Experimental determination of aberration in lithographic lens by aerial image [8169-09] (English)
- New search for: Duan, L.
- New search for: Wang, X.
- New search for: Yan, G.
- New search for: Bourov, A.
- New search for: SPIE (Society)
- New search for: Duan, L.
- New search for: Wang, X.
- New search for: Yan, G.
- New search for: Bourov, A.
- New search for: Duparre, A.
- New search for: Geyl, R.
- New search for: SPIE (Society)
In:
Optical fabrication, testing, and metrology
;
8169 09
;
2011
-
ISBN:
-
ISSN:
- Conference paper / Print
-
Title:Experimental determination of aberration in lithographic lens by aerial image [8169-09]
-
Contributors:Duan, L. ( author ) / Wang, X. ( author ) / Yan, G. ( author ) / Bourov, A. ( author ) / Duparre, A. / Geyl, R. / SPIE (Society)
-
Conference:Conference; 4th, Optical fabrication, testing, and metrology ; 2011 ; Marseille, France
-
Published in:PROCEEDINGS - SPIE THE INTERNATIONAL SOCIETY FOR OPTICAL ENGINEERING ; 8169 ; 8169 09
-
Publisher:
- New search for: SPIE
-
Place of publication:Bellingham, Wash.
-
Publication date:2011-01-01
-
Size:8169 09
-
Remarks:Includes bibliographical references and index
-
ISBN:
-
ISSN:
-
Type of media:Conference paper
-
Type of material:Print
-
Language:English
-
Keywords:
-
Source:
© Metadata Copyright the British Library Board and other contributors. All rights reserved.
Table of contents conference proceedings
The tables of contents are generated automatically and are based on the data records of the individual contributions available in the index of the TIB portal. The display of the Tables of Contents may therefore be incomplete.
- 81690A
-
Wavefront reconstruction and piston measurement using Ronchi testPenalver, Dayana H. / Granados-Agustin, Fermin / Romero-Antequera, David L. et al. | 2011
- 81690C
-
Wafer-level micro-optics: trends in manufacturing, testing, and packagingVoelkel, Reinhard / Weible, Kenneth J. / Eisner, Martin et al. | 2011
- 81690D
-
Fabrication and testing of highly efficient resonance domain diffractive optical elementsBarlev, Omri / Golub, Michael A. / Friesem, Asher A. / Mahalu, Diana / Nathan, Menachem et al. | 2011
- 81690E
-
Method for the characterization of Fresnel lens flux transfer performanceMartinez Antón, Juan Carlos / Vázquez Moliní, Daniel / Muñoz de Luna, Javier / Gómez Pedrero, José Antonio / Fernández-Balbuena, Antonio Álvarez et al. | 2011
- 81690G
-
Manufacturing, testing, and metrology of axi-symmetric circular phase masks for stellar coronagraphyN'Diaye, Mamadou / Dohlen, Kjetil / Tisserand, Stéphane / Gautier, Sophie / El Hadi, Kacem / Moreaux, Gabriel / Soummer, Rémi / Cuevas, Salvador / Sánchez-Pérez, Celia et al. | 2011
- 81690H
-
Fabrication of bilayer wire grid polarizer using replicated polymer nano gratingHan, Yunah / Kim, Jwasun / Byeon, Euihyeon / Kim, Seok-Min / Lee, Yong-ho / Hwangbo, Chang Kwon et al. | 2011
- 81690K
-
Multimodal scattering facilities and modelization tools for a comprehensive investigation of optical coatingsZerrad, Myriam / Lequime, Michel / Amra, Claude et al. | 2011
- 81690N
-
Spectrophotometric bench dedicated to the characterization of micro-patterned optical coatingsSorce, Stéphane / Abel-Tiberini, Laetitia / Lequime, Michel et al. | 2011
- 81690O
-
SCPEM-based polarization modulation ellipsometry in the NIRBammer, F. / Petkovsek, R. et al. | 2011
- 81690P
-
Roughness characterization of large EUV mirror optics by laser light scatteringTrost, Marcus / Schröder, Sven / Feigl, Torsten / Duparré, Angela / Tünnermann, Andreas et al. | 2011
- 81690Q
-
3D features measurement using YieldStar: an angle resolved polarized scatterometerCharley, Anne-Laure / Leray, Philippe / D'havé, Koen / Cheng, Shaunee / Hinnen, Paul / Li, Fahong / Vanoppen, Peter / Dusa, Mircea et al. | 2011
- 81690R
-
Impact of surface roughness on the scatter losses and the scattering distribution of surfaces and thin film coatingsSchröder, Sven / Herffurth, Tobias / Duparré, Angela / Harvey, James E. et al. | 2011
- 81690T
-
Isara 400 ultra-precision CMMSpaan, H. A. M. / Widdershoven, I. et al. | 2011
- 81690V
-
Non-contact measurement of aspherical and freeform optics with a new confocal tracking profilerPintó, Agustí / Laguarta, Ferran / Artigas, Roger / Cadevall, Cristina et al. | 2011
- 81690W
-
Phase-shifting fringe projection system using freeform opticsZwick, Susanne / Kühmstedt, Peter / Notni, Gunther et al. | 2011
- 81690X
-
Data handling and representation of freeform surfacesSteinkopf, Ralf / Dick, Lars / Kopf, Tino / Gebhardt, Andreas / Risse, Stefan / Eberhardt, Ramona et al. | 2011
- 81690Y
-
Adaptive two-beam interferometer for testing optical surfacesMiks, Antonin / Novak, Jiri / Novak, Pavel et al. | 2011
- 81690Z
-
Adaptive null test system using a ferrofluid deformable mirrorLandry, Daniel B. / Brousseau, Denis / Thibault, Simon / Borra, Ermanno F. et al. | 2011
- 816901
-
Front Matter: Volume 8169| 2011
- 816902
-
MRF with adjustable pHJacobs, Stephen D. et al. | 2011
- 816903
-
Stress polishing of E-ELT segment at LAM: full-scale demonstrator statusLaslandes, Marie / Rousselet, Nicolas / Ferrari, Marc / Hugot, Emmanuel / Floriot, Johan / Vivès, Sébastien / Lemaitre, Gérard / Carré, Jean François / Cayrel, Marc et al. | 2011
- 816904
-
Manufacturing and testing of the large lenses for Dark Energy Survey (DES) at SESOFappani, Denis / Fourez, Julien / Doel, Peter / Brooks, David / Flaugher, Brenna et al. | 2011
- 816905
-
TMA optics for HISUI HSS and MSS imagersGeyl, R. / Leplan, H. / Rodolfo, J. et al. | 2011
- 816906
-
Fused silica long-term stability: case studiesVannoni, Maurizio / Sordini, Andrea / Molesini, Giuseppe et al. | 2011
- 816907
-
Metrology for an imaging Fourier transform spectrometer working in the far-UV (IFTSUV)Ruiz de Galarreta Fanjul, C. / Philippon, A. / Vial, J.-C. / Maillard, J.-P. / Appourchaux, T. et al. | 2011
- 816909
-
Experimental determination of aberration in lithographic lens by aerial imageDuan, Lifeng / Wang, Xiangzhao / Yan, Guanyong / Bourov, Anatoly et al. | 2011
- 816910
-
Optical method for the surface topographic characterization of Fresnel lensesMartínez Antón, Juan Carlos / Gómez Pedrero, José Antonio / Alonso Fernández, José / Quiroga, Juan Antonio et al. | 2011
- 816912
-
Extremely aspheric surfaces: toward a manufacturing process based on active opticsChallita, Zalpha / Hugot, Emmanuel / Ferrari, Marc / Le Mignant, David / Vivès, Sébastien / Cuby, Jean-Gabriel et al. | 2011
- 816913
-
Two-dimensional thickness measurement of a dielectric thin layer on a metal by use of surface-plasmon-resonance-based ellipsometryIwata, Tetsuo / Wada, Yusuke / Nishigaki, Kentaro / Mizutani, Yasuhiro et al. | 2011
- 816914
-
Wavefront instabilities in thin glass mirrorsBouillet, Stéphane / Lanternier, Thomas / Lavastre, Eric / Chappuis, Christian / Macias, François et al. | 2011
- 816915
-
Absolute calibration of three reference flats based on an iterative algorithm: study and implementationMorin, Chloé / Bouillet, Stéphane et al. | 2011
-
Manufacturing and testing of the large lenses for Dark Energy Survey (DES) at SESO [8169-03]Fappani, D. / Fourez, J. / Doel, P. / Brooks, D. / Flaugher, B. / SPIE (Society) et al. | 2011
-
Two-dimensional thickness measurement of a dielectric thin layer on a metal by use of surface-plasmon-resonance-based ellipsometry [8169-40]Iwata, T. / Wada, Y. / Nishigaki, K. / Mizutani, Y. / SPIE (Society) et al. | 2011
-
Fused silica long-term stability: case studies [8169-05]Vannoni, M. / Sordini, A. / Molesini, G. / SPIE (Society) et al. | 2011
-
Wavefront reconstruction and piston measurement using Ronchi test [8169-10]Penalver, D.H. / Granados-Agustin, F. / Romero-Antequera, D.L. / SPIE (Society) et al. | 2011
-
Stress polishing of E-ELT segment at LAM: full-scale demonstrator status [8169-02]Laslandes, M. / Rousselet, N. / Ferrari, M. / Hugot, E. / Floriot, J. / Vives, S. / Lemaitre, G. / Carre, J.F. / Cayrel, M. / SPIE (Society) et al. | 2011
-
Metrology for an imaging Fourier transform spectrometer working in the far-UV (IFTSUV) [8169-06]de Galarreta Fanjul, C.R. / Philippon, A. / Vial, J.-C. / Maillard, J.-P. / Appourchaux, T. / SPIE (Society) et al. | 2011
-
MRF with adjustable pH (Invited Paper) [8169-01]Jacobs, S.D. / SPIE (Society) et al. | 2011
-
Experimental determination of aberration in lithographic lens by aerial image [8169-09]Duan, L. / Wang, X. / Yan, G. / Bourov, A. / SPIE (Society) et al. | 2011
-
Wavefront instabilities in thin glass mirrors [8169-41]Bouillet, S. / Lanternier, T. / Lavastre, E. / Chappuis, C. / Macias, F. / SPIE (Society) et al. | 2011
-
Extremely aspheric surfaces: toward a manufacturing process based on active optics [8169-38]Challita, Z. / Hugot, E. / Ferrari, M. / Le Mignant, D. / Vives, S. / Cuby, J.-G. / SPIE (Society) et al. | 2011
-
TMA optics for HISUI HSS and MSS imagers [8169-04]Geyl, R. / Leplan, H. / Rodolfo, J. / SPIE (Society) et al. | 2011
-
Absolute calibration of three reference flats based on an iterative algorithm: study and implementation [8169-42]Morin, C. / Bouillet, S. / SPIE (Society) et al. | 2011