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Digitaltechnik - eine praxisnahe Einführung
TIBKAT | 2008|Keywords: Electronics and Microelectronics, Instrumentation, Systems engineering, Circuits and Systems -
Fundamentals of microfabrication and nanotechnology / Marc J. Madou ; Vol. 2: Manufacturing techniques for microfabrication and nanotechnology
TIBKAT | 2012|Keywords: Microelectromechanical systems, Design and construction, Integrated circuits -
Fundamentals of microfabrication and nanotechnology / Marc J. Madou ; Vol. 3: From MEMS to bio-MEMS and bio-NEMS : manufacturing techniques and applications
TIBKAT | 2012|Keywords: Microelectromechanical systems, Integrated circuits, Design and construction -
Fundamentals of microfabrication and nanotechnology / Marc J. Madou ; Vol. 1: Solid-state physics, fluidics, and analytical techniques in micro- and nanotechnology
TIBKAT | 2012|Keywords: Microelectromechanical systems, Integrated circuits, Design and construction
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