Year of publication
Type of media
Source
Type of material
Licence
Language
1–20 of 220 hits
Sort by:
Sort by:
-
Measurement of W-recess profile in advanced node 3D NAND device with IRCD technology utilizing a specialized design-rule compliant target
British Library Conference Proceedings | 2023| -
OPO robustness and measurability improvement via extended wavelengths
British Library Conference Proceedings | 2023| -
SEM ADI on device overlay: the advantages and outcome
British Library Conference Proceedings | 2023| -
SEMI-PointRend: improved semiconductor wafer defect classification and segmentation as rendering
British Library Conference Proceedings | 2023| -
Unbiased roughness measurements for 0.55NA EUV material setup
British Library Conference Proceedings | 2023| -
Large field of view metrology: detecting critical edge placement error signatures not seen with small field of view in an HVM environment
British Library Conference Proceedings | 2023| -
Automated (S)TEM metrology characterization of gate-all-around and 3D NAND devices
British Library Conference Proceedings | 2023| -
Automatic defect classification (ADC) solution using data-centric artificial intelligence (AI) for outgoing quality inspections in the semiconductor industry
British Library Conference Proceedings | 2023| -
Depth estimation from SEM images using deep learning and angular data diversity
British Library Conference Proceedings | 2023| -
The rise of contour metrology from niche solution to versatile enabler
British Library Conference Proceedings | 2023| -
High spatial frequency on-device overlay characterization using CD-SEM contours
British Library Conference Proceedings | 2023|
Send my search to (beta)
Send your search query (search terms without filters) to other databases, portals and catalogues to find more interesting hits.
Dimensions:
full data search
or
title and abstract search
Dimensions is a database for abstracts and citations that links information on research funding with the resulting publications, studies and patents.
TIB AV portal
In the TIB AV-Portal, audiovisual media from science and teaching can be foundand own scientific videos can be published.
Specialised Information Service for Mobility and Transport Research (FID move)
Open Research Knowledge Graph (ORKG)
The FID move can be used to search for subject-specific literature, research data and other information from mobility and transport research.
The Open Research Knowledge Graph provides structured descriptions of research content and makes it comparable.
Common Union Catalogue (GVK)
Freely accessible part of the collaborative K10plus catalogue with materials relevant for interlibrary loan and direct delivery services.