Surface micromachined ring test structures to determine mechanical properties of compressive CMOS IC thin films (English)
- New search for: Kramer, T.
- New search for: Paul, O.
- New search for: Kramer, T.
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In:
European conference on solid-state transducers; Eurosensors XIV
;
21-22
;
2000
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ISBN:
- Conference paper / Print
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Title:Surface micromachined ring test structures to determine mechanical properties of compressive CMOS IC thin films
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Contributors:
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Conference:14th, European conference on solid-state transducers; Eurosensors XIV ; 2000 ; Copenhagen
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Published in:EUROSENSORS -CONFERENCE- ; 21-22
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Publisher:
- New search for: Mikroelektronik Centret
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Publication date:2000-01-01
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Size:2 pages
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Remarks:See also same shelfmark for papers on CD-ROM
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ISBN:
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Type of media:Conference paper
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Type of material:Print
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Language:English
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Keywords:
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Source:
© Metadata Copyright the British Library Board and other contributors. All rights reserved.
Table of contents conference proceedings
The tables of contents are generated automatically and are based on the data records of the individual contributions available in the index of the TIB portal. The display of the Tables of Contents may therefore be incomplete.
- 1
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CMOS-based microsensorsBaltes, H. / Brand, O. et al. | 2000
- 9
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Merging of IC-manufacturing and traditional manufacturing in BioMEMSLu, Y. / Florkey, J. / Madou, M. et al. | 2000
- 17
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Analysis of a CMOS low power thermoelectric generatorStrasser, M. / Aigner, R. / Wachutka, G. et al. | 2000
- 19
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A CMOS visible image sensor array using current mirroring integration readout circuitryBircan, A. / Akbay, S. S. / Akin, T. et al. | 2000
- 21
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Surface micromachined ring test structures to determine mechanical properties of compressive CMOS IC thin filmsKramer, T. / Paul, O. et al. | 2000
- 23
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New CMOS-compatible mechanical stress sensorSutor, A. / Lerch, R. / Hohe, H. P. et al. | 2000
- 25
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Two-level thermoelectric structures based on CMOS processDu, C. / Lin, Z. / Lee, C. et al. | 2000
- 27
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Porous silicon as microstructured biocatalytic sensor materialBengtsson, M. / Drott, J. / Ekstrom, S. / Lendl, B. / Collins, A. / Csoregi, E. / Marko-Varga, G. / Laurell, T. et al. | 2000
- 29
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Multisensing in subnanoliter high-speed screening (HSS) arraysVellekoop, M. J. / Hjelt, K. T. / Lubking, G. W. / Bastemeijer, J. / Sarro, P. M. / Criado, D. / Iordanov, V. et al. | 2000
- 31
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A flow-through amperometric sensor based on dialysis tubing and free enzyme reactorsBohm, S. / Pijanowska, D. / Olthuis, W. / Bergveld, P. et al. | 2000
- 33
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Glucose sensor with separated working electrode and enzyme membraneWu, J. / Suls, J. / Sansen, W. et al. | 2000
- 35
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Conductometric enzyme biosensor for formaldehyde determinationDzyadevich, S. V. / Korpan, Y. I. / Arkhipova, V. N. / Jaffrezic-Renault, N. / Martelet, C. / El skaya, A. V. / Soldatkin, A. P. et al. | 2000
- 37
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Silicon-glass components for gas chromatographDziuban, J. / Gorecka-Drzazga, A. / Malecki, K. / Nieradko, L. / Mroz, J. et al. | 2000
- 39
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Modified GC/MS system vs dedicated MS device: comparative application of e-nose for QC in automotive industryGarrigues, S. / Talou, T. / Nesa, D. et al. | 2000
- 41
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The Application of an electronic nose to the analysis of post-harvested fruitsDi Natale, C. / Mantini, A. / Macagnano, A. / Martinelli, E. / Paolesse, R. / D Amico, A. et al. | 2000
- 43
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An intelligent detector featuring real-time signal processing of temperature modulated gas sensor signalsOrtega, A. / Marco, S. / Perera, A. / Sundic, T. / Pardo, A. / Samitier, J. et al. | 2000
- 45
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Application of a micro-hotplate gas sensors array to the analysis of CO/CH~4 gas mixtures by pattern recognition and multicomponent analysis methodsCapone, S. / Siciliano, P. / Vasanelli, L. / Barsan, N. / Weimar, U. et al. | 2000
- 47
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Environmental electronic nose: detection of a halocarbon gas (Forane 134a) and carbon dioxide in a humidity controlled atmosphereDelpha, C. / Siadat, M. / Lumbreras, M. et al. | 2000
- 49
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CMOS humidity sensor with calibrated voltage outputQiu, Y. / Leme, C. A. / Franca, J. E. et al. | 2000
- 51
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Humidity micro sensors using silica acrogel thin filmsRuther, P. / Burg, M. / Steinert, C. / Paul, O. et al. | 2000
- 53
-
Micropatterned Electrochemical sensors for nitric oxide (NO) on the basis of self-assembled monolayers and electroactive polymersNann, T. / Dietrich, C. / Urban, G. A. et al. | 2000
- 55
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Application of chemical sensors to atmospheric pollution controlViricelle, J. P. / Pijolat, C. / Lalauze, R. et al. | 2000
- 57
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In-situ analysis of the conductance of SnO~2 crystalline nanoparticles in the presence of oxidizing or reducing atmosphere by scanning tunneling microscopyArbiol, J. / Gorostiza, P. / Cirera, A. / Cornet, A. / Morante, J. R. et al. | 2000
- 59
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Fast pulsed temperature mode operation: a viable way to improve the sensitivity and the selectivity in metal oxide gas sensorsElmi, I. / Nicoletti, S. / Cardinali, G. C. / Dori, L. / Masini, L. et al. | 2000
- 61
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Impact of different feature extraction methods on signal evaluation of sensors coated with differently doped SnO~2Hahn, S. / Barsan, N. / Weimar, U. et al. | 2000
- 63
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NO~2 sensitivity of nanoscaled SnO~2 work function sensorsKarthigeyan, A. / Gupta, R. P. / Scharnagl, K. / Burgmair, M. / Zimmer, M. / Sharma, S. K. / Eisele, I. et al. | 2000
- 65
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Tin oxide photoactivated thin film gas sensorsComini, E. / Faglia, G. / Sberveglieri, G. et al. | 2000
- 67
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A sol-gel derived AgCI Photochoromic coating on glass for SERS chemical sensor applicationVolkan, M. / Stokes, D. L. / Vo-Dinh, T. et al. | 2000
- 69
-
Innovative method of pulverisation coating of previously stabilized nanopowders for mass production of gas sensorsJimenez, I. / Cirera, A. / Lopez, O. / Cornet, A. / Morante, J. R. et al. | 2000
- 71
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Resonant photoemission on doped and undoped SnO~2 gas sensorsSinner-Hettenbach, M. / Barsan, N. / Weimar, U. / Weiss, T. / Ziegler, C. / von Schenk, H. / Gothelid, M. / Papageorgiou, N. / Terzian, J. / Layet, J. M. et al. | 2000
- 73
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The effect of Rh surface doping on DC and AC properties of thick film SnO~2 gas sensorsLicznerski, B. W. / Nitsch, K. / Teterycz, H. / Wisniewski, K. et al. | 2000
- 75
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Gas sensor on silicon platform with nano sized tin oxide layerFau, P. / Sauvan, M. / Nayral, C. / Erades, L. / Maisonnat, A. / Chaudret, B. et al. | 2000
- 77
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Preparation and characterization of SnO~2 and WO~x-SnO~2 nano-sized powders and thick films for gas sensingChiorino, A. / Ghiotti, G. / Prinetto, F. / Carotta, M. C. / Malagu, C. / Martinelli, G. et al. | 2000
- 79
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Reduction in false alarm rates for metal-oxide chemical sensor arraysWilson, D. / Chong, K. H. et al. | 2000
- 81
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Elaboration and characterization of tin oxide-lanthanum oxide mixed layers prepared by the electrostatic spray pyrolysis techniqueDiagne, E. H. A. / Lumbreras, M. et al. | 2000
- 83
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Ti and Au surface modifications of In~2O~3 thin films for NO~2 sensingSteffes, H. / Imawan, C. / Solzbacher, F. / Obermeier, E. et al. | 2000
- 85
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The influence of humidity to a sensitive behavior of In~2O~3-based sensorsIvanovskaya, M. / Bogdanov, P. / Barsan, N. / Kappler, J. et al. | 2000
- 87
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Nanoscaled In~2O~3 sensors: Practical aspects of stability and reproducibilityGurlo, A. / Ivanovskaya, M. / Kappler, J. / Barsan, N. / Weimar, U. et al. | 2000
- 89
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Spinel MgAl2O~4 as nitrogen monoxide reduction catalyst in amperometric zirconia-based sensorsMenil, F. / Coillard, V. / Lucat, C. et al. | 2000
- 91
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Sputtered MoO~3 multilayer thin films for H~2 detectionImawan, C. / Steffes, H. / Solzbacher, F. / Obermeier, E. et al. | 2000
- 93
-
Research on Mo-Ti-O thin films for gas-sensing applicationGuidi, V. / Casarotto, L. / Comini, E. / Ferroni, M. / Martinelli, G. / Sacerdoti, M. / Sberveglieri, G. et al. | 2000
- 95
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Nickel oxide thin films as gas sensorsHotovy, I. / Huran, J. / Siciliano, P. / Rella, R. / Spiess, L. / Rehacek, V. et al. | 2000
- 97
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Catalytic property of Pd/Al2O~3 and Pt/Al2O~3 multilayer stacksKhatko, V. V. / Soltis, R. E. / McBride, J. R. / Nietering, K. E. et al. | 2000
- 99
-
TiO~2 gas sensor for high temperature applicationsLucklum, R. / Zimmermann, B. / Hauptmann, P. / Kaufmann, C. / Gottfried, K. / Hoffmann, R. / Gessner, T. / Vogel, M. / Dietel, U. / Springer, G. et al. | 2000
- 101
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Gas-sensitive characteristics and morphology of reactive evaporated V~2O~5 thin filmsWollenstein, J. / Scheulin, M. / Jagle, M. / Bottner, H. et al. | 2000
- 103
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Infared spectroscopic study of the adsorption of oxygen on gas sensors based on WO~3 and AlVO~4 filmsPohle, R. / Fleischer, M. / Meixner, H. et al. | 2000
- 105
-
Low temperature hydrogen detection at high concentrations: comparison of platinum and iridiumScharnagl, K. / Karthigeyan, A. / Burgmair, M. / Zimmer, M. / Doll, T. / Eisele, I. et al. | 2000
- 107
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Hydrogen detection at high concentrations with stabilized palladiumScharnagl, K. / Erikson, M. / Karthigeyan, A. / Burgmair, M. / Zimmer, M. / Eisele, I. et al. | 2000
- 109
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The influence of the superthin metallic film structure on the gas sensitivity of the metal-silicon surface barrier sensorsIl chenko, V. V. / Bomk, O. I. / Il chenko, L. G. / Kuznetsov, G. V. et al. | 2000
- 111
-
Modifications of the metal gate to improve the stability of gas sensitive MIS devicesHedborg, E. / Eriksson, M. / Abom, L. / Lundstrom, I. et al. | 2000
- 113
-
Organic vapours detection using an integrated porous silicon deviceBarillaro, G. / Diligenti, A. / Nannini, A. / Pieri, F. et al. | 2000
- 115
-
Influence of gaseous species transport on the response of solid state gas sensors within enclosuresLezzi, A. / Beretta, G. P. / Comini, E. / Faglia, G. / Galli, G. et al. | 2000
- 117
-
A new robust oxygen sensor based on opto-chemical technologyGruber, W. / Bizzarri, A. / Trettnak, W. et al. | 2000
- 119
-
Stacked silicon microphonesMullenborn, M. / Rombach, P. / Klein, U. / Rasmussen, K. / Kuhmann, J. F. / Heschel, M. / Bouwstra, S. / Amskov, M. / Janting, J. / Hoogerwerf, A. et al. | 2000
- 121
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The first low voltage, low noise differential condenser microphoneRombach, P. / Mullenborn, M. / Klein, U. / Rasmussen, K. et al. | 2000
- 123
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Silicon microphone with high sensitivity diaphragm using SOI substrateFuldner, M. / Dehe, A. / Aigner, R. / Bever, T. / Kretschmer, H. R. / Lerch, R. et al. | 2000
- 125
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Air damping in resonant micromechanical capacitive sensorsMattila, T. / Hakkinen, P. / Jaakkola, O. / Kiihamaki, J. / Kyynarainen, J. / Oja, A. / Seppa, H. / Seppala, P. / Sillanpaa, T. et al. | 2000
- 127
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A novel silicon condenser microphone with single deeply corrugated diaphragm for improved sensitivityLi, X. / Lin, R. / Kek, H. / Miao, J. / Zou, Q. et al. | 2000
- 129
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Extending the capabilities of an antenna/chip biosensor by employing various insect speciesSchroth, P. / Schoning, M. J. / Luth, H. / Weissbecker, B. / Hummel, H. E. / Schutz, S. et al. | 2000
- 131
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Development of receptor based affinity microassayFrommichen, T. / Zimmermann, A. / Nann, T. / Urban, G. et al. | 2000
- 133
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Chip-integrated microfluidic system for cell sorting and cell culturingWolff, A. / Larsen, U. D. / Philip, J. / Telleman, P. et al. | 2000
- 135
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Total internal reflection ellipsometryPoksinski, M. / Dzuho, H. / Jarrhed, J.-O. / Arwin, H. et al. | 2000
- 137
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Rapid, sensitive, selective detection of pathogenic agents using a SQUID microscopeGrossman, H. L. / Chemla, Y. R. / Poon, Y. / Stevens, R. / Clarke, J. / Alper, M. D. et al. | 2000
- 139
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Towards an intrinsically safe, optically powered sensor systemBrignell, J. E. / Cathie, J. P. / Sargeant, D. et al. | 2000
- 141
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A wind-sensor interface based on thermal sigma-delta modulationMakinwa, K. A. A. / Huijsing, J. H. et al. | 2000
- 143
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A smart tactile piezo sensor for material recognitionBaglio, S. / Muscato, G. / Savalli, N. et al. | 2000
- 145
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A beam-forming transmit ASIC for driving ultrasonic arraysHatfield, J. V. / Al-Absi, M. K. / Chai, K. S. et al. | 2000
- 147
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Particle detection using an integrated capacitance sensorEvans, I. G. / Pokusevski, Z. / Dyakowski, T. / York, T. A. et al. | 2000
- 149
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High pressure silicon sensor with low-cost packagingBirkelund, K. / Gravesen, P. / Brandt, P. / Shiryaev, S. Y. et al. | 2000
- 151
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Charging effects in SiO~2 during anodic bonding measured on MOS-capacitors situated outside the bonding areaSchjolberg-Henriksen, K. / Dlugokinski, M. / Lapadatu, A. C. / Jensen, G. U. / Hanneborg, A. / Finstad, T. / Jacobsen, H. et al. | 2000
- 153
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Development of a new bonding technique for human skin humidity sensorsHanreich, G. / Nicolics, J. / Hauser, H. / Chabicovsky, R. et al. | 2000
- 155
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Conformal coatings for 3D multichip microsystem encapsulationJanting, J. / Branebjerg, J. / Rombach, P. et al. | 2000
- 157
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Mechanical characterization of flexible silicon microstructuresLisby, T. / Nikles, S. / Najafi, K. / Hansen, O. / Bouwstra, S. / Branebjerg, J. et al. | 2000
- 159
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New applications of self-assembled monolayers in chemical and biological sensorsMirsky, V. et al. | 2000
- 161
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pH-detection of triglyceridesPijanowska, D. G. / Torbicz, W. et al. | 2000
- 163
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Capillary electrochromatography chip integrated in cartridgeSolignac, D. / Constantin, S. / Sayah, A. / Freitag, R. / Gijs, M. A. M. et al. | 2000
- 165
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Polymer structures for micro-TASGeschke, O. / Rong, W. / Tang, P. T. / Kutter, J. P. / Telleman, P. et al. | 2000
- 167
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Microfluidic devices for biomedical applications: a cell chip for screening in clinical diagnosticsBlankenstein, G. / Osterloh, D. / Peters, R.-P. / Backes, H. et al. | 2000
- 169
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A low-voltage torsional actuator for application in RF-microswitchesPlotz, F. / Michaelis, S. / Aigner, R. / Timme, H. J. / Binder, J. / Noe, R. et al. | 2000
- 171
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Material considerations for topology optimised thermal microactuatorsJonsmann, J. / Bouwstra, S. et al. | 2000
- 173
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Theoretical analyses on a novel actuator based thermally actuated vertical bimorphsSehr, H. / Evans, A. G. R. / Brunnschweiler, A. / Kraft, M. et al. | 2000
- 175
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A miniature manipulator for integration in a self-propelling endoscopePeirs, J. / Reynaerts, D. / Brussel, H. V. et al. | 2000
- 177
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Large travel range, high accuracy inchworm-type stepper positionerCusin, P. / Sawai, T. / Konishi, S. et al. | 2000
- 179
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New P-I-N Si:H imager configuration for spatial resolution improvementFernandes, M. / Louro, P. / Martins, J. / Macarico, A. / Vieira, M. et al. | 2000
- 181
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Infrared micro-spectrometer based on a diffraction gratingKong, S. H. / Wijngaards, D. D. L. / Bartek, M. / Wolffenbuttel, R. F. et al. | 2000
- 183
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Two mask tunable optical filter of porous silicon as microspectrometerLammel, G. / Renaud, P. et al. | 2000
- 185
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A high-performance scintillator-silicon-well X-rays microdetector based on DRIE techniquesRocha, J. G. / Correia, J. H. et al. | 2000
- 187
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Reflective 2D pixelated membranes for micromachined spatial light modulatorsSakarya, S. / Vdovin, G. / Sarro, P. M. et al. | 2000
- 189
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Process integration for micromachined deformable micromirror batch fabricationCheng, M. / Chang, C. / Huang, W. / Huang, R. / Chang, P. et al. | 2000
- 191
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The emerging technology of electronic tongues or taste sensorsWinquist, F. et al. | 2000
- 193
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A flow-injection system based on the principles of "electronic tongue" for liquid sensingMortensen, J. / Legin, A. / Rudnitskaya, A. / Ipatov, A. / Makarychev-Mikhailov, S. / Vlasov, Y. et al. | 2000
- 195
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New technology for multi-sensor silicon needles for biomedical applicationsErrachid, A. / Ivorra, A. / Aguilo, J. / Villa, R. / Millan, J. / Zine, N. / Bausells, J. et al. | 2000
- 197
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Comparison and integration of QMB and SnO~2 sensor arrays in the case of olive oil quality analysisDi Natale, C. / Macagnano, A. / Mantini, A. / Paolesse, R. / D Amico, A. / Siciliano, P. / Rella, R. / Taurino, A. et al. | 2000
- 199
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Improvements in concentration-immune discrimination of chemicals using a SAW sensor array and multi-stage pattern recognitionWilson, D. / Roppel, T. et al. | 2000
- 201
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Electrochemical characterization of Prussian blue by using the ^EMOSFETAnh, D. T. V. / Olthuis, W. / Bergveld, P. et al. | 2000
- 203
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Gas sensing through thermionic emission from barium oxide at atmospheric pressureSchwebel, T. / Frank, J. / Fleischer, M. / Meixner, H. / Kohl, C.-D. et al. | 2000
- 205
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Electrophysical properties of diode-like SnO~2(Me)/Si gas sensorVasiliev, R. B. / Ryabova, L. I. / Rumyantseva, M. N. / Gaskov, A. M. et al. | 2000
- 207
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The role of structural factor in gas sensitive effects of SnO~2 thin filmsBrinzari, V. / Korotcenkov, G. / Schwank, I. / Golovanov, V. et al. | 2000
- 209
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The effect of metallic membranes on SnO~2 thin films sensing propertiesMontmeat, P. / Pijolat, C. / Tournier, G. / Viricelle, J. P. et al. | 2000
- 211
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Combination of metal oxyde based gas sensors with CMOS electronic circuits on wafer levelRoetsch, P. / Bottner, H. / Seibert, K. / Gotz, A. / Gracia, I. / Plaza, J. A. / Cane, C. et al. | 2000
- 213
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Membrane-type gas sensor with thick film sensing layer: optimization of heat lossVasiliev, A. A. / Pisliakov, A. V. / Zen, M. / Margesin, B. / Guarnieri, V. / Giacomozzi, F. / Brida, S. / Soncini, G. / Vincenzi, D. / Martinelli, G. et al. | 2000
- 215
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Highly sensitive triaxial silicon accelerometer with integrated PZT thin film detectorsKunz, K. / Enoksson, P. / Wright, R. / Stemme, G. et al. | 2000
- 217
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Resonant accelerometer with self-testAikele, M. / Bauer, K. / Ficker, W. / Neubauer, F. / Prechtel, U. / Schalk, J. / Seidel, H. et al. | 2000
- 219
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A planar gyroscope using a standard surface micromachining processAlper, S. E. / Akin, T. et al. | 2000
- 221
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Nonlinear resonance behaviour of tuning fork gyroscopesSchwarzelbach, O. / Eichholz, J. / Weiss, M. / Wenk, B. et al. | 2000
- 223
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Rate of turn sensing with a modified triaxial accelerometerKooi, B. J. / Olthuis, W. / Bergveld, P. et al. | 2000
- 225
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Ion-selective electrodes with sodium vanadium oxide as the internal reference elementSorensen, P. R. / Zachau-Christiansen, B. et al. | 2000
- 227
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A novel miniaturized sensor for carbon dioxide dissolved in liquidsFasching, R. / Keplinger, F. / Hanreich, G. / Jobst, G. / Urban, G. / Kohl, F. / Chabicovsky, R. et al. | 2000
- 229
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Amine monitoring by selective interaction with soluble phthalocyaninesSchuetz, P. / Fietzek, C. / Goerlach, B. / Hanack, M. / Weimar, U. et al. | 2000
- 231
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Microsensor for the measurement of water content in the human skinSekiguchi, N. / Komeda, T. / Funakubo, H. / Chabicovsky, R. / Nicolics, J. / Stangl, G. et al. | 2000
- 233
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Microwave resonators as humidity sensor using polysiloxane coatingsBernou, C. / Rebiere, D. / Pistre, J. / Chastaing, E. et al. | 2000
- 235
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Macroporous based micromachining on full wafersOhji, H. / Izuo, S. / French, P. J. / Tsutsumi, K. et al. | 2000
- 237
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Lateral porous alumina filters for planar nano-fluidic systemsDoll, T. / Scherer, A. et al. | 2000
- 239
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New porous silicon formation technology using internal current generation with galvanic elementsSplinter, A. / Sturmann, J. / Benecke, W. et al. | 2000
- 241
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Plasma assisted room temperature bonding for MSTAmirfeiz, P. / Weinert, A. / Bengtsson, S. et al. | 2000
- 243
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Low temperature full wafer adhesive bonding of structured wafersNiklaus, F. / Andersson, H. / Enoksson, P. / Stemme, G. et al. | 2000
- 245
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Sodium distribution in thin-film anodic bondingVisser, M. M. / Weichel, S. / Storas, P. / Shi, P. X. / de Reus, R. / Hanneborg, A. B. et al. | 2000
- 247
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Flip-chip hermetic packaging for MEMSPedersen, E. H. / Rombach, P. / Heschel, M. / Kuhmann, J. F. et al. | 2000
- 249
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Low temperature flip chip assembly of microsystemsGravad, M. A. / Heschel, M. / Rombach, P. et al. | 2000
- 251
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Pinhole free diamond film deposited on monocrystalline silicon by MW-CVD methodFurjes, P. / Csorbai, H. / Ducso, C. / Barsony, I. / Hars, G. / Deak, P. et al. | 2000
- 253
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Proton beam micromachining: A new tool for precision 3D microstructuresvan Kan, J. A. / Bettiol, A. A. / Wee, B. S. / Sum, T. C. / Osipowicz, T. / Watt, F. et al. | 2000
- 255
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Oblique powder blasting for three-dimensional micromachining of brittle materialsBelloy, E. / Pham, P. Q. / Sayah, A. / Gijs, M. A. M. et al. | 2000
- 257
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A novel method to surface micromachine silicon carbideAdas, C. / Kalvesten, E. / Konstantinov, A. / Karlsson, S. / Harris, C. et al. | 2000
- 259
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Fabrication of electrically insulated microchannels in siliconLichtenberg, J. / Lammel, G. / Oulevey, M. / Verpoorte, E. / Renaud, P. / de Rooij, N. F. et al. | 2000
- 261
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Patterning of polymide and metal in deep groovesKutchoukov, V. G. / Mollinger, J. R. / Bossche, A. et al. | 2000
- 263
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A study on the elimination of microcracks in a sparked silicon surfaceSong, X. / Reynaerts, D. / Meeusen, W. / van Brussel, H. et al. | 2000
- 265
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Particle precipitation in connection with KOH etchingNielsen, C. B. / Christensen, C. / Thomsen, E. V. et al. | 2000
- 267
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Investigation of TMAH for front-side bulk micromachining process from manufacturing aspectTsaur, J.-J. / Lin, Z. / Du, C.-H. / Lee, C. / Maeda, R. et al. | 2000
- 269
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A new approach towards the design of a vibration-based microelectrochemical generatorEl-Hami, M. / Glynne-Jones, P. / James, E. / Beeby, S. / White, N. M. / Brown, A. D. / Ross, J. N. / Hill, M. et al. | 2000
- 271
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Nanomechanical devices for mass detection realized by laser and atomic force microscope lithography and compatible with CMOS technologyAbadal, G. / Davis, Z. J. / Helbo, B. / Perez-Murano, F. / Campabadal, F. / Esteve, J. / Figueras, E. / Boisen, A. / Barniol, N. et al. | 2000
- 273
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Flexible transducer for biomechanical purposes and processing softwareVolf, J. / Sterba, P. / Vlcek, J. / Papezova, S. / Holy, S. et al. | 2000
- 275
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Effect of probe orientation and surface roughness on performance of a cone-jet sensorXie, T. / Yang, Q. / Jones, B. E. / Butler, C. et al. | 2000
- 277
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Automatic accuracy control for large aspect ratio multi-layer MEMS simulationMuller, J. / Korvink, J. G. et al. | 2000
- 279
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A study of CMOS cantilever microresonator in liquidsZhou, T. / Robinson, A. M. et al. | 2000
- 281
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Silicon slot microphone with new back plateKovacs, A. / Kronast, W. / Muller, B. / Stoffel, A. et al. | 2000
- 283
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Spring-mass resonator with a composite beam structure fabricated by hetero-micromachiningBehrens, I. / Peiner, E. / Fricke, K. / Bakin, A. / Schlachetzki, A. et al. | 2000
- 285
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Theory, modelling and characterization of PZT-on-alumina resonant piezo-layers as acoustic-wave mass sensorsFerrari, V. / Marioli, D. / Taroni, A. et al. | 2000
- 287
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Exploration of the piezojunction effect using PNP lateral transistors on [100] siliconFruett, F. / Meijer, G. C. M. et al. | 2000
- 289
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New approach to exact extraction of piezoresistance coefficientGniazdowski, Z. / Latecki, B. / Kowalski, P. et al. | 2000
- 291
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Ge-film resistance and Si-based diode temperature microsensors for cryogenic applicationsBoltovets, N. S. / Kholevchuk, V. V. / Konakova, R. V. / Mitin, V. F. / Venger, E. F. et al. | 2000
- 293
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The effect of blending polymer thick-film resistors with elastomers on the force sensitivity of the filmsPapakostas, T. V. / White, N. M. et al. | 2000
- 295
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Electrical current sensor of both high bandwidth and temperature rangeDidosyan, Y. S. / Hauser, H. et al. | 2000
- 297
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A novel residual current device (RCD) utilising artificial neural networksAdl, P. / Rakowski, R. T. et al. | 2000
- 299
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Wireless energy transfer for high power stand-alone systemsVandevoorde, G. / Puers, R. et al. | 2000
- 301
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A thin film blackbody structureBlomberg, M. / Letho, A. et al. | 2000
- 303
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Realisation of silicon microcalorimeters with bulk micromachining technologyMargesin, B. / Faes, A. / Pignatel, G. U. et al. | 2000
- 305
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Phase coincidence between ultrasound and microwaves-a powerful and flexible multisensor principleRuser, H. / Magori, V. et al. | 2000
- 307
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Laser interferometric measurement of displacement-field characteristics of piezoelectric actuators and actuator materialsMoilanen, H. / Leppavuori, S. et al. | 2000
- 309
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Micromachined membrane deformable mirrors for space applicationsVdovin, G. / Sarro, P. M. / Manhart, S. / Sodnik, Z. et al. | 2000
- 311
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A new scattering ellipsometerKirby, A. / Payne, P. A. et al. | 2000
- 313
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Advanced fiber-optical angular and linear displacement sensors and the latter as refractometerVerkelis, J. / Jankevicius, R. / Sarmaitis, R. et al. | 2000
- 315
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ITO/SiO~x/Si optical sensor with internal gainFernandes, M. / Vygranenko, Y. / Schwarz, R. / Vieira, M. et al. | 2000
- 317
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Functional testing of micromachined mechanical sensors on wafer levelBay, J. / Branebjerg, J. et al. | 2000
- 319
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Combined thick-film PZT/micromachined silicon accelerometerBeeby, S. P. / Ross, J. N. / White, N. M. et al. | 2000
- 321
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Aggressive media exposed differential pressure sensor with a deposited membraneBouaidat, S. / Eriksen, G. F. / de Reus, R. / Andersen, P. E. / Bouwstra, S. et al. | 2000
- 323
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A wireless batch sealed absolute capacitive pressure sensorAkar, O. / Akin, T. / Harpster, T. / Najafi, K. et al. | 2000
- 325
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New: MST stainless steel flowsensorLeussink, P. / Jansen, H. / Elwenspoek, M. et al. | 2000
- 327
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Is ellipsometry suitable for sensor applications?Arwin, H. et al. | 2000
- 329
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Refractive index measurements in very small samples of liquid: lower limits to measuring uncertainty with novel schemesImam, H. / Lindvold, L. / Lading, L. et al. | 2000
- 331
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Sensor system for indoor air monitoring using semiconducting metal oxides and IR absorptionFrank, J. / Meixner, H. et al. | 2000
- 333
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Absorbance measurements in the UV range in microsystems using silicon oxynitride waveguidesMogensen, K. B. / Friis, P. / Hubner, J. / Telleman, P. / Kutter, J. P. et al. | 2000
- 335
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Fluorescence detection of single molecules: state of the art and analytical applicationsEnderlein, J. et al. | 2000
- 337
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MEMS devices fabricated on spherical siliconToda, R. / Murzin, I. H. / Takeda, N. et al. | 2000
- 339
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Ultralight and flexible large area position sensitive detectorsFortunato, E. / Brida, D. / Ferreira, I. / Nunes, P. / Giuliani, F. / Martins, R. et al. | 2000
- 341
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Can pulsed laser deposition serve as an advanced technique in fabricating chemical sensors?Schoning, M. J. / Mourzina, Y. G. / Schubert, J. / Zander, W. / Legin, A. / Vlasov, Y. / Luth, H. et al. | 2000
- 343
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"Dry lift-off" patterning on fragile surfaces using MEMS shadow masksBrugger, J. / Otter, B. / Sanderink, J. / Smithers, M. et al. | 2000
- 345
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Powder blasting as a novel technique for realisation of capillary electrophoresis chipsSolignac, D. / Sayah, A. / Constantin, S. / Freitag, R. / Gijs, M. A. M. et al. | 2000
- 347
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Next generation nanotechnologies for sensor array fabricationMontelius, L. / Beck, M. / Heidari, B. / Ling, T. G. I. et al. | 2000
- 349
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Fabrication and testing of custom vacuum encapsulations deposited by focused ion beam direct-write CVDReyntjens, S. / Puers, R. et al. | 2000
- 351
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Scanning nano- and micro-four-point probesHansen, T. M. / Boggild, P. / Kuhn, O. / Grey, F. et al. | 2000
- 353
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Piezoresistive AFM probe with sputtered silicon tipRasmussen, P. A. / Thaysen, J. / Bouwstra, S. / Boisen, A. et al. | 2000
- 355
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Novel micromachined photoplastic probe for scanning near-field optical microscopyGenolet, G. / Cueni, T. / Bernal, M. / Despont, M. / Vettiger, P. / Marquis-Weible, F. / de Rooij, N. F. et al. | 2000
- 357
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Low energy electron transmissive MEMS window for in-situ electron microprobeDoll, T. / Hochberg, M. / Scherer, A. et al. | 2000
- 359
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CO-CH4 selectivity enhancement by in-situ Pd-catalysed microwave SnO~2 nanoparticles for gas detectors using active filterCirera, A. / Cabot, A. / Cornet, A. / Morante, J. R. et al. | 2000
- 361
-
Gold and platinum as ozone sensitive layer in work-function gas sensorsZimmer, M. / Burgmair, M. / Scharnagl, K. / Karthigeyan, A. / Doll, T. / Eisele, I. et al. | 2000
- 363
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Gas sensor with electroacoustically coupled resonatorGranstedt, F. / Folke, M. / Backlund, Y. / Hok, B. et al. | 2000
- 365
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Ultrasensitive sensors for mercury vapor: self-assembled monolayers as selective monomolecular filters and technique of calibrated nanoinjectionsVasjari, M. / Mirsky, V. / Tvarozek, V. / Novotny, I. / Rehacek, V. / Wolfbeis, O. S. et al. | 2000
- 367
-
A microfabricated high pressure bipropellant rocket engineLondon, A. / Epstein, A. / Ayon, A. / Spearing, S. M. / Harrison, T. / Kerrebrock, J. et al. | 2000
- 369
-
Magnetorheologic fluids for actuatorsZipser, L. / Richter, L. / Lange, U. et al. | 2000
- 371
-
A simple selfpriming bubble-tolerant peristaltic micropumpVeenstra, T. T. / Berenschot, J. W. / Sanders, R. G. P. / Gardeniers, J. G. E. / Elwenspoek, M. C. / van den Berg, A. et al. | 2000
- 373
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A study of the velocity field of the hydrodynamically developed flow in a hexagonal ductDamean, N. / Regtien, P. P. L. et al. | 2000
- 375
-
Determination of fluid and flow parameters using heat transfervan Baar, J. J. / Wiegerink, R. J. / Krijnen, G. J. M. / Elwenspoek, M. C. et al. | 2000
- 377
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Tracking system with five degrees of freedom using a 2D-array of Hall sensors and a permanent magnetSchlageter, V. / Besse, P.-A. / Popovic, R. S. / Kucera, P. et al. | 2000
- 379
-
Influence of silicon anisotropy on the sensitivity of Hall devices and on the accuracy of magnetic angular sensorsBurger, F. / Besse, P.-A. / Popovic, R. S. et al. | 2000
- 381
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Magnetic position sensor based on nanocrystalline colossal magnetoresistancesGonzalez, O. J. / Castano, E. / Castellano, J. C. / Gracia, F. J. et al. | 2000
- 383
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Non destructive evaluation sensor based on the magnetostrictive delay line techniqueHristoforou, E. / Niarchos, D. / Chiriac, H. / Neagu, M. et al. | 2000
- 385
-
A new magnetic sensor based on plasma Hall effectSeo, Y.-H. / Han, K.-H. / Cho, Y.-H. et al. | 2000
- 387
-
Multicomponent analysis and prediction with a cantilever array based gas sensorKim, B. H. / Prins, F. E. / Kern, D. P. / Raible, S. / Weimar, U. et al. | 2000
- 389
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Dynamic PCA analysis to distinguish the rancidity of milk by means of a semiconductor thin films based electronic noseCapone, S. / Epifani, M. / Quaranta, F. / Rella, R. / Siciliano, P. / Vasanelli, L. et al. | 2000
- 391
-
A novel class of smart gas sensors using CMOS micro-heaters embedded in an SOI membraneUdrea, F. / Setiadi, D. / Gardner, J. W. / Covington, J. A. / Lu, C. C. et al. | 2000
- 393
-
Study of the interaction between volatile compounds and solid state porphyrin films through the transduction of mass, conductivity and dielectric constantDi Natale, C. / Birindelli, A. / Macagnano, A. / Paolesse, R. / Nardis, S. / D Amico, A. et al. | 2000
- 395
-
Thin Films of Porphyrins and cavitands: comparison of the sensing performances towards the detection of volatile organic compoundsPaolesse, R. / Di Natale, C. / Dalcanale, E. / Macagnano, A. / Nardis, S. / D Amico, A. et al. | 2000
- 397
-
Software-based design kits for improved microsystems design in a verified simulation environmentMcNie, M. E. / King, D. O. / Brunson, K. M. / Davies, R. R. / Price, N. / Hsu, C. / van Kuijk, J. / Bart, S. F. et al. | 2000
- 399
-
Simulation tool to improve piezoresistive microsensors used for monitoring ball bondingOsorio, R. / Mayer, M. / Schwitzer, J. / Baltes, H. / Korvink, J. G. et al. | 2000
- 401
-
Temperature distribution on semiconductor dew point hygrometer mirrorsWeremczuk, J. / Gniazdowski, Z. / Lysko, J. / Jachowicz, R. et al. | 2000
- 403
-
Numerical simulation of zero mass-flux actuatorsMallinson, S. G. / Kwok, C. Y. / Reizes, J. A. et al. | 2000
- 405
-
Mechanical impact of coatings on membranesHansen, M. S. / de Reus, R. / Bouwstra, S. / Eriksen, G. F. et al. | 2000
- 407
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Low power gas detection with FET sensorsEisele, I. / Doll, T. et al. | 2000
- 409
-
New resonse patterns for MOSFET gas sensors using low-power devicesBriand, D. / van der Schoot, B. / Sundgren, H. / Ekedahl, L.-G. / Lundstrom, I. / de Rooij, N. F. et al. | 2000
- 411
-
Low-power gas sensors based on work function measurement in low-cost hybrid flip-chip technologyFleischer, M. / Ostrick, B. / Pohle, R. / Simon, E. / Meixner, H. / Bilger, C. / Daeche, F. et al. | 2000
- 413
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A novel Ge-As-Te based gas sensor selective to low NO~2 concentrations in ambient airMarian, S. / Tsiulyanu, D. / Potje-Komloth, K. / Liess, H.-D. et al. | 2000
- 415
-
New NO~2 sensor based on Au gate field effect devicesFilippini, D. / Weiss, T. / Aragon, R. / Weimar, U. et al. | 2000
- 417
-
GMI in stress-annealed Co~7~7Fe~8B~1~5 amorphous ribbons for stress-sensor applicationsPirota, K. R. / Kraus, L. / Fendrych, F. / Svec, P. et al. | 2000
- 419
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Intelligent system of magnetic field monitoring to be used under radiation operating conditionsBolshakova, I. / Golyaka, R. et al. | 2000
- 421
-
Novel integrated 3-D silicon Hall magnetometerRoumenin, C. / Dimitrov, K. / Ivanov, A. et al. | 2000
- 423
-
AC magnetic field sensors: Fluxgate versus induction coilKaspar, P. / Ripka, P. et al. | 2000
- 425
-
Excitation of fluxgate sensorsRipka, P. et al. | 2000
- 427
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Magnetic fluids around linear electric currents: theoretical and experimental bases for new type of sensors and actuatorsBuioca, C. D. / Iuasan, V. / Stanci, A. et al. | 2000
- 429
-
Sensitive direct driven fluxgate sensor with hairpin amorphous wire coreDiaconu, E. D. / Ioan, C. / Moldovanu, A. / Moldovanu, E. / Chiriac, H. / Borza, F. / Macoviciuc, M. / Macovei, C. et al. | 2000
- 431
-
Miniaturized magnetostrictive delay line arrangement using multilayer-like structureChiriac, H. / Pletea, M. / Hristoforou, E. / Neagu, M. et al. | 2000
- 433
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Investigation of different semiconductor substrates for an optimized light-addressable potentiometric sensor (LAPS)George, M. / Stein, B. / Parak, W. J. / Kudera, S. / Schmidt, C. / Gaub, H. E. et al. | 2000
- 435
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A low-voltage integrated CMOS analog lock-in amplifier for LAPS applicationsFerri, G. / De Laurentiis, P. / D Amico, A. / Di Natale, C. et al. | 2000
- 437
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Biomedical charge sensitive converterSakalauskas, S. / Smilga, A. P. et al. | 2000
- 439
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Exploring limits for the design of a miniaturized contactless conductivity detector for on-chip capillary electrophoresisLaugere, F. / Lubking, G. W. / Berthold, A. / Bastemeijer, J. / Vellekoop, M. J. et al. | 2000
- 441
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ISFET based immune sensor for simazineStarodub, V. M. / Dzantiev, B. B. / Starodub, N. F. / Zherdev, A. V. et al. | 2000
- 443
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Durability of phosphate-selective CHEMFETsWroblewski, W. / Wojciechowski, K. / Dybko, A. / Brzozka, Z. / Egberink, R. J. M. / Snellink-Ruel, B. H. M. / Reinhoudt, D. N. et al. | 2000
- 445
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A micromachined glass electrode pH sensorMesuraca, P. / Nannini, A. / Piotto, M. et al. | 2000
- 447
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Analytical advantages of monitoring the frequency at minimum impedance of a thickness shear mode acoustic wave sensorTeresa, M. / Gomes, S. R. / Verissimo, M. I. S. / Oliveira, J. A. B. P. et al. | 2000
- 449
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Enzyme modified membranes protected by plasma polymer layersKiesow, A. / Heilmann, A. / Janasek, D. / Spohn, U. et al. | 2000
- 451
-
Comparative kinetic studies of the Berthelot reaction for ammonia determination in microfluidic and spectrophotometric systemsDaridon, A. / Pennarun-Thomas, G. / Sequeira, M. / Lichtenberg, J. / Verpoorte, E. / Diamond, D. / de Rooij, N. F. et al. | 2000
- 453
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Diagnosis of virus induced diseases by immunosensor based on immobilised antigensRamanaviciene, A. / Vilkanauskyte, A. / Acaite, J. / Ramanavicius, A. et al. | 2000
- 455
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Immune sensor based on the SPR for determination of Erwinia Amylovora in solutionStarodub, N. F. / Pyrogova, L. V. / Starodub, V. M. / Dibrova, T. L. / Gvozdjak, R. I. et al. | 2000
- 457
-
Absorbance detection in microsystems: microcuvette and waveguide approachDenninger, M. / Mogensen, K. B. / Geschke, O. / Friis, P. / Telleman, P. / Kutter, J. P. et al. | 2000
- 459
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Multi-ion analysis using versatile sensor headChudy, M. / Wroblewski, W. / Dybko, A. / Brzozka, Z. et al. | 2000
- 461
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Development of an amperometric detector applicable to the commercialized enzyme-immunoassay (EIA) kitsPyun, J. C. / Lee, H. H. / Lee, C. S. et al. | 2000
- 463
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Shuttle electron transfer in tethered mediator biosensorVoinova, M. V. / Gorelik, L. Y. / Jonson, M. / Shekhter, R. I. et al. | 2000
- 465
-
Thin film microsensors for fast heavy metal ion analysisMourzina, Y. / Schoning, M. J. / Schubert, J. / Zander, W. / Legin, A. / Vlasov, Y. / Luth, H. et al. | 2000
- 467
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Penicillin detection by means of field-effect based sensors: EnFET, capacitive EIS sensor or LAPS?Poghossian, A. / Yoshinobu, T. / Simonis, A. / Ecken, H. / Luth, H. / Schoning, M. J. et al. | 2000
- 469
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DP flow sensor using optical fibre Bragg gratingsLim, J. / Yang, Q. P. / Jones, B. E. / Jackson, P. R. et al. | 2000
- 471
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Differential injection analysis based on ISFET sensorsAcero, M. C. / Errachid, A. / Baldi, T. / Perez-Castillejos, R. / Esteve, J. / Garcia, N. / Diez-Caballero, T. et al. | 2000
- 473
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Amperometric detection of glucose and ethanol in beverages using flow cell and immobilised on carbon PQQ-dependent glucose and alcohol dehydrogenasesRazumiene, J. / Meskys, R. / Gureviciene, V. / Kurtinaitiene, B. / Laurinavicius, V. et al. | 2000
- 475
-
Disposable QCM-immunosensor for practical qualitative and quantitative diagnosisSakti, S. P. / Hauptmann, P. / Zimmermann, B. / Buhling, F. / Ansorge, S. et al. | 2000
- 477
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Detection of TDG vapors by tin dioxide chemical sensors: Study of interaction mechanismsPetitin, L. / Berger, F. / Mavon, C. / Chambaudet, A. et al. | 2000
- 479
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New structures for improving the sensitivity of FET based chemical sensorsTemple-Boyer, P. / Launay, J. / Hajji, B. / Sarrabayrousse, G. / Martinez, A. et al. | 2000
- 481
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Characterisation of a cell-based biosensor employing the technique of the light-addressable potentiometric sensor (LAPS)George, M. / Parak, W. J. / Domke, J. / Radmacher, M. / Behrends, J. C. / Denyer, M. C. / Offenhauesser / Gaub, H. E. et al. | 2000
- 483
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On-line flow monitoring in a microdialysis systemErnst, H. / Urban, G. / Jachimowicz, A. / Jobst, G. / Moser, I. et al. | 2000
- 485
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High-selectivity optical detection in microfluidic systems for clinical diagnosticsMinas, G. / Martins, J. S. / Correia, J. H. et al. | 2000
- 487
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Design and flow strategies of a pressure driven micro-TAS sensor with short response time and low reagent consumptionDirac, H. / Krog, J. P. / Gravesen, P. / Bunk, B. / Fabius, B. et al. | 2000
- 489
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Reference microelectrodes design evaluation for on-chip ISFET based microsensors for "in-vivo" blood measurementsRoubik, K. / Palan, B. / Santos, F. V. et al. | 2000
- 491
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Electrochemical impedance spectroscopy (EIS) as a platform for reagentless bioaffinity sensingLillie, G. / Payne, P. / Vadgama, P. et al. | 2000
- 493
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Electrodes for enzyme based determination in the micro- to nano-regimeLing, T. G. I. / Beck, M. / Montelius, L. et al. | 2000
- 495
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Integrated shape sensor for particles and cells based on optical projectionNieuwenhuis, J. H. / Lubking, G. W. / Vellekoop, M. J. et al. | 2000
- 497
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Active bridge polymeric resistive device for vapour sensingCole, M. / Gardner, J. W. / Covington, J. A. / Fife, D. / Brignell, J. E. / Bartlett, P. H. et al. | 2000
- 499
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Symmetrical core improves micro-fluxgate sensorsRipka, P. / Choi, S. O. / Tipek, A. / Kawahito, S. / Ishida, M. et al. | 2000
- 501
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Integrated angular measurement system with online diagnosisDietmayer, K. C. J. et al. | 2000
- 503
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Novel three-dimensional millimetre-size transformer for low power applicationsBornand, E. / Amalou, F. / Gijs, M. A. M. et al. | 2000
- 505
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Angle rotation characteristics of FeMn spin-valvesJohnson, A. / Tietjen, D. / Schneider, C. M. et al. | 2000
- 507
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Electroplating and characterization of cobalt-nickel-iron and nickel-iron for magnetic microsystems applicationsRasmussen, F. E. / Ravnkilde, J. T. / Tang, P. T. / Hansen, O. / Bouwstra, S. et al. | 2000
- 509
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High temperature Ga~2O~3-gas sensors and SnO~2 gas sensors: a comparisonHoefer, U. et al. | 2000
- 511
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On the mechanism of hydrogen sensing with SiO~2 modificated high temperature Ga~2O~3 sensorsWeh, T. / Frank, J. / Fleischer, M. / Meixner, H. et al. | 2000
- 513
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The room temperature ammonia sensor based on improved Cu~xS-porous-Si structureSetkus, A. / Ancutiene, I. / Galdikas, A. / Ingo, G. M. / Janickis, V. / Kaciulis, S. / Mattogno, G. / Mironas, A. / Strazdiene, S. / Simkiene, I. et al. | 2000
- 515
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A highly stable SiC based micro hotplate NO~2 gas sensorSolzbacher, F. / Steffes, H. / Imawan, C. / Obermeier, E. et al. | 2000
- 517
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MISiC Schottky diodes and transistors as NH~3 sensors in diesel exhausts to control SCRSvenningstorp, H. / Tobias, P. / Salomonssen, P. / Haggendal, B. / Lundstrom, I. / Ekedahl, L.-G. / Spetz, A. L. et al. | 2000