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ALD Growth of PbTe and PbSe Superlattices for Thermoelectric Applications
British Library Conference Proceedings | 2013|Keywords: Atomic layer deposition, Deposition applications -
Ultra Dielectrophoresis Using Atomic Layer Deposited Films: Electrothermal Analysis
British Library Conference Proceedings | 2013|Keywords: Atomic layer deposition, Deposition applications -
Physical, Electrical, and Reliability Characteristics of Multi-Step Deposition-Annealed HfO~2 Film
British Library Conference Proceedings | 2013|Keywords: Atomic layer deposition, Deposition applications -
X-ray Characterization of PEALD versus PVD Tantalum Nitride Barrier Deposition and the Impact on Via Contact Resistance
British Library Conference Proceedings | 2013|Keywords: Atomic layer deposition, Deposition applications -
(Invited) ALD and Pulsed-CVD of Ru, RuO~2, and SrRuO~3
British Library Conference Proceedings | 2013|Keywords: Atomic layer deposition, Deposition applications -
(Invited) Advanced Dielectrics Targeting 2X DRAM MIM Capacitors
British Library Conference Proceedings | 2013|Keywords: Atomic layer deposition, Deposition applications -
(Invited) Unit Steps of an ALD Half-Cycle
British Library Conference Proceedings | 2013|Keywords: Atomic layer deposition, Deposition applications -
A Comprehensive Study of Thermal Stability on Microstructure and Residual Stress for ALD HfZrO~2 Films at 28nm HKMG CMOS Applications
British Library Conference Proceedings | 2013|Keywords: Atomic layer deposition, Deposition applications -
(Invited) Characterization of Atomic Layer Deposited Films as Diffusion Barriers for Silver Art Objects
British Library Conference Proceedings | 2013|Keywords: Atomic layer deposition, Deposition applications -
(Invited) Characteristics of SnS~x by Atomic Layer Deposition for CIGS Solar Cells
British Library Conference Proceedings | 2013|Keywords: Atomic layer deposition, Deposition applications
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