Combined dry plasma etching and online metrology for manufacturing highly focusing x-ray mirrors (English)
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In:
AIP Conference Proceedings
;
1741
, 1
;
4
;
2016
More details on this result
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Title:Combined dry plasma etching and online metrology for manufacturing highly focusing x-ray mirrors
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Contributors:Berujon, S. (author) / Ziegler, E. (author) / da Cunha, S. (author) / Bonneau, F. (author) / Baker, R. (author) / Clement, J.-M. (author) / Perez, M. (author) / Thuaudet, S. (author) / Malandrino, G. (author) / Vivo, A. (author)
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Published in:AIP Conference Proceedings ; 1741, 1 ; 4
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Issue:1
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Publication date:2016-07-27
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Size:4 pages
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ISSN:
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DOI:
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Type of media:Article (Journal)
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Type of material:Electronic Resource
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Language:English
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Keywords:
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