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BARRIER SCHEMES FOR METALLIZATION USING MANGANESE AND GRAPHENE
Free accessEuropean Patent Office | 2023| -
Crystalline dielectric systems for interconnect circuit manufacturing
Free accessEuropean Patent Office | 2024| -
PHASE CHANGE INTERCONNECTS AND METHODS FOR FORMING THE SAME
Free accessEuropean Patent Office | 2023| -
Barrier Schemes for Metallization Using Manganese and Graphene
Free accessEuropean Patent Office | 2023| -
EPITAXIAL HIGH-K ETCH STOP LAYER FOR BACKSIDE REVEAL INTEGRATION
Free accessEuropean Patent Office | 2022| -
ULTRA-SHALLOW DOPANT AND OHMIC CONTACT REGIONS BY SOLID STATE DIFFUSION
Free accessEuropean Patent Office | 2023| -
Liquid phase conformal silicon oxide spin coating deposition
Free accessEuropean Patent Office | 2023| -
ULTRA-SHALLOW DOPANT AND OHMIC CONTACT REGIONS BY SOLID STATE DIFFUSION
Free accessEuropean Patent Office | 2023| -
CRYSTALLINE DIELECTRIC SYSTEMS FOR INTERCONNECT CIRCUIT MANUFACTURING
Free accessEuropean Patent Office | 2021| -
Area-Selective Deposition: Fundamentals, Applications, and Future Outlook
American Chemical Society | 2020|
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