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Fabrication of a high-resolution electron beam with a carbon nanotube cold-cathode
Online Contents | 2017|Keywords: Vakuumtechnik -
Nitride etching with hydrofluorocarbons. I. Selective etching of nitride over silicon and oxide materials by gas discharge optimization and selective deposition of fluorocarbon polymer
Online Contents | 2017|Keywords: Vakuumtechnik -
Characterization of micro-arc oxidation coatings on aluminum drillpipes at different current density
Online Contents | 2017|Keywords: Vakuumtechnik -
High precision optical filter based on magnetron sputtering
Online Contents | 2017|Keywords: Vakuumtechnik -
Effect of resin accumulation on filling process in roll-to-roll UV imprint lithography
Online Contents | 2017|Keywords: Vakuumtechnik -
Proximity effect correction in electron-beam lithography based on computation of critical-development time with swarm intelligence
Online Contents | 2017|Keywords: Vakuumtechnik -
Electrical and optical characteristics of gamma-ray irradiated AlGaN/GaN high electron mobility transistors
Online Contents | 2017|Keywords: Vakuumtechnik -
III-V semiconductor extended short-wave infrared detectors
Online Contents | 2017|Keywords: Vakuumtechnik -
Effect of deposition conditions and composition on band offsets in atomic layer deposited HfxSi1−xOy on InGaZnO4
Online Contents | 2017|Keywords: Vakuumtechnik -
Top-down technique for scaling to nano in silicon MEMS
Online Contents | 2017|Keywords: Vakuumtechnik -
Effect of oxide traps on channel transport characteristics in graphene field effect transistors
Online Contents | 2017|Keywords: Vakuumtechnik -
SiC emitters for nanoscale vacuum electronics: A systematic study of cathode–anode gap by focused ion beam etching
Online Contents | 2017|Keywords: Vakuumtechnik -
Fabrication and comparative study of DC and low frequency noise characterization of GaN/AlGaN based MOS-HEMT and HEMT
Online Contents | 2017|Keywords: Vakuumtechnik -
Near-infrared laser annealing of Ge layers epitaxially grown on Si for high-performance photonic devices
Online Contents | 2017|Keywords: Vakuumtechnik -
AlN/GaN/AlN resonant tunneling diodes grown by rf-plasma assisted molecular beam epitaxy on freestanding GaN
Online Contents | 2017|Keywords: Vakuumtechnik -
Barrier tuning of atomic layer deposited Ta2O5 and Al2O3 in double dielectric diodes
Online Contents | 2017|Keywords: Vakuumtechnik -
Effect of droplet size, droplet placement, and gas dissolution on throughput and defect rate in UV nanoimprint lithography
Online Contents | 2017|Keywords: Vakuumtechnik -
Three-dimensional numerical simulation and experimental validation of flows in working chambers and inlet/outlet pockets of Roots pump
Online Contents | 2017|Keywords: Vakuumtechnik -
Control of unintentional oxygen incorporation in GaN
Online Contents | 2017|Keywords: Vakuumtechnik
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