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Investigation of material removal mechanisms involved in ICP etching of InGaN/GaN
Tema Archive | 2003| -
The Abbe principle, self-calibration and the design of co-ordinate measuring systems
Tema Archive | 2003| -
Microscopic friction force measuring system for the investigation of micro components
Tema Archive | 2003| -
The Micro Harmonic Drive: A high precision gear system miniaturized by direct-LIG
Tema Archive | 2003|
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