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Optimal structure sampling for etch model calibration [10147-17]
British Library Conference Proceedings | 2017 -
Accurate characterization of 2D etch bias by capturing surrounding effects from resist and trench areas [10147-34]
British Library Conference Proceedings | 2017 -
FinFET-induced anisotropy in printing of implantation shapes [10147-40]
British Library Conference Proceedings | 2017 -
Process margin improvement through finger-print removal based on scanner leveling data [10147-8]
British Library Conference Proceedings | 2017 -
Development of the next-generation ArF excimer laser with ultra-narrow stable spectral bandwidth for multiple patterning immersion lithography [10147-59]
British Library Conference Proceedings | 2017 -
Lithography and OPC friendly triple patterning decomposition method for VIA [10147-55]
British Library Conference Proceedings | 2017 -
450mm lithography status for high volume manufacturing [10147-11]
British Library Conference Proceedings | 2017 -
Reliable silicon photonics optical transceiver IOCore in high temperature operation and immersion cooling systems
British Library Conference Proceedings | 2023| -
Hybrid-coherent reservoir computing for 200 km PAM-4 transmission links
British Library Conference Proceedings | 2023| -
Fast ethernet operation of a printed optical transmission path using industrial integration technologies
British Library Conference Proceedings | 2022|
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