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Recent developments in dimensional nanometrology using AFMs
National licencePERSPECTIVEIOP Institute of Physics | 2011| -
Aspects of scanning force microscope probes and their effects on dimensional measurement
National licenceTOPICAL REVIEWIOP Institute of Physics | 2008| -
A novel pitch evaluation of one-dimensional gratings based on a cross-correlation filter
PaperIOP Institute of Physics | 2014| -
Fast and accurate: high-speed metrological large-range AFM for surface and nanometrology
PaperIOP Institute of Physics | 2018| -
From nanometre to millimetre: a feasibility study of the combination of scanning probe microscopy and combined optical and x-ray interferometry
National licenceDESIGN NOTEIOP Institute of Physics | 2003| -
Modelling and simulating scanning force microscopes for estimating measurement uncertainty: a virtual scanning force microscope
National licenceIOP Institute of Physics | 2011| -
Real-time cross-correlation filtering of a one-dimensional grating position-encoded signal
National licenceIOP Institute of Physics | 2011| -
An atomic force microscope for the study of the effects of tip–sample interactions on dimensional metrology
National licenceIOP Institute of Physics | 2007| -
Atomic force microscope cantilever as an encoding sensor for real-time displacement measurement
National licenceIOP Institute of Physics | 2010| -
A combined scanning tunnelling microscope and x-ray interferometer
National licenceIOP Institute of Physics | 2001| -
Accurate and traceable calibration of one-dimensional gratings
National licenceIOP Institute of Physics | 2005| -
Neural network approximation of tip-abrasion effects in AFM imaging
National licenceIOP Institute of Physics | 2008| -
Atomic force microscope cantilevers as encoders for real-time forward and backward displacement measurements
National licenceIOP Institute of Physics | 2011| -
Calibration of stylus profilometers using standards calibrated by metrological SFMs
Free accessIOP Institute of Physics | 2005| -
Development of a 3D-AFM for true 3D measurements of nanostructures
National licenceIOP Institute of Physics | 2011|
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