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Design optimization of high pressure and high temperature piezoresistive pressure sensor for high sensitivity
American Institute of Physics | 2014| -
A resonant sensor composed of quartz double ended tuning fork and silicon substrate for digital acceleration measurement
American Institute of Physics | 2014| -
Geometry optimization for micro-pressure sensor considering dynamic interference
American Institute of Physics | 2014| -
Note: High temperature pressure sensor for petroleum well based on silicon over insulator
American Institute of Physics | 2015| -
Design and characterization of a microelectromechanical system electro-thermal linear motor with interlock mechanism for micro manipulators
American Institute of Physics | 2016|
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