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Deposition of diamond-like carbon thin films by the high power impulse magnetron sputtering method
Online Contents | 2017| -
Medium frequency magnetron self-sputtering of copper
British Library Conference Proceedings | 2008| -
Power supply frequency impact on magnetron sputtering of copper
British Library Online Contents | 2007| -
High efficiency thin dielctric films deposition using reactive pulsed magnetron sputtering - the choice of magnetron working point
British Library Online Contents | 2011| -
Efficiency of thin film compound deposition by reactive pulsed magnetron sputtering - target surface phenomena
British Library Online Contents | 2011| -
High efficiency thin dielctric films deposition using reactive pulsed magnetron sputtering - the choice of magnetron working point Elektronika (LII), no 8/2011
British Library Conference Proceedings | 2011| -
Magnetron sputtering modes during pulsed deposition process determined by the analysis of power supply parameter
British Library Online Contents | 2012|
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