Comparison of Amorphous and Polycrystalline Tungsten Nitride Diffusion Barrier for MOCVD-Cu Metallization (English)
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- New search for: Dong Joon Kim
- New search for: Chang Woo Lee
- New search for: Yong Tae Kim
- New search for: Materials Research Society
- New search for: Chul Soon Kwon
- New search for: Dong Joon Kim
- New search for: Chang Woo Lee
- New search for: Yong Tae Kim
- New search for: Demczyk, B. G.
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In:
Evolution of thin film and surface structure and morphology
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441-446
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1995
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ISBN:
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ISSN:
- Conference paper / Print
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Title:Comparison of Amorphous and Polycrystalline Tungsten Nitride Diffusion Barrier for MOCVD-Cu Metallization
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Contributors:Chul Soon Kwon ( author ) / Dong Joon Kim ( author ) / Chang Woo Lee ( author ) / Yong Tae Kim ( author ) / Demczyk, B. G. / Materials Research Society
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Conference:Symposium; Fall meeting, Evolution of thin film and surface structure and morphology ; 1994 ; Boston; MA
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Published in:MATERIALS RESEARCH SOCIETY SYMPOSIUM PROCEEDINGS ; 355 ; 441-446
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Publisher:
- New search for: Materials Research Society
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Place of publication:Pittsburgh, Pa.
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Publication date:1995-01-01
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Size:6 pages
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ISBN:
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ISSN:
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Type of media:Conference paper
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Type of material:Print
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Language:English
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Keywords:
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Source:
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Table of contents conference proceedings
The tables of contents are generated automatically and are based on the data records of the individual contributions available in the index of the TIB portal. The display of the Tables of Contents may therefore be incomplete.
- 3
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Surface Energy Driven Crystallization of Amorphous Ni~6~9Cr~1~4P~1~7 AlloySchumacher, G. / Wanderka, N. / Wahi, R. P. / Materials Research Society et al. | 1995
- 9
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Structure, Morphology and Evolution of Interfaces in Si/Si~1~-~xGe~x SuperlatticesBaribeau, J.-M. / Lockwood, D. J. / Headrick, R. L. / Materials Research Society et al. | 1995
- 15
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Surface Diffusion of Large Ag Clusters on Ag(100)Wen, J.-M. / Evans, J. W. / Chang, S.-L. / Burnett, J. W. / Materials Research Society et al. | 1995
- 21
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Atomic Force Microscopy and Raman Spectroscopy Study of Strain Relaxation in InGaAs on GaAs(100) Grown by Chemical Beam Epitaxy Using Unprecracked MonoethylarsinePark, S.-J. / Kim, S.-B. / Jeong Sook Ha / Ro, J.-R. / Materials Research Society et al. | 1995
- 27
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Manipulation of Nucleation During Si Molecular Beam EpitaxyLarsson, M. I. / Ni, W.-X. / Hansson, G. V. / Materials Research Society et al. | 1995
- 33
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Structural Evolution or Rapid Thermal Carbonized Si SurfacesCimalla, V. / Pezoldt, J. / Materials Research Society et al. | 1995
- 39
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Pulsed Laser Deposition and Characterization of Novel Cu/TiN/Si(100) Heterostructures Grown Via Domain EpitaxyChowdhury, R. / Vispute, R. D. / Narayan, J. / Materials Research Society et al. | 1995
- 45
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Growth Morphology of Vicinal Hillocks on the {101} Face of KH~2PO~4: Evidence of Surface DiffusionLand, T. A. / De Yoreo, J. J. / Lee, J. D. / Ferguson, J. R. / Materials Research Society et al. | 1995
- 51
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^*The Morphology of Cu Clusters on SrTiO~3(001) at Initial Stages of Metal Film GrowthLiang, Y. / Carroll, D. L. / Bonnell, D. A. / Materials Research Society et al. | 1995
- 59
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Microstructural Evolution During the Epitaxial Growth of Ag/InP (100)Krishnamurthy, M. / Drucker, J. S. / Materials Research Society et al. | 1995
- 65
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Structural Evolution of Highly Crosslinked Polymer NetworksAnseth, K. S. / Bowman, C. N. / Materials Research Society et al. | 1995
- 71
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Morphology of Thin FilmsKeblinski, P. / Maritan, A. / Messier, R. / Toigo, F. / Materials Research Society et al. | 1995
- 77
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Nucleation and Growth of CVD Si Thin Films: AFM, SE and TEM AnalysisPaulson, W. M. / Hegde, R. I. / Doris, B. B. / Kaushik, V. / Materials Research Society et al. | 1995
- 83
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Probing the Nucleation of a Thin Metal Film: Atom Deposition vs. Cluster Beam DepositionMahoney, W. / Lin, S. T. / Andres, R. P. / Materials Research Society et al. | 1995
- 89
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Morphology and Step Coverage of In-Situ Doped Polysilicon Films Deposited by Single Wafer CVDFitch, J. T. / Hegde, R. I. / Beinglass, I. / Venkatesan, M. / Materials Research Society et al. | 1995
- 95
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Microstructural Evolution of Ag/GaAs (110)Drucker, J. / Krishnamurthy, M. / Materials Research Society et al. | 1995
- 101
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Growth Morphology of Ag Islands on GaAs (110) at Low Coverage: Monte Carlo SimulationsChalla, A. / Cale, T. S. / Drucker, J. / Materials Research Society et al. | 1995
- 107
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Patterns of Competitive Crystal GrowthGarcia-Ruiz, J. M. / Rodriguez-Navarro, A. / Materials Research Society et al. | 1995
- 115
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A Dynamic View of Step Configurations on Ag(110) and Their Role in the Formation of Oxygen OverlayersOzcomert, J. S. / Pai, W. W. / Bartelt, N. C. / Reutt-Robey, J. E. / Materials Research Society et al. | 1995
- 123
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Epitaxial Growth of Metastable Sn~xGe~1~-~x Alloy Films by Ion-Assisted Molecular Beam EpitaxyAtwater, H. A. / He, G. / Saipetch, K. / Materials Research Society et al. | 1995
- 135
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Morphology Maps of Small ParticlesDoraiswamy, N. / Marks, L. D. / Materials Research Society et al. | 1995
- 141
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Structure of Nanophase Gold Particles on Iron Oxide SupportsDemczyk, B. G. / Sze, C. / Gulari, E. / Materials Research Society et al. | 1995
- 147
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Using Atomic Force Microscopy to Image Langmuir Blodgett Films of Disk Shaped MoleculesMaliszewskyj, N. C. / Josefowicz, J. Y. / Heiney, P. A. / McCauley, J. P. / Materials Research Society et al. | 1995
- 153
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A Soft Incommensurate Reconstruction on Pb/Si(111)Hwang, I.-S. / Martinez, R. E. / Liu, C. / Golovchenko, J. A. / Materials Research Society et al. | 1995
- 157
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Measuring Vacancy Diffusivity and Vacancy Assisted Clustering by Nitridation Enhanced Diffusion of Sb in Si(100) Doping SuperlatticesMogi, T. K. / Gossmann, H.-J. / Rafferty, C. S. / Luftman, H. S. / Materials Research Society et al. | 1995
- 163
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Co~3O~4 Epitaxial Formation on CoO(100)Carson, G. A. / Nassir, M. H. / Langell, M. A. / Materials Research Society et al. | 1995
- 169
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Tetragonal Au-Ni (001) Solid Solutions Grown by MBEMarty, A. / Dynna, M. / Gilles, B. / Patrat, G. / Materials Research Society et al. | 1995
- 175
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Microstructure and Reconstruction of LaAlO~3 {100} and {110} SurfacesWang, Z. L. / Shapiro, A. J. / Materials Research Society et al. | 1995
- 181
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Atomic Imaging of Metal-Semiconductor Surfaces Using UHV-HREM and DiffractionMarks, L. D. / Jayaram, G. / Plass, R. / Doraiswamy, N. / Materials Research Society et al. | 1995
- 191
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Nanofabrication of Materials with a Scanning Tunneling MicroscopeKondo, S. / Heike, S. / Lutwyche, M. / Wada, Y. / Materials Research Society et al. | 1995
- 197
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Surface and Defect Structure of Epitaxial Gallium Phosphide on Si(001)Miller, A. E. / Kelliher, J. T. / Dietz, N. / Bachmann, K. J. / Materials Research Society et al. | 1995
- 203
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Step-Step Interactions on the Vicinal Ge(001) SurfaceKersten, B. A. / Sjerps-Koomen, L. / Zandvliet, H. J. W. / Blank, D. H. A. / Materials Research Society et al. | 1995
- 209
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Characterization of Sputtered Cerium Dioxide Thin FilmsGuo, S. / Jacobsen, S. N. / Helmersson, U. / Jaerrendahl, K. / Materials Research Society et al. | 1995
- 215
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Crystalline Perfection of Semiconductor Surfaces by X-Ray Multiple DiffractionMorelhao, S. L. / Avanci, L. H. / Cardoso, L. P. / Materials Research Society et al. | 1995
- 221
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SFM Studies of the Surface Morphology of IceNickolayev, O. / Petrenko, V. / Materials Research Society et al. | 1995
- 227
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Molecular Dynamics Study of Disordering and Premelting of the Pb(110) SurfaceLanda, A. / Hakkinen, H. / Barnett, R. N. / Wynblatt, P. / Materials Research Society et al. | 1995
- 235
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Role of Surface Steps in Thin Film Growth and Properties Studied by LEEMAltman, M. S. / Cai, Q. / Chung, W. F. / Luo, E. Z. / Materials Research Society et al. | 1995
- 247
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In-Situ Scanning Probe Microscopy of Solid-Liquid Interfaces: Role of Epitaxial Oxide Adlayers on Cu ElectrodepositionLaGraff, J. R. / Gewirth, A. A. / Materials Research Society et al. | 1995
- 253
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Probing Biopolymer Films with Scanning Force MethodsHaugstad, G. / Gladfelter, W. L. / Weberg, E. B. / Weberg, R. T. / Materials Research Society et al. | 1995
- 259
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Reconstruction from an Oxidized Si(111) Surface Studied by High-Temperature STMSato, T. / Sueyoshi, T. / Iwatsuki, M. / Kersker, M. / Materials Research Society et al. | 1995
- 263
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Monte Carlo Simulation of a Growing Pb-Film on Cu (100) and (111) SurfacesBauer, W. / Betz, G. / Bangert, H. / Bergauer, A. / Materials Research Society et al. | 1995
- 269
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Interface Morphology of RF-Sputtered Nb/Al~2O~3 Multilayers Studied by X-Ray Reflectivity and Diffuse ScatteringSalditt, T. / Metzger, T. H. / Peisl, J. / Morawe, C. / Materials Research Society et al. | 1995
- 275
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Structure of the Annealed Au-Si(100) System: A UHV-HREM StudyJayaram, G. / Marks, L. D. / Materials Research Society et al. | 1995
- 281
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Atomic Structure of Ultrathin Erbium Silicides on Si(111)Lohmeier, M. / Huisman, W. J. / Ter Horst, G. / Zagwijn, P. M. / Materials Research Society et al. | 1995
- 287
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Ambient and High Temperature STM Investigations of the Growth of Titanium Silicide on Silicon SubstratesStephenson, A. W. / Wong, T. M. H. / Welland, M. E. / Materials Research Society et al. | 1995
- 293
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Structural Characterization of Ga on Si(112) by Auger Electron DiffractionYater, J. E. / Shih, A. / Idzerda, Y. U. / Materials Research Society et al. | 1995
- 301
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Roughness Analysis of Si~1~-~xGe~x FilmsFeenstra, R. M. / Lutz, M. A. / Copel, M. / Materials Research Society et al. | 1995
- 311
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Magnetic Force Microscopy: Recent Advances and ApplicationsBabcock, K. / Dugas, M. / Manalis, S. / Elings, V. / Materials Research Society et al. | 1995
- 323
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Step Coverage and Material Properties of CVD Titanium Nitride Films from TDMAT and TDEAT Organic PrecursorsToprac, A. J. / Wang, S.-Q. / Musher, J. / Gordon, R. G. / Materials Research Society et al. | 1995
- 329
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Validation of the Modelling of a Solid-Liquid Reaction by a Solid-Vapor ReactionReumont, G. / Perrot, P. / Foct, J. / Materials Research Society et al. | 1995
- 335
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Orientation Selection and Microstructural Evolution of Epitaxial Pt Films on (001) MgOMcIntyre, P. C. / Maggiore, C. J. / Nastasi, M. / Materials Research Society et al. | 1995
- 341
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Comparison of Properties of CVD Copper Films Deposited on Different Substrate MaterialsChong Mu Lee / Sung Hee Han / Materials Research Society et al. | 1995
- 347
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Preferred Orientation and Magnetic Properties of Barium Hexaferrite Thin Films Devitrified from the GlassAgarwal, G. / Speyer, R. F. / Lee, C.-K. / Spratt, G. / Materials Research Society et al. | 1995
- 353
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Evaluation of Surface Characteristics of ZnS and Zn~2SiO~4 Powders by SFMLi, G. / Materials Research Society et al. | 1995
- 359
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A Comparison of the Physical Properties of Cluster-Based and Vacuum-Evaporated Thin Metal FilmsBielefeld, J. D. / Osifchin, R. G. / Andres, R. P. / Materials Research Society et al. | 1995
- 365
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Evolution of Microstructure During Low-Temperature Solid Phase Epitaxial Growth of Si~xGe~1~-~x on Si(001)Ramanath, G. / Xiao, H. Z. / Lai, S. L. / Ma, Z. / Materials Research Society et al. | 1995
- 373
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Spectral Sensitivities of X-Ray Diffraction and Atomic Force Microscopy to the Roughness of Si/SiO~2 InterfacesEvans-Lutterodt, K. W. / Tang, M.-T. / Materials Research Society et al. | 1995
- 377
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Surface Roughness Investigation of Thin SiO~2 Films Deposited from N~2O and SiH~4Watt, V. H. C. / Moinpour, M. / Sadjadi, R. / Lu, W. / Materials Research Society et al. | 1995
- 383
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Wear Resistance of Pearlitic Steel MicrostructuresPerez-Unzueta, A. J. / Materials Research Society et al. | 1995
- 389
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Surface Roughness and Specific Contact Resistance of AuGeNi/InP Ohmic ContactsClausen, T. / Leistiko, O. / Materials Research Society et al. | 1995
- 395
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Dynamic Surface Evolution of Sputtered Cu-Coatings: A Quantification of Surface Diffusion Effects by AFMEisenmenger-Sittner, C. / Bangert, H. / Bergauer, A. / Bauer, W. / Materials Research Society et al. | 1995
- 401
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Study of Surface Structure, Morphology and Hardness of Several Different Diamond-Like Carbon FilmsYip, P. W. / Hsieh, A. / Dehmer, P. G. / Materials Research Society et al. | 1995
- 409
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Dissolution of CaCO~3(1014) SurfaceLiang, Y. / Baer, D. R. / Lea, A. S. / Materials Research Society et al. | 1995
- 415
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Tungsten Silicide Stability and Interface Reaction Determined by Modeling and ExperimentsFeng, T. / Christou, A. / Materials Research Society et al. | 1995
- 421
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A Model for Oxide Film Evolution on Alloys and Prediction of Resulting Layer StructureCocke, D. L. / Dorris, K. / Naugle, D. G. / Hess, T. R. / Materials Research Society et al. | 1995
- 427
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Phase Transformations in a-Si/Ni/c-Si Structures with Different Interfacial Ni Layer ThicknessesKuznetsov, A. Y. / Khodos, I. I. / Linnros, J. / Mohadjeri, B. / Materials Research Society et al. | 1995
- 433
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An HREM Study of the Microstructure of A1 Contact on GaN/AlN/SiC Thin FilmsHuang, Y. / Smith, L. / Kim, M. J. / Carpenter, R. W. / Materials Research Society et al. | 1995
- 441
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Comparison of Amorphous and Polycrystalline Tungsten Nitride Diffusion Barrier for MOCVD-Cu MetallizationChul Soon Kwon / Dong Joon Kim / Chang Woo Lee / Yong Tae Kim / Materials Research Society et al. | 1995
- 447
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Characterization and Annealing of Sputtered AlN Films for Piezoelectric ResonatorsSchade, M. R. / Anderson, T. / Deal, P. W. / Evans, K. / Materials Research Society et al. | 1995
- 453
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Mechanism of Facet Formation During Epitaxial CoSi~2 Growth Using Co/Refractory BilayersByun, J. S. / Rha, K. G. / Kim, W. S. / Kim, H. J. / Materials Research Society et al. | 1995
- 459
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Amorphous Ti-Si-N Barrier Metal for Cu Metallization on ULSIsIijima, T. / Shimooka, Y. / Suguro, K. / Materials Research Society et al. | 1995
- 465
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Epitaxial TiSi~2 Growth on Si(100) from Reactive Sputtered TiN~x and Subsequent AnnealingByun, J. S. / Rha, K. G. / Kim, W. S. / Materials Research Society et al. | 1995
- 471
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Microstructure and Interfacial Reactions in RuO~2/Ta~2N Precision Thin Film ResistorsMa, E. / Wallace, R. L. / Anderson, W. A. / Materials Research Society et al. | 1995
- 477
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High Resolution Microscopy of Pd/InP InterfacesPalmer, J. W. / Anderson, W. A. / Hoelzer, D. T. / Materials Research Society et al. | 1995
- 483
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Characterization of Tantalum Oxide Thin Film and its Electrodes for Dram's Capacitor ApplicationPark, J.-W. / Jeon, S.-R. / Lee, J.-S. / Lee, J.-Y. / Materials Research Society et al. | 1995
- 491
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Microstructures of Tungsten Silicide Films Deposited by CVD and by SputteringKim, Y.-W. / Lee, N.-I. / Park, M.-H. / Materials Research Society et al. | 1995
- 497
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Structural-Chemical Properties of InP Own OxidesKorotchenkov, G. S. / Skryshevsky, V. A. / Materials Research Society et al. | 1995
- 503
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Condition of Interface: Anodic Oxide - A^3B^3 SemiconductorKorotchenkov, G. S. / Michailov, V. A. / Materials Research Society et al. | 1995
- 507
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Surface Structure and Morphology of CdS Thin Films Deposited by Spray PyrolysisGolovanov, V. / Lantto, V. / Leppaevuori, S. / Uusimaeki, A. / Materials Research Society et al. | 1995
- 513
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Epitaxial Formation and Characterization of CeO~2 FilmsTian, C. / Du, Y. / Chan, S.-W. / Materials Research Society et al. | 1995
- 519
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XPS Study of Sub-Monolayer Native Oxide on HF-Treated Si SurfacesYano, F. / Hiraoka, A. / Itoga, T. / Kojima, H. / Materials Research Society et al. | 1995
- 525
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Characterization of the Degradation Processes in the Buried Heterostructure Quantum Well Laser Diodes Using Internal Second Harmonic EmissionLupu, A. T. / Syrbu, A. V. / Mereutza, A. Z. / Yakovlev, V. P. / Materials Research Society et al. | 1995
- 531
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Surface Alloy Phases of Immiscible Metals: A Semiempirical Study of Au Growth on Ni(110)Bozzolo, G. / Iba�ez-Meier, R. / Ferrante, J. / Materials Research Society et al. | 1995
- 539
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A Model for Low-Resistivity TiSi~2 Formation on Narrow Polysilicon LinesApte, P. P. / Pollack, G. / Materials Research Society et al. | 1995
- 545
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Influence of Interface Roughness Scattering on Electron Mobility in GaAs-Al~0~.~3Ga~0~.~7As Two Dimensional Electron Gas (2DEG) HeterostructuresYang, B. / Cheng, Y.-H. / Wang, Z.-G. / Liang, J.-B. / Materials Research Society et al. | 1995
- 551
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Ceramic Coatings in Pump ManufacturingKuehl, A. / Riegger, H. / Scott, K. T. / McCabe, A. / Materials Research Society et al. | 1995
- 557
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ZrO~2 and ZrO~2-Y~2O~3 Phase Structure in Films and PowdersCaruso, R. / Pellegri, N. / De Sanctis, O. / Caracoche, M. C. / Materials Research Society et al. | 1995
- 563
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RF Aerosol Mist Plasma Deposition of Oxide FilmsWilliams, J. A. A. / Shen, C. Q. / Vuong, K. D. / Tenpas, E. / Materials Research Society et al. | 1995
- 569
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Elastic Misfit Strain Relaxation in Highly Strained InAs Dots on GaAs as Studied by TEM, AFM and VFF Atomistic CalculationsAndroussi, Y. / Francois, P. / Lefebvre, A. / Priester, C. / Materials Research Society et al. | 1995
- 575
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Modeling of Collimated Titanium Nitride Physical Vapor Deposition Using a Combined Specular-Diffuse FormulationToprac, A. J. / Jones, B. P. / Schlueter, J. / Cale, T. S. / Materials Research Society et al. | 1995
- 581
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Very Low Temperature Deposition of Polycrystalline Silicon Films with Micro-Meter-Order Grains on SiO~2Wang, K.-C. / Yew, T.-R. / Hwang, H.-L. / Materials Research Society et al. | 1995
- 587
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ZnO:In Thin Films Prepared with Different Precursor Salts by Spray Pyrolysis and Studied by Electron MicroscopyAcosta, D. R. / Lovera, O. / Maldonado, A. / Asomoza, R. / Materials Research Society et al. | 1995
- 593
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Capillary Instabilities in Cobalt Silicide Thin FilmsPramanick, S. / Patnaik, B. / Rozgonyi, G. A. / Materials Research Society et al. | 1995
- 601
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Surface Topography and Cocondensed Amorphous ZrCo-Alloy Films Investigated In Situ by UHV-STMReinker, B. / Moske, M. / Geisler, H. / Samwer, K. / Materials Research Society et al. | 1995
- 607
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Grain Growth Behavior of Bismuth Titanate Thin Film on Metallic Silicon SubstratesLu, Y. / Schulze, W. A. / Hoelzer, D. T. / Materials Research Society et al. | 1995
- 613
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Microstructure and Surface Morphology of Ag and Au Films Grown on Hydrogen-Terminated Si(111) SubstratesNaik, R. / Auner, G. W. / Gebremariam, S. / Tatham, A. / Materials Research Society et al. | 1995
- 625
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Direct Sub-Lattice Imaging of Interface Dislocation Structures in CdTe/GaAs(001)McGibbon, A. J. / Pennycook, S. J. / Angelo, J. E. / Mills, M. J. / Materials Research Society et al. | 1995
- 631
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The Effect of Si on TiAl~3 Formation in Ti/Al Alloy BilayersBesser, P. R. / Sanchez, J. E. / Alvis, R. / Materials Research Society et al. | 1995
- 637
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Effects of Rapid Thermal Annealing on Heavily Boron Doped Silicon Epitaxial LayersWang, J. / Xu, Q. / Lu, F. / Sun, H. / Materials Research Society et al. | 1995
- 643
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Computer Simulation of Surface Diffusion of Copper on Copper (111) and (100) SurfacesTakano, J. / Mochizuki, M. / Doyama, M. / Materials Research Society et al. | 1995
- 649
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Reduction of Defects in Highly Lattice Mismatched InGaAs Grown on GaAs by MOCVDLee, B. / Yoon, M. / Baek, J.-H. / Lee, E.-H. / Materials Research Society et al. | 1995
- 655
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Defect-Free GaAs Cap Layer on Aluminum Oxide Generated by Thermal Oxidation of AlAsLee, B. / Yoon, M. / Baek, J.-H. / Lee, E.-H. / Materials Research Society et al. | 1995