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Did you mean: person:(boer, P.) • person:(boyer, P.) • person:(bower, P.) • person:(borer, P.)
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A new purged UV spectroscopic ellipsometer to characterize thin films and multilayers at 157 nm
Free accessAmerican Institute of Physics | 2001| -
Fabrication of SiGe and SiGeC epitaxial layers by ion implantation and excimer laser annealing
Free accessAmerican Institute of Physics | 1998| -
Feasibility and applicability of integrated metrology using spectroscopic ellipsometry in a cluster tool
Free accessAmerican Institute of Physics | 2001| -
New infrared spectroscopic ellipsometer for low‐k dielectric characterization
Free accessAmerican Institute of Physics | 2003|Contributors: Khosla, Rajinder P. -
High‐k dielectric characterization by VUV spectroscopic ellipsometry and X‐ray reflection
Free accessAmerican Institute of Physics | 2003|Contributors: Khosla, Rajinder P.
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