Year of publication
Type of media
Source
Subject
Type of material
Licence
Language
1–50 of 25,946 hits
Sort by:
Sort by:
-
Application of optical similarity in OPC model calibration [10147-62]
British Library Conference Proceedings | 2017 -
Layout independent leveling (LIL) on NXT:1980Di immersion scanners for enhanced productivity [10147-45]
British Library Conference Proceedings | 2017 -
Reducing the impact of etch-induced pattern shift on overlay by using lithography and etch tool corrections [10147-16]
British Library Conference Proceedings | 2017 -
Si-photonics waveguides manufacturability using advanced RET solutions [10147-36]
British Library Conference Proceedings | 2017 -
Study of aging behaviour on 193nm phase-shift masks [10147-74]
British Library Conference Proceedings | 2017 -
Alignment solutions on FBEOL layers using ASML scanners [10147-65]
British Library Conference Proceedings | 2017 -
Enhanced OPC recipe coverage and early hotspot detection through automated layout generation and analysis [10147-26]
British Library Conference Proceedings | 2017 -
Lithography and OPC friendly triple patterning decomposition method for VIA [10147-55]
British Library Conference Proceedings | 2017 -
450mm lithography status for high volume manufacturing [10147-11]
British Library Conference Proceedings | 2017 -
Process of opto-mechanical design and assembly for reflective mirror subsystem of lithographic projection lens [10147-68]
British Library Conference Proceedings | 2017 -
The thermal aberration analysis of a lithography projection lens [10147-61]
British Library Conference Proceedings | 2017 -
Neuroelectronic device process development and challenge [10147-31]
British Library Conference Proceedings | 2017 -
Excimer laser gas usage reduction technology for semiconductor manufacturing [10147-60]
British Library Conference Proceedings | 2017 -
Advanced ILT solutions to manufacture photonics designs
British Library Conference Proceedings | 2021| -
Silicon nitride thin film for optofluidic sensor application
British Library Conference Proceedings | 2023| -
Reticle heating feed-forward control (RHC2) on NXT:1980Di immersion scanner for enhanced on-product overlay [10147-42]
British Library Conference Proceedings | 2017 -
Scanner-to-scanner CD analysis and control in an HVM environment [10147-9]
British Library Conference Proceedings | 2017 -
Effective use of aerial image metrology for calibration of OPC models [10147-33]
British Library Conference Proceedings | 2017 -
Process margin improvement through finger-print removal based on scanner leveling data [10147-8]
British Library Conference Proceedings | 2017 -
Experimental verification of on-product overlay improvement by intra-lot overlay control using metrology based grouping [10147-38]
British Library Conference Proceedings | 2017 -
Thermostatic system of sensor in NIR spectrometer based on PID control [10141-19]
British Library Conference Proceedings | 2016 -
Lithography tool improvement at productivity and performance with data analysis and machine learning
British Library Conference Proceedings | 2021| -
Effective data sampling techniques for machine learning OPC in full chip production
British Library Conference Proceedings | 2021| -
Optimal structure sampling for etch model calibration [10147-17]
British Library Conference Proceedings | 2017 -
FinFET-induced anisotropy in printing of implantation shapes [10147-40]
British Library Conference Proceedings | 2017 -
Samarium-doped TiO2 photoanodes for the molecular devices for solar energy conversion
British Library Conference Proceedings | 2021| -
Line edge roughness reduction for 7nm metals [10587-7]
British Library Conference Proceedings | 2018 -
Simulations and first manufacturing steps of a fully integrated WDM-element in the visible spectrum [8884-71]
British Library Conference Proceedings | 2013| -
Development of a high specification coating [8884-42]
British Library Conference Proceedings | 2013| -
Conformal window manufacturing process development and demonstration for polycrystalline materials [8884-24]
British Library Conference Proceedings | 2013| -
Research on flight stability performance of rotor aircraft based on visual servo control method [10141-67]
British Library Conference Proceedings | 2016 -
Metrology and deep learning integrated solution to drive OPC model accuracy improvement
British Library Conference Proceedings | 2019| -
Lithocell availability improvement through light source maintenance cycle improvement and optimization and its availability impact analysis for cutting-edge ArFi light source
British Library Conference Proceedings | 2021| -
Fast prediction of process variation band through machine learning models
British Library Conference Proceedings | 2021| -
Metal coated fiber sensor for laser power measurements with enhanced sensitivity
British Library Conference Proceedings | 2019| -
Automatic parameter setting for lens aberration control during product lot exposure
British Library Conference Proceedings | 2019| -
Implementing stray light baffles for improved JWST NIRCam performance [8836-29]
British Library Conference Proceedings | 2013| -
Optical characterization of window materials for aerospace applications [8884-50]
British Library Conference Proceedings | 2013| -
Design of systems involving easily measurable aspheres [8884-45]
British Library Conference Proceedings | 2013| -
Optical design with orthogonal surface descriptions [8884-44]
British Library Conference Proceedings | 2013| -
Determination of a suitable parameter field for the active fluid jet polishing process [8884-3]
British Library Conference Proceedings | 2013| -
Smart and precise alignment of optical systems [8884-88]
British Library Conference Proceedings | 2013| -
Wavefront measurements through optical diffraction interpretation [8884-80]
British Library Conference Proceedings | 2013| -
Vertical interferometer workstation for testing large spherical optics [8884-28]
British Library Conference Proceedings | 2013| -
Fabrication of high precision metallic freeform mirrors with magnetorheological finishing (MRF) [8884-91]
British Library Conference Proceedings | 2013|
Send my search to (beta)
Send your search query (search terms without filters) to other databases, portals and catalogues to find more interesting hits.
Dimensions:
full data search
or
title and abstract search
Dimensions is a database for abstracts and citations that links information on research funding with the resulting publications, studies and patents.
TIB AV portal
In the TIB AV-Portal, audiovisual media from science and teaching can be foundand own scientific videos can be published.
Specialised Information Service for Mobility and Transport Research (FID move)
Open Research Knowledge Graph (ORKG)
The FID move can be used to search for subject-specific literature, research data and other information from mobility and transport research.
The Open Research Knowledge Graph provides structured descriptions of research content and makes it comparable.
Common Union Catalogue (GVK)
Freely accessible part of the collaborative K10plus catalogue with materials relevant for interlibrary loan and direct delivery services.