diffused aerial image model [4000-66]
British Library Conference Proceedings | 2000|Keywords: optical microlithography, microlithography -
Adjustment of bilayer optical properties and the effect on imaging and etching performance [4000-98]
British Library Conference Proceedings | 2000|Keywords: optical microlithography, microlithography -
Application of perturbation methods in optical scatterometry [6518-33]
British Library Conference Proceedings | 2007|Keywords: Microlithography -
Improved dimension and shape metrology with versatile atomic force microscopy [6518-138]
British Library Conference Proceedings | 2007|Keywords: Microlithography -
Dynamic change of transmission of CaF~2 single crystals by irradiating with ArF excimer laser light [4000-181]
British Library Conference Proceedings | 2000|Keywords: optical microlithography, microlithography -
Laser cleaning of optical elements in 157-nm lithography [4000-169]
British Library Conference Proceedings | 2000|Keywords: optical microlithography, microlithography -
Ultranarrow-bandwidth excimer lasers for 248-nm DUV lithography [4000-161]
British Library Conference Proceedings | 2000|Keywords: optical microlithography, microlithography -
Performance of very high repetition rate ArF lasers [4000-156]
British Library Conference Proceedings | 2000|Keywords: optical microlithography, microlithography -
Understanding lens aberration and influences to lithographic imaging [4000-27]
British Library Conference Proceedings | 2000|Keywords: optical microlithography, microlithography -
Electroplated Cu micro electrode for the application in micro sinking electro discharge machining (Micro-SEDM)
Tema Archive | 2009|Keywords: Mikrolithographie -
Aberrations of steppers using phase-shifting point diffraction interferometry [4000-136]
British Library Conference Proceedings | 2000|Keywords: optical microlithography, microlithography -
Realization of very small aberration projection lenses [4000-52]
British Library Conference Proceedings | 2000|Keywords: optical microlithography, microlithography -
Properties and potential of VUV lithographic thin film materials [4000-170]
British Library Conference Proceedings | 2000|Keywords: optical microlithography, microlithography -
Fluoropolymers for 157-nm lithography: optical properties from VUV absorbance and ellipsometry measurements [4000-164]
British Library Conference Proceedings | 2000|Keywords: optical microlithography, microlithography -
Effects of off-axis illumination and scattering-bar optical proximity correction on the impact of lens aberration on 130-nm polygate mask: a simulation study [4000-175]
British Library Conference Proceedings | 2000|Keywords: optical microlithography, microlithography -
Phase-mask effects by dark-field lithography [4000-34]
British Library Conference Proceedings | 2000|Keywords: optical microlithography, microlithography -
High-resolution multigrating spectrometer for high-quality deep-UV light source production [4000-159]
British Library Conference Proceedings | 2000|Keywords: optical microlithography, microlithography
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