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Dependence of dielectric constant of SiOCH low-k films on porosity and pore size
Online Contents | 2015| -
Dependence of dielectric constant of hydrocarbon bridged low-k films on porosity
American Institute of Physics | 2019| -
Dependence of dielectric constant of SiOCH low-k films on porosity and pore size
American Institute of Physics | 2015| -
Sputtering of Si by Ar: A binary collision approach based on quantum-mechanical cross sections
American Institute of Physics | 2018| -
Fluorine atoms interaction with the nanoporous materials: experiment and DFT simulation
Springer Verlag | 2017| -
Fluorine atoms interaction with the nanoporous materials: experiment and DFT simulation
Online Contents | 2017| -
Vibrationally-rotationally inelastic cross sections for H+SiO collisions
National licenceAmerican Institute of Physics | 2002| -
Experimental and DFT study of nitrogen atoms interactions with SiOCH low-κ films
Online Contents | 2017| -
Experimental and DFT study of nitrogen atoms interactions with SiOCH low-κ films
Springer Verlag | 2017| -
Effect of porosity and pore size on dielectric constant of organosilicate based low-k films: An analytical approach
American Institute of Physics | 2016| -
Helium electron beam rf plasma for low-k surface functionalization
American Institute of Physics | 2022|
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