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PFC-Free Dry Etching Method for Si Using Narrow-Gap VHF Plasma at Subatmospheric Pressure
Online Contents | 2010| -
Evaluation method of material properties for steel tube based on free bulge deformation behavior (Evalution of yield stress and n-value-1)
British Library Online Contents | 2004| -
Fetal growth and the timing of exposure to maternal smoking
British Library Online Contents | 2002| -
Atmospheric-pressure low-temperature plasma processes for thin film deposition
British Library Online Contents | 2014| -
Image Inclination Measurement by Evaluating Geometric Feature between Pairs of Edge Directions
British Library Online Contents | 2004| -
Atmospheric-Pressure Plasma Technology for the High-Rate and Low-Temperature Deposition of Si Thin Films
British Library Conference Proceedings | 2010| -
Low-temperature and High-rate Deposition of Microcrystalline Si Films Using Atmospheric-pressure Very High-frequency Plasma
British Library Online Contents | 2009| -
13-35 Image Inclination Measurement Based on Edge Directions and an Analysis of Relation between Visual Inclination
British Library Conference Proceedings | 2002| -
Formation of silicon carbide at low temperatures by chemical transport of silicon induced by atmospheric pressure H2/CH4 plasma
British Library Online Contents | 2008| -
Boron Elimination Filter from SiH~4 and B~2H~6 Gas Mixture for Purification of Metallurgical Si
British Library Conference Proceedings | 2014| -
Effect of H2 Flow Rate on High-Rate Etching of Si by Narrow-Gap Microwave Hydrogen Plasma
British Library Online Contents | 2013| -
Purified Silicon Film Formation from Metallurgical-Grade Silicon by Hydrogen-Plasma-Induced Chemical Transport (6 pages)
British Library Online Contents | 2011| -
Purified Silicon Film Formation from Metallurgical-Grade Silicon by Hydrogen-Plasma-Induced Chemical Transport (6 pages)
British Library Conference Proceedings | 2011| -
PFC-Free Dry Etching Method for Si Using Narrow-Gap VHF Plasma at Subatmospheric Pressure
British Library Online Contents | 2010|
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