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Global model of a low pressure ECR microwave plasma applied to the PECVD of SiO2 thin films
Online Contents | 2007| -
Growth mechanisms of SiO2 thin films prepared by plasma enhanced chemical vapour deposition
Online Contents | 2006| -
Simple model for atomic layer deposition precursor reaction and transport in a viscous-flow tubular reactor
British Library Online Contents | 2012| -
Collisional radiative model of an argon atmospheric capillary surface-wave discharge
Online Contents | 2004| -
A Markov chain approach to simulate Atomic Layer Deposition chemistry and transport inside nanostructured substrates
British Library Online Contents | 2014| -
Self-Limited Reaction-Diffusion in Nanostructured Substrates: Surface Coverage Dynamics and Analytic Approximations to ALD Saturation Times
British Library Online Contents | 2012| -
Modulation of the Growth Per Cycle in Atomic Layer Deposition Using Reversible Surface Functionalization
British Library Online Contents | 2013| -
Diffusion-Reaction Model of ALD in Nanostructured Substrates: Analytic Approximations to Dose Times as a Function of the Surface Reaction Probability
British Library Conference Proceedings | 2011|
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