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Dependence of the quality factor of micromachined silicon beam resonators on pressure and geometry
American Institute of Physics | 1992| -
Realization of mechanical decoupling zones for package-stress reduction
British Library Online Contents | 1993| -
Review of Excitation and Detection Mechanisms for Micromechanical Resonators (S & M 0135)
British Library Online Contents | 1993| -
Nonlinearity and Hysteresis of Resonant Strain Gauges
British Library Conference Proceedings | 1995| -
Output Characteristics of a Thin-Film Piezoelectric AE Sensor for Magnetic Head-Disk Interaction
British Library Online Contents | 1997| -
Fundamental Study on a Thin-Film AE Sensor for Measurement of Behavior of a Multi-Pad Contact Slider
British Library Online Contents | 1996| -
Low Temperature Sacrificial Wafer Bonding for Planarization after Very Deep Etching
British Library Conference Proceedings | 1994| -
Fundamental Study on a Thin-Film AE Sensor for Measurement of Behavior of a Multi-Pad Contact Slider
British Library Conference Proceedings | 1996| -
An Integrated Optic Adiabatic TE/TM Mode Splitter on Silicon
British Library Online Contents | 1993| -
Piezoelectric Impact Force Sensor Array for Tribological Research on Rigid Disk Storage Media
British Library Conference Proceedings | 1995| -
Technologies and microstructures for separation techniques in chemical analysis [2882-08]
British Library Conference Proceedings | 1996| -
Finite-Mode Bond-Graph Model of a Resonant Silicon-Beam Force Sensor
British Library Online Contents | 1992| -
Applications of a model for silicon resonant sensors
British Library Conference Proceedings | 1992|
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