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Characteristics of very high-frequency plasma with an underexpanded supersonic gas jet
Elsevier | 2023|Keywords: VHF plasma -
Pressure dependent tailored attributes of silicon nanoneedles grown by VHF plasma technique
Elsevier | 2016|Keywords: VHF plasma -
Optical emission spectroscopy investigation on very high frequency plasma and its glow discharge mechanism during the microcrystalline silicon deposition
Elsevier | 2004|Keywords: VHF plasma -
Development of large-area a-Si:H films deposition using controlled VHF plasma
Elsevier | 2005|Keywords: VHF plasma -
Effect of the very high frequency plasma with a balanced power feeding on silicon film deposition
Elsevier | 2012|Keywords: VHF plasma -
Effect of additional VHF plasma source base on conventional RF-PECVD for large area fast growth microcrystalline silicon films
Elsevier | 2011|Keywords: Very high frequency (VHF) plasma -
Investigation of Plasma Parameters in a VHF Plasma With Narrow Gap Under High Gaseous Pressure
Wiley | 2009|Keywords: VHF plasma -
VHF plasma processing for in-line deposition systems
National licenceElsevier | 2002|Keywords: VHF plasma -
Measurements of SiH4/H2 VHF Plasma Parameters with Heated Langmuir Probe
Wiley | 2013|Keywords: VHF plasma -
Large area VHF plasma production using a ladder-shaped electrode
Elsevier | 2005|Keywords: VHF plasma -
Development of large-area VHF-PECVD technology for production of high efficiency Si heterojunction solar cells
Tema Archive | 2012|Keywords: VHF plasma -
Production of a uniform VHF H2 plasma by a narrow-gap discharge
Elsevier | 2015|Keywords: VHF plasma -
Microcrystalline silicon solar cells fabricated by VHF plasma CVD method
Elsevier | 2004|Keywords: VHF plasma -
Large area VHF plasma production by a balanced power feeding method
Elsevier | 2007|Keywords: VHF plasma -
A novel approach for the growth of μc-Si at a high rate over 3 nm/s
National licenceElsevier | 2002|Keywords: VHF plasma CVD -
Atomic-scale characterization of plasma-induced damage in plasma-enhanced atomic layer deposition
Elsevier | 2017|Keywords: VHF plasma
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