Year of publication
Subject
Type of material
Licence
TIB reading rooms collection
Synonyms were used for: Microlithography
Search without synonyms: keywords:("Microlithography")
Used synonyms:
- mikrolithografie
- mikrolithographie
-
Computer controlled electron-beam projection mask aligner
Tema Archive | 1974|Keywords: MIKROLITHOGRAPHIE -
Design of polymer resists for electron lithography. Part 1
Tema Archive | 1974|Keywords: MIKROLITHOGRAPHIE -
The interferometric analysis of flatness by eye and computer
Tema Archive | 1978|Keywords: MIKROLITHOGRAPHIE -
UMV 1:4/0,22 Objektiv zu einem Spezial-Bildgenerator
Tema Archive | 1980|Keywords: MIKROLITHOGRAPHIE -
High-Intensity Pulsed Plasma X-Ray Source for Micolithography
NTIS | 1981|Keywords: Microlithography -
Positive resist materials requirements for VLSI device fabrication. Part 2
Tema Archive | 1982|Keywords: MIKROLITHOGRAPHIE -
Structural composition of polymers relative to their plasma etch characteristics
Tema Archive | 1982|Keywords: MIKROLITHOGRAPHIE -
Evaluation of pure novolak cresol-formaldehyde resins for deep U.V. lithography
Tema Archive | 1982|Keywords: MIKROLITHOGRAPHIE -
Theory of Optical Edge Detection and Imaging of Thick Layers
NTIS | 1982|Keywords: Microlithography -
Triple layer system for high resolution microlithography
Tema Archive | 1983|Keywords: MIKROLITHOGRAPHIE -
Quelques Aspects Fondamentaux de la Microlithographie Electronique (Some Basic Aspects of Electronic Microlithography)
NTIS | 1983|Keywords: Microlithography -
Multi Level Resist Technique for Lithography on Ceramic Substrates
NTIS | 1983|Keywords: Microlithography -
Photoresist particle control for VLSI microlithography
Tema Archive | 1984|Keywords: MIKROLITHOGRAPHIE
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