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An etchant for delineation of flow pattern defects in heavily doped p-type silicon wafers
Elsevier | 2013|Keywords: Flow pattern defects -
Study of Flow Pattern Defects and Oxidation Induced Stacking Faults in Czochralski Single-Crystal Silicon Growth
Free accessDOAJ | 2023|Keywords: flow pattern defects -
Microdefects in Heavily Phosphorus-Doped Czochralski Silicon
National licenceTrans Tech Publications | 2011|Keywords: Flow Pattern Defects -
Effect of annealing atmospheres on the void defects in large-diameter CZSi single crystals
Elsevier | 2006|Keywords: Flow pattern defects (FPDs) -
Evolution of flow pattern defects in boron-doped 〈100〉 Czochralski silicon crystals during secco etching procedure
Elsevier | 2004|Keywords: A1. Flow pattern defects -
Comparison of different techniques for characterization of defects in n-type CZ silicon
Tema Archive | 2011|Keywords: FPDs (flow pattern defects) -
Investigation on low density defects in Czochralski silicon crystals: Their detectability, formation kinetics and influence on gate oxide integrity
Tema Archive | 1996|Keywords: FPD (flow pattern defects) -
Characterization of crystal originated defects in Czochralski silicon using nonagitated Secco etching
Tema Archive | 1994|Keywords: flow pattern defects
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