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Synonyms were used for: ENGINEERING • FOR • OPTICAL ENGINEERING • SOCIETY
Search without synonyms: journal:(PROCEEDINGS - SPIE THE INTERNATIONAL SOCIETY FOR OPTICAL ENGINEERING)
Used synonyms:
- industrielle technik
- ingenieurwesen
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Used synonyms:
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Eliminate the vibration defect for laser interference lithography using an optical chopper system [10147-51]
British Library Conference Proceedings | 2017 -
Study of aging behaviour on 193nm phase-shift masks [10147-74]
British Library Conference Proceedings | 2017 -
Alignment solutions on FBEOL layers using ASML scanners [10147-65]
British Library Conference Proceedings | 2017 -
Resist 3D aware mask solution with ILT for hotspot repair [10147-25]
British Library Conference Proceedings | 2017 -
Enhanced OPC recipe coverage and early hotspot detection through automated layout generation and analysis [10147-26]
British Library Conference Proceedings | 2017 -
Optimal structure sampling for etch model calibration [10147-17]
British Library Conference Proceedings | 2017 -
Accurate characterization of 2D etch bias by capturing surrounding effects from resist and trench areas [10147-34]
British Library Conference Proceedings | 2017 -
FinFET-induced anisotropy in printing of implantation shapes [10147-40]
British Library Conference Proceedings | 2017 -
Application of optical similarity in OPC model calibration [10147-62]
British Library Conference Proceedings | 2017 -
Layout independent leveling (LIL) on NXT:1980Di immersion scanners for enhanced productivity [10147-45]
British Library Conference Proceedings | 2017 -
Reducing the impact of etch-induced pattern shift on overlay by using lithography and etch tool corrections [10147-16]
British Library Conference Proceedings | 2017 -
Compact modeling for the negative tone development processes [10147-63]
British Library Conference Proceedings | 2017 -
Design fiber-to-waveguide coupling for photonic integrated circuits
British Library Conference Proceedings | 2023| -
Lithography and OPC friendly triple patterning decomposition method for VIA [10147-55]
British Library Conference Proceedings | 2017 -
450mm lithography status for high volume manufacturing [10147-11]
British Library Conference Proceedings | 2017 -
Reliable silicon photonics optical transceiver IOCore in high temperature operation and immersion cooling systems
British Library Conference Proceedings | 2023| -
Hybrid-coherent reservoir computing for 200 km PAM-4 transmission links
British Library Conference Proceedings | 2023| -
Nanocrystalline ceramic coatings for the capillary fiber lasers
British Library Conference Proceedings | 2023| -
Distributed acoustic sensing over available fiber networks: what can available fiber infrastructure tell us about our planet?
British Library Conference Proceedings | 2023| -
New design and improvements of an MR-compatible respiratory fiber-optic sensor
British Library Conference Proceedings | 2023|
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