Analysis of the Piezoresistive Effect in n-type beta-SiC Based on Electron Transport and Deformation Potential Theory (English)
- New search for: Toriyama, T.
- New search for: Sugiyama, S.
- New search for: Toriyama, T.
- New search for: Sugiyama, S.
In:
Micromechatronics and human science; MHS2000
;
175-180
;
2000
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ISBN:
- Conference paper / Print
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Title:Analysis of the Piezoresistive Effect in n-type beta-SiC Based on Electron Transport and Deformation Potential Theory
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Contributors:Toriyama, T. ( author ) / Sugiyama, S. ( author )
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Conference:International symposium, Micromechatronics and human science; MHS2000 ; 2000 ; Nagoya, Japan
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Published in:
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Publisher:
- New search for: IEEE
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Publication date:2000-01-01
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Size:6 pages
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Remarks:Theme title: Creation of new technology for the 21st century. IEEE cat no 00TH8530
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ISBN:
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Type of media:Conference paper
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Type of material:Print
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Language:English
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Keywords:
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Source:
© Metadata Copyright the British Library Board and other contributors. All rights reserved.
Table of contents conference proceedings
The tables of contents are generated automatically and are based on the data records of the individual contributions available in the index of the TIB portal. The display of the Tables of Contents may therefore be incomplete.
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MHS2000. Proceedings of 2000 International Symposium on Micromechatronics and Human Science (Cat. No.00TH8530)| 2000
- 1
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Development of super devices for medical applicationsAkiyama, M. et al. | 2000
- 3
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Micro-assembly for top-down nanotechnologySkidmore, G.D. / Ellis, M. / Parker, E. / Sarkar, N. / Merkle, R. et al. | 2000
- 11
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European R&D programs for MST/MEMS-Nexus, EUROPRACTICE and European MST/MEMS success storiesMenozzi, G. et al. | 2000
- 23
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Laser microfabrication/manipulation of dielectric materialsMisawa, H. / Juodkazis, S. / Marcinkevicius, A. / Mizeikis, V. / Yamaguchi, A. / Hongbo Sun, / Matsuo, S. et al. | 2000
- 35
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Micro SMA actuator and motion controlKuribayashi, K. et al. | 2000
- 43
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Improvement of accuracy in laser photolithography for producing micro part by the addition of unidirectional whiskerNakamoto, T. / Yamaguchi, K. / Obata, T. et al. | 2000
- 49
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Physical processes in micromachining of silicon by laser /spl mu/-jetKathuria, Y. et al. | 2000
- 49
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Physical Processes in Micromachining of Silicon by Laser mu-JetKathuria, Y. P. et al. | 2000
- 53
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Deep X-ray exposure system with multistage for 3D microfabricationYou, H. / Matsuzuka, N. / Yamaji, T. / Tabata, O. et al. | 2000
- 59
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Control circuit in an in-pipe wireless micro inspection robotTsuruta, K. / Sasaya, T. / Shibata, T. / Kawahara, N. et al. | 2000
- 65
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Spiral-type micro-machine for medical applicationsIshiyama, K. / Arai, K.I. / Sendoh, M. / Yamazaki, A. et al. | 2000
- 71
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Developing Khepera robot applications in a Webots environmentWang, L.F. / Tan, K.C. / Prahlad, V. et al. | 2000
- 77
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Improvement of ultra-fine piercing by vacuum systemMori, T. / Hirota, K. / Tokumoto, D. et al. | 2000
- 83
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Micro connector fabricated by micro process technologyBhuiyan, M.M.I. / Unno, A. / Yokoyama, Y. / Toriyama, T. / Sugiyama, S. et al. | 2000
- 89
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Effects of etching pressure and aperture width on Si etching with XeF/sub 2/ [for MEMS]Sugano, K. / Tabata, O. et al. | 2000
- 89
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Effects of Etching Pressure and Aperture Width on Si Etching with XeF~2Sugano, K. / Tabata, O. et al. | 2000
- 95
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Forming a rounded etched profile by using two-step anisotropic wet etchingShikida, M. / Kawasaki, K. / Sato, K. et al. | 2000
- 101
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Torsion and strain analysis of left ventricular wall at ejection period by using optical-flowYagi, K. / Sawaki, Y. / Inaba, T. / Tokuda, M. / Yamamoto, A. / Sekioka, K. et al. | 2000
- 107
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Vibration transmission of an USM: rotor observed by phase-shift interferometryYamamoto, T. / Torii, A. / Ueda, A. / Hane, K. et al. | 2000
- 113
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Coherent detection circuit for high precision encodersMizoguchi, M. / Matsukawa, T. / Takeuchi, K. / Fukuda, T. et al. | 2000
- 119
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Safety evaluation method of human-care robot controlIkuta, K. / Nokota, M. / Ishii, H. et al. | 2000
- 129
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Probabilistic algorithm and training rule for a new identification and control kernel application to robotics systemsKhoukhi, A. et al. | 2000
- 135
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Flexible microrobots for micro assembly tasksWoern, H. / Seyfried, J. / St. Fahlbusch, / Buerkle, A. / Schmoeckel, F. et al. | 2000
- 145
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Flexible micro-processing by multiple miniature robots in SEM vacuum chamberFuchiwaki, O. / Aoyama, H. et al. | 2000
- 151
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3D nanorobotic manipulation of nano-order objects inside SEMLixin Dong, / Arai, F. / Fukuda, T. et al. | 2000
- 157
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A magnetic suspension parallel motion hand and its application to micro processesNakamura, T. / Shimamura, K. / Ando, T. et al. | 2000
- 163
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Development of a macro/micro mechanism for human scale teleoperating systemShuxiang Guo, / Sugimoto, K. / Hata, S. et al. | 2000
- 169
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SMA micro pumps and switching valves for biochemical IC familyIkuta, K. / Hasegawa, T. / Adachi, T. et al. | 2000
- 175
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Analysis of the Piezoresistive Effect in n-type beta-SiC Based on Electron Transport and Deformation Potential TheoryToriyama, T. / Sugiyama, S. et al. | 2000
- 175
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Analysis of the piezoresistive effect in n-type /spl beta/-SiC based on electron transport and deformation potential theoryToriyama, T. / Sugiyama, S. et al. | 2000
- 181
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Development of a new type tactile sensor using micro electromagnetic coil for human robotXianhe Ding, / Kuribayashi, K. / Hashida, T. et al. | 2000
- 189
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Artificial Larynx Using PZT Ceramics Vibrator as a Sound Source (The Characteristic Improvement of PZT Ceramics Vibrator)Ooe, K. / Fukuda, T. / Arai, F. et al. | 2000
- 189
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Artificial larynx using PZT ceramic vibrator as a sound source (the characteristic improvement of PZT ceramic vibrator)Ooe, K. / Fukuda, T. / Arai, F. et al. | 2000
- 195
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Microknife using ultrasonic vibrationArai, F. / Amano, T. / Fukuda, T. / Satoh, H. et al. | 2000
- 201
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Three-dimensional acoustic micromanipulation using four ultrasonic transducersKozuka, T. / Tuziuti, T. / Mitome, H. / Arai, F. / Fukuda, T. et al. | 2000
- 207
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Miniature robots with three degrees of freedomKoyanagi, T. / Fukui, R. / Torii, A. / Ueda, A. et al. | 2000
- 213
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Micropositioners for microscopy applications based on the stick-slip effectBergander, A. / Breguet, J.-M. / Schmitt, C. / Clavel, R. et al. | 2000
- 217
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Proposal of braid-shape polymer microactuatorIshihara, H. / Fukuda, T. et al. | 2000
- 223
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Electrostatic actuator with novel shaped cantileverHirai, Y. / Marushima, Y. / Soda, S. / Donghao Jin, / Kawata, H. / Inoue, K. / Tanaka, Y. et al. | 2000
- 229
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Electrostatic micro actuators with high-aspect-ratio driving gap for hard disk drive applicationIizuka, T. / Oba, T. / Fujita, H. et al. | 2000
- 237
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Fabrication of self-supporting polysilicon thermopileYajima, I. / Toriyama, T. / Sugiyama, S. / Fukumasu, K. / Konishi, S. et al. | 2000
- 246
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Authors index| 2000