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Supporting design of primary shaped micro parts and systems through provision of experience
Tema Archive | 2013|Keywords: MEMS (mikroelektromechanisches System) -
MEMS fluxgate magnetometer for parallel robot application
Tema Archive | 2010|Keywords: MEMS (mikroelektromechanisches System) -
Multilayered microfluidic probe heads
Tema Archive | 2009|Keywords: MEMS (mikroelektromechanisches System) -
Development and evaluation of a two-level functional structure for the thin film encapsulation
Tema Archive | 2013|Keywords: MEMS (mikroelektromechanisches System) -
Electrostatically driven low-voltage micromechanical RF switches using robust single-crystal silicon actuators
Tema Archive | 2010|Keywords: MEMS (mikroelektromechanisches System) -
Facile Fabrication of Single-Crystal-Diamond Nanostructures with Ultrahigh Aspect Ratio
Tema Archive | 2013|Keywords: MEMS (mikroelektromechanisches System) -
A molecular dynamics simulation approach for the squeeze-film damping of MEMS devices in the free molecular regime
Tema Archive | 2010|Keywords: MEMS (mikroelektromechanisches System) -
Performance enhancement of a silicon MEMS piezoresistive single axis accelerometer with electroplated gold on a proof mass
Tema Archive | 2009|Keywords: MEMS (mikroelektromechanisches System) -
Noise reduction and estimation in multiple micro-electro-mechanical inertial systems
Tema Archive | 2010|Keywords: MEMS (mikroelektromechanisches System) -
MEMS: Enabled Drug Delivery Systems
Tema Archive | 2015|Keywords: MEMS (mikroelektromechanisches System) -
A batch-fabricated and electret-free silicon electrostatic vibration energy harvester
Tema Archive | 2009|Keywords: MEMS (mikroelektromechanisches System) -
A study of relationship between laser intensity and scanning frequency in MEMS scanning system
Tema Archive | 2015|Keywords: MEMS (mikroelektromechanisches System) -
Ultrasensitive resonant MEMS transducers with tuneable coupling
Tema Archive | 2014|Keywords: MEMS (mikroelektromechanisches System) -
Review of stationary phases for microelectromechanical systems in gas chromatography: feasibility and separations
Tema Archive | 2014|Keywords: MEMS (mikroelektromechanisches System) -
Fabrication and characterization of reactive nanoscale multilayer systems for low-temperature bonding in microsystem technology
Tema Archive | 2010|Keywords: MEMS (mikroelektromechanisches System) -
Novel piezoresistive high-g accelerometer geometry with very high sensitivity-bandwidth product
Tema Archive | 2012|Keywords: MEMS (mikroelektromechanisches System) -
Nanonewton force-controlled manipulation of biological cells using a monolithic MEMS microgripper with two-axis force feedback
Tema Archive | 2008|Keywords: MEMS (mikroelektromechanisches System) -
Investigation of micro-cutting operations
Tema Archive | 2006|Keywords: MEMS (mikroelektromechanisches System) -
Micro fabrication of cyclic olefin copolymer (COC) based microfluidic devices
Tema Archive | 2012|Keywords: MEMS (mikroelektromechanisches System) -
Microstructured metal molds fabricated via investment casting
Tema Archive | 2010|Keywords: MEMS (mikroelektromechanisches System)
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